The deformation between interface, adhesion mechanism and the transparency of multi-layer flexible electronics composite were discussed. First, ITO (Indium Tin Oxide), Al (Aluminum) and ZnO (Zinc Oxide) were sputtered on a PET (Poly Ethylene Terephthalate) substrate by PVD (Physical Vapor Deposition) sequentially, to form ZnO/ITO/PET and ZnO/Al/PET which is the essential multi-layer structure in the transducer of flexible electronics. ITO/PET structure was widely applied to the touch panel. PET substrate possesses a good optical penetrability, low thermal expansion coefficient and lower price. However, the heat-resisting and chemical stability are poor. In this study, we explore the feasibility of the PDMS (Polydimethylsiloxane) substrate. It not only possesses good optical penetrability, but also exhibits higher PH selectivity than PET. In the analysis, the periodic external force was pressed on the flexible composite films to realize the difference between before and after experiment. Then the composite films were examined by nanoindentation and nanoscratch system (Berkovich and Conical probe with the radius of curvature of 20nm and 10um), four-point probe and spectrometer to measure the mechanical, electrical and optical properties, respectively. To investigate the effect of external force on these composite films, the interaction of films was discussed through external force testing by nanoscratch test.