This thesis presents Photocatalytic TiOx layers created by own PECVD reactor assembled in the building of Department of Applied Physics and Technics. Parameters of depositions were optimalized as well as the PECVD reactor itself. Final layers are compared to layers made by Degussa P25. As a result based on the included measurements, this thesis tries to answer the question whether PECVD is the suitable method for depositions of photocatalytic layers.

Master’s thesis deals with synthesis of anatase and its anion doping by carbo-nitridation. Prepared samples were used for testing of the photocatalytic activity. Low-temperature anatase was synthesized at 80 °C for 6 hours and carbo-nitridatation was carried out in ammonia/tetrachloromethane atmosphere at 500 °C for 3 hours. The influence of silver content on low-temperature crystallization of anatase was studied by reaction of titanium tetraisopropoxide with water. Silver nanoparticles were prepared by reduction of silver nitrate by D-glukose and sodium citrate. One of the results is the draft for one-pot synthesis of anatase by titanium tetraisopropoxide with complexing agent (sodium citrate, ammonium citrate, citric acid). The study of photocatalysis water splitting was carried out in the presence of 20 % vol. of methanol. Anatase prepared with citric acid has the highest photocatalytic activity (Pt 0,5 %) in UV/VIS spectral region. The activity achieved 38,6 % effectiveness of TiO2 standard (Degussa P25). Doping by nitrogen didn’t lead to increase of photocatalytic activity.