This paper presents the research on the robust control of micromachined accelerometers. First, we present different micromaching techniques and compare, analyze the accelerometers with different methods of signal pick-off. Besides the different methods of signal pick-off(the position detection of the seismic mass) and structure designs, we can enhance the performance such as stability, bandwidth, sensitivity, resolution and dynamic range etc. by suitable feedback controllers. So inside the front part of the paper are the analyses for the controllers of different types of accelerometers so far. Moreover, we design the controllers by robust control in different methods with the model of one specific type of micromachined tunneling accelerometer. Because of the robust controllers, the accelerometers can be stable and have good performance under different environments and uncertainties. At last we analyze and compare the controllers designed by -synthesis and gap metric.

This dissertation deals with frequency domain identification of linear dynamic systems in a deterministic set-up. Various untuned algorithms are suggested, including one which is robustly convergent and asymptotically optimal (in n-width sense) for a finite model order. The suggested algorithms can easily be implemented in commercially available software for convex optimization.

In this paper, the gap metric is introduced to study the robustness of the stability of feedback systems. A relation between the gap metric and coprime fractions is also investigated. It is shown that the stability radius of the controller in the gap metric is equal to the stability margin of the controller. In the loop-shaping design procedure in the £h-gap metric, it is practically hard to formulate an ideal controller. Finally, this paper studied the conservatism of the gap metric, and proposed some properties that can help for control design and analysis.