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MOCVD growth and electrical characterisation of InAs thin filmsShamba, Precious January 2007 (has links)
In this work, a systematic study relating the surface morphologies, electrical and structural properties of both doped and undoped InAs and InAsSb epitaxial films grown by metalorganic chemical vapour deposition (MOCVD) was undertaken. A comparative study using TBAs and AsH3 as the group V source in the growth of InAs revealed a considerable improvement, primarily in the electrical properties of InAs grown using TBAs with no significant difference in the surface morphology. InAs layers grown using TBAs, exhibited superior 77 K mobilities of up to 46 000 cm2/Vs, exceeding the best MOCVD data to date. The feasibility of tetraethyl tin (TESn) as an n-type dopant in InAs was to our knowledge investigated for the first time. The incorporation efficiency of this dopant was extensively studied as a function of substrate temperature, V/III ratio, substrate orientation and TESn flow rate. Results from this study show that the doping efficiency is temperature dependent and is not influenced by a variation of the V/III ratio or substrate orientation. Furthermore, Sn doping concentrations could be controlled over 2 orders of magnitude ranging between 2.7 x 1017 and 4.7 x 1019 cm-3 with 77 K mobilities ranging from 12 000 to 1300 cm2/Vs. The electrical properties of zinc doped InAs employing dimethyl zinc (DMZn) as the ptype dopant, were studied as a function of V/III ratio and substrate orientation. The effect of a variation of these parameters on the structural properties and surface morphology of InAs is also reported. The substrate orientation appears to have no influence on the Zn incorporation. An increase in Zn incorporation resulted in a deterioration of both the surface morphology and structural quality of the InAs layers. The incorporation efficiency of DMZn in InAsSb was studied as a function of growth temperature, V/III ratio and DMZn flow rate. A higher Zn incorporation was observed in InAsSb epitaxial layers grown at a lower temperature and V/III ratio as opposed to the layers grown at a higher temperature and V/III ratio. This study also revealed that the use of DMZn caused a dopant memory effect. A two-layer model proposed by Nedoluha and Koch (1952) was used to simulate the Hall measurements of Zn doped InAs and InAsSb in order to correct the shortcomings of conventional Hall measurements in determining the electrical properties exhibited by these materials.
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Metal organic chemical vapor deposition and atomic layer deposition of strontium oxide films on silicon surfacesCuadra, Amalia C. January 2007 (has links)
Thesis (M.Ch.E.)--University of Delaware, 2007. / Principal faculty advisor: Brian G. Willis, Dept. of Chemical Engineering. Includes bibliographical references.
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The growth and characterization of group III-nitride transistor devices grown by metalorganic chemical vapor depositionWong, Michael Ming. January 2003 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 2003. / Vita. Includes bibliographical references. Available also from UMI Company.
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The design, processing, and characterization of group III-nitride diode devices grown by metalorganic chemical vapor depositionZhu, Tinggang. January 2003 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 2003. / Vita. Includes bibliographical references. Available also from UMI Company.
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The growth and characterization of group III-nitride transistor devices grown by metalorganic chemical vapor depositionWong, Michael Ming 27 July 2011 (has links)
Not available / text
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The design, processing, and characterization of group III-nitride diode devices grown by metalorganic chemical vapor depositionZhu, Tinggang 27 July 2011 (has links)
Not available / text
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Computational studies of reacting flows with applications in nanoscale materials synthesisCho, Joungmo, January 2009 (has links)
Thesis (Ph. D.)--University of Massachusetts Amherst, 2009. / Includes bibliographical references (p. 179-194). Print copy also available.
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Growth and characterization of group III-nitride power transistors, power rectifiers and solar-blind detectors by metalorganic chemical vapor deposition /Lambert, Damien Jean Henri, January 2000 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 2000. / Vita. Includes bibliographical references (leaves 158-170). Available also in a digital version from Dissertation Abstracts.
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Organometallic precursors for the chemical vapor deposition of LaB₆Chotsuwan, Chuleekorn. January 2004 (has links)
Thesis (M.S.)--University of Florida, 2004. / Title from title page of source document. Document formatted into pages; contains 41 pages. Includes vita. Includes bibliographical references.
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Compound semiconductor native oxide-based technologies for optical and electrical devices grown on GaAs substrates using MOCVD /Holmes, Adrian Lawrence, January 1999 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 1999. / Vita. Includes bibliographical references (leaves 147-151). Available also in a digital version from Dissertation Abstracts.
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