Abstract This paper proposes a model that integrates the microscale asperity contact and macroscale elastohydrodynamic lubrication (EHL) to simulate the pressure distribution in the chemical mechanical planarization (CMP). This model involves modified Reynolds equation used to describe the status of fluid field, the equation of the average asperity contact pressure by using statistics for solid contact pressure due to asperity contact, and the equation of the elastic pad deformation in bulk. Results show that with increasing relative velocity or load, the magnitude of the sub-ambient pressure decreases, the greater asperity contact pressure is formed to support the load, and the friction force also increases to cause the greater rotation angles. The magnitude of the fluid pressure is of the same order of magnitude as the applied normal load. Therefore, the addition of this fluid pressure may significantly change the distribution of the contact stress. The reason of the sub-ambient pressure existed is the deformation of the pad. In the material removal rate model, the elastic deformation of asperities is assumed, and the contact pressure is determined by Hooke¡¦s law. The indentation depth can be obtained from the force balance imposed on the particles by the wafer and the pad. Results show that the material removal rate decreases with increasing abrasive size, due to the increasing contact area between the abrasive and wafer. Keywords¡GElastohydrodynamic Lubrication, Chemical Mechanical Polishing

Cutting fluids are mainly used for cooling, lubricating, and chip removing. The use of minimum/minimal quantity lubrication (MQL) in machining processes not only reduces the cost of cutting fluids but also has the potential to alleviate the environmental impact. In addition, the MQL technique could be a viable choice to decrease the damage to the miniature machines due to the near-dry lubrication. Therefore, the objective of this study is aimed at the mechanical performance of MQL for micro-grinding of SK3 steels based on surface finish and tool life. In this study, it is observed that tool breaks in dry grinding or air blow grinding, and it is also found that workpiece surface is burned in dry grinding. However, these phenomena are not observed in MQL grinding. The reason is that the use of MQL reduces the friction between the tool and workpiece and improves the chip removal in micro-grinding. The use of MQL in micro-grinding also leads to better surface roughness and the tool life is more than seven times compared to dry grinding. Experimental results show that the best surface finish is achieved in MQL grinding when the use of cutting fluids is 1.88 ml/hr with the air flow rate of 30 l/min among the lubrication conditions in this study.

published_or_final_version / Mechanical Engineering / Doctoral / Doctor of Philosophy

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