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This thesis deals with two important research aspects concerning radio frequency (RF) microresonators and switches. First, a new approach for compact modeling and simulation of these devices is presented. Then, a combined process flow for their simultaneous fabrication on a SOI substrate is proposed. Compact models for microresonators and switches are extracted by applying mathematical model order reduction (MOR) to the devices finite element (FE) description in ANSYS c° . The behaviour of these devices includes forms of nonlinearities. However, an approximation in the creation of the FE model is introduced, which enables the use of linear model order reduction. Microresonators are modeled with the introduction of transducer elements, which allow for direct coupling of the electrical and mechanical domain. The coupled system element matrices are linearized around an operating point and reduced. The resulting macromodel is valid for small signal analysis around the bias point, such as harmonic pre-stressed analysis. This is extremely useful for characterizing the frequency response of resonators. Compact modelling of switches preserves the nonlinearity of the device behaviour. Nonlinear reduced order models are obtained by reducing the number of nonlinearities in the system and handling them as input to the system. In this way, the system can be reduced using linear MOR techniques and nonlinearities are introduced directly in the reduced order model. The reduction of the number of system nonlinearities implies the approximation of all distributed forces in the model with lumped forces. Both for microresonators and switches, a procedure for matrices extraction has been developed so that reduced order models include the effects of electrical and mechanical pre-stress. The extraction process is fast and can be done automatically from ANSYS binary files. The method has been applied for the simulation of several devices both at devices and circuit level. Simulation results have been compared with full model simulations, and, when available, experimental data. Reduced order models have proven to conserve the accuracy of finite element method and to give a good description of the overall device behaviour, despite the introduced approximations. In addition, simulation is very fast, both at device and circuit level. A combined process-flow for the integrated fabrication of microresonators and switches has been defined. For this purpose, two processes that are optimized for the independent fabrication of these devices are merged. The major advantage of this process is the possibility to create on-chip circuit blocks that include both microresonators and switches. An application is, for example, aswitched filter bank for wireless transceiver. The process for microresonators fabrication is characterized by the use of silicon on insulator (SOI) wafers and on a deep reactive ion etching (DRIE) step for the creation of the vibrating structures in single-crystal silicon and the use of a sacrificial oxide layer for the definition of resonator to electrode distance. The fabrication of switches is characterized by the use of two different conductive layers for the definition of the actuation electrodes and by the use of a photoresist as a sacrificial layer for the creation of the suspended structure. Both processes have a gold electroplating step, for the creation of the resonators electrodes, transmission lines and suspended structures. The combined process flow is designed such that it conserves the basic properties of the original processes. Neither the performance of the resonators nor the performance of the switches results affected by the simultaneous fabrication. Moreover, common fabrication steps are shared, which allows for cheaper and faster fabrication.

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In questa tesi verranno trattati sia il problema della creazione di un ambiente di simulazione a domini fisici misti per dispositivi RF-MEMS, che la definizione di un processo di fabbricazione ad-hoc per il packaging e l’integrazione degli stessi. Riguardo al primo argomento, sarà mostrato nel dettaglio lo sviluppo di una libreria di modelli MEMS all’interno dell’ambiente di simulazione per circuiti integrati Cadence c . L’approccio scelto per la definizione del comportamento elettromeccanico dei MEMS è basato sul concetto di modellazione compatta (compact modeling). Questo significa che il comportamento fisico di ogni componente elementare della libreria è descritto per mezzo di un insieme limitato di punti (nodi) di interconnessione verso il mondo esterno. La libreria comprende componenti elementari, come travi flessibili, piatti rigidi sospesi e punti di ancoraggio, la cui opportuna interconnessione porta alla realizzazione di interi dispositivi (come interruttori e capacità variabili) da simulare in Cadence c . Tutti i modelli MEMS sono implementati per mezzo del linguaggio VerilogA c di tipo HDL (Hardware Description Language) che è supportato dal simulatore circuitale Spectre c . Sia il linguaggio VerilogA c che il simulatore Spectre c sono disponibili in ambiente Cadence c . L’ambiente di simulazione multidominio (ovvero elettromeccanico) così ottenuto permette di interfacciare i dispositivi MEMS con le librerie di componenti CMOS standard e di conseguenza la simulazione di blocchi funzionali misti RF-MEMS/CMOS. Come esempio, un VCO (Voltage Controlled Oscillator) in cui l’LC-tank è realizzato in tecnologia MEMS mentre la parte attiva con transistor MOS di libreria sarà simulato in Spectre c . Inoltre, nelle pagine successive verrà mostrata una soluzione tecnologica per la fabbricazione di un substrato protettivo (package) da applicare a dispositivi RF-MEMS basata su vie di interconnessione elettrica attraverso un wafer di Silicio. La soluzione di packaging prescelta rende possibili alcune tecniche per l’integrazione ibrida delle parti RF-MEMS e CMOS (hybrid packaging). Verranno inoltre messe in luce questioni riguardanti gli effetti parassiti (accoppiamenti capacitivi ed induttivi) introdotti dal package che influenzano le prestazioni RF dei dispositivi MEMS incapsulati. Nel dettaglio, tutti i gradi di libertà del processo tecnologico per l’ottenimento del package saranno ottimizzati per mezzo di un simulatore elettromagnetico (Ansoft HFSSTM) al fine di ridurre gli effetti parassiti introdotti dal substrato protettivo. Inoltre, risultati sperimentali raccolti da misure di strutture di test incapsulate verranno mostrati per validare, da un lato, il simulatore Ansoft HFSSTM e per dimostrate, dall’altro, la fattibilit`a della soluzione di packaging proposta. Aldilà dell’apparente debole legame tra i due argomenti sopra menzionati è possibile identificare un unico obiettivo. Da un lato questo è da ricercarsi nello sviluppo di un ambiente di simulazione unificato all’interno del quale il comportamento elettromeccanico dei dispositivi RF-MEMS possa essere studiato ed analizzato. All’interno di tale ambiente, l’influenza del package sul comportamento elettromagnetico degli RF-MEMS può essere tenuta in conto per mezzo di modelli a parametri concentrati (lumped elements) estratti da misure sperimentali e simulazioni agli Elementi Finiti (FEM) della parte di package. Infine, la possibilità offerta dall’ambiente Cadence c relativamente alla simulazione di dipositivi RF-MEMS interfacciati alla parte CMOS rende possibile l’analisi di blocchi funzionali ibridi RF-MEMS/CMOS completi.

