The fabrication characteristic of focused ion beam (FIB) for fused quartz was investigated. With the progress of nanotechnology, new technologies and devices are invented constantly. In nanofabrication, FIB has several advantages such as high material removal rate, high resolving power and direct fabrication in some selected areas without etching mask. Therefore, it had been studied in detail to fabricate nano-structures by FIB. In this study, we found out the effect of nano-machining by adjusting the parameters of FIB system such as: beam current, overlap, and dwell time. The fabricated features together with their surface morphology and profile were investigated by scanning electron microscope (SEM) and atomic force microscope (AFM). Results show that when beam current was smaller, overlap was 50% and dwell time was 10£gs could get best performance by FIB.

Bulk laser-induced breakdown and self-focusing in single samples of fused quartz and NaCl were examined using picosecond optical pulses at 1.0 ym and 0.5 ym. The results of three separate but related experiments are reported. First the nonlinear index of refraction, n2, of each of the test materials is measured near the respective damage thresholds of the samples. The values of 1*2 were determined by detecting beam distortions in the far field, transmitted laser beam profile caused by the irradiance dependent index of refraction. The experimental traces were compared to theoretical beam profiles generated by a nonlinear propagation code and n2 was extracted from the resulting fits.