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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"ionsurface impact"" "subject:"bothsurface impact""

1

Fluorination mechanisms of Al2O3 and Y2O3 surfaces irradiated by high-density CF4/O2 and SF6/O2 plasmas

Miwa, Kazuhiro, Takada, Noriharu, Sasaki, Koichi 29 June 2009 (has links)
No description available.
alumina
bonds (chemical)
ion-surface impact
plasma materials
processing
surface chemistry
yttrium compounds

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