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Gossip protocols have proved to be a viable solution to set-up and manage largescale P2P services or applications in a fully decentralised scenario. The gossip or epidemic communication scheme is heavily based on stochastic behaviors and it is the fundamental idea behind many large-scale P2P protocols. It provides many remarkable features, such as scalability, robustness to failures, emergent load balancing capabilities, fast spreading, and redundancy of information. In some sense, these services or protocols mimic natural system behaviors in order to achieve their goals. The key idea of this work is that the remarkable properties of gossip hold when all the participants follow the rules dictated by the actual protocols. If one or more malicious nodes join the network and start cheating according to some strategy, the result can be catastrophic. In order to study how serious the threat posed by malicious nodes can be and what can be done to prevent attackers from cheating, we focused on a general attack model aimed to defeat a key service in gossip overlay networks (the Peer Sampling Service [JGKvS04]). We also focused on the problem of protecting against forged information exchanged in gossip services. We propose a solution technique for each problem; both techniques are general enough to be applied to distinct service implementations. As gossip protocols, our solutions are based on stochastic behavior and are fully decentralized. In addition, each technique’s behaviour is abstracted by a general primitive function extending the basic gossip scheme; this approach allows the adoptions of our solutions with minimal changes in different scenarios. We provide an extensive experimental evaluation to support the effectiveness of our techniques. Basically, these techniques aim to be building blocks or P2P architecture guidelines in building more resilient and more secure P2P services.

Matita (that means pencil in Italian) is a new interactive theorem prover under development at the University of Bologna. When compared with state-of-the-art proof assistants, Matita presents both traditional and innovative aspects. The underlying calculus of the system, namely the Calculus of (Co)Inductive Constructions (CIC for short), is well-known and is used as the basis of another mainstream proof assistant—Coq—with which Matita is to some extent compatible. In the same spirit of several other systems, proof authoring is conducted by the user as a goal directed proof search, using a script for storing textual commands for the system. In the tradition of LCF, the proof language of Matita is procedural and relies on tactic and tacticals to proceed toward proof completion. The interaction paradigm offered to the user is based on the script management technique at the basis of the popularity of the Proof General generic interface for interactive theorem provers: while editing a script the user can move forth the execution point to deliver commands to the system, or back to retract (or “undo”) past commands. Matita has been developed from scratch in the past 8 years by several members of the Helm research group, this thesis author is one of such members. Matita is now a full-fledged proof assistant with a library of about 1.000 concepts. Several innovative solutions spun-off from this development effort. This thesis is about the design and implementation of some of those solutions, in particular those relevant for the topic of user interaction with theorem provers, and of which this thesis author was a major contributor. Joint work with other members of the research group is pointed out where needed. The main topics discussed in this thesis are briefly summarized below. Disambiguation. Most activities connected with interactive proving require the user to input mathematical formulae. Being mathematical notation ambiguous, parsing formulae typeset as mathematicians like to write down on paper is a challenging task; a challenge neglected by several theorem provers which usually prefer to fix an unambiguous input syntax. Exploiting features of the underlying calculus, Matita offers an efficient disambiguation engine which permit to type formulae in the familiar mathematical notation. Step-by-step tacticals. Tacticals are higher-order constructs used in proof scripts to combine tactics together. With tacticals scripts can be made shorter, readable, and more resilient to changes. Unfortunately they are de facto incompatible with state-of-the-art user interfaces based on script management. Such interfaces indeed do not permit to position the execution point inside complex tacticals, thus introducing a trade-off between the usefulness of structuring scripts and a tedious big step execution behavior during script replaying. In Matita we break this trade-off with tinycals: an alternative to a subset of LCF tacticals which can be evaluated in a more fine-grained manner. Extensible yet meaningful notation. Proof assistant users often face the need of creating new mathematical notation in order to ease the use of new concepts. The framework used in Matita for dealing with extensible notation both accounts for high quality bidimensional rendering of formulae (with the expressivity of MathMLPresentation) and provides meaningful notation, where presentational fragments are kept synchronized with semantic representation of terms. Using our approach interoperability with other systems can be achieved at the content level, and direct manipulation of formulae acting on their rendered forms is possible too. Publish/subscribe hints. Automation plays an important role in interactive proving as users like to delegate tedious proving sub-tasks to decision procedures or external reasoners. Exploiting the Web-friendliness of Matita we experimented with a broker and a network of web services (called tutors) which can try independently to complete open sub-goals of a proof, currently being authored in Matita. The user receives hints from the tutors on how to complete sub-goals and can interactively or automatically apply them to the current proof. Another innovative aspect of Matita, only marginally touched by this thesis, is the embedded content-based search engine Whelp which is exploited to various ends, from automatic theorem proving to avoiding duplicate work for the user. We also discuss the (potential) reusability in other systems of the widgets presented in this thesis and how we envisage the evolution of user interfaces for interactive theorem provers in the Web 2.0 era.

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