This research focuses on developing new techniques and designs for highly con- trollable microactuating systems with large force-stroke outputs. A fixed-fixed mi- crobeam is the actuating element in the introduced techniques. Either buckling of a microbridge by thermal stress, lateral deflection of a microbridge by electro- magnetic force, or combined effects of both can be employed for microactuation. The proposed method here is MicroElectroThermoMagnetic Actuation (METMA), which uses the combined techniques of electrical or electro-thermal driving of a mi- crobridge in the presence of a magnetic field. The electrically controllable magnetic field actuates and controls the electrically or electrothermally driven microstruc- tures. METMA provides control with two electrical inputs, the currents driving the microbridge and the current driving the external magnetic field. This method enables a more controllable actuating system. Different designs of microactuators have been implemented by using MEMS Pro as the design software and MUMPs as the standard MEMS fabrication technology. In these designs, a variety of out-of- plane buckling or displacement of fixed-fixed microbeams have been developed and employed as the actuating elements. This paper also introduces a novel actuating technique for larger displacements that uses a two-layer buckling microbridge actu- ated by METMA. Heat transfer principles are applied to investigate temperature distribution in a microbeam, electrothermal heating, and the resulting thermoelas- tic effects. Furthermore, a method for driving microactuators by applying powerful electrical pulses is proposed. The integrated electromagnetic and electrothermal microactuation technique is also studied. A clamped-clamped microbeam carry- ing electrical current has been modeled and simulated in ANSYS. The simulations include electrothermal, thermoelastic, electromagnetic, and electrothermomagnetic effects. The contributions are highlighted, the results are discussed, the research and design limitations are reported, and future works are proposed.

This research focuses on developing new techniques and designs for highly con- trollable microactuating systems with large force-stroke outputs. A fixed-fixed mi- crobeam is the actuating element in the introduced techniques. Either buckling of a microbridge by thermal stress, lateral deflection of a microbridge by electro- magnetic force, or combined effects of both can be employed for microactuation. The proposed method here is MicroElectroThermoMagnetic Actuation (METMA), which uses the combined techniques of electrical or electro-thermal driving of a mi- crobridge in the presence of a magnetic field. The electrically controllable magnetic field actuates and controls the electrically or electrothermally driven microstruc- tures. METMA provides control with two electrical inputs, the currents driving the microbridge and the current driving the external magnetic field. This method enables a more controllable actuating system. Different designs of microactuators have been implemented by using MEMS Pro as the design software and MUMPs as the standard MEMS fabrication technology. In these designs, a variety of out-of- plane buckling or displacement of fixed-fixed microbeams have been developed and employed as the actuating elements. This paper also introduces a novel actuating technique for larger displacements that uses a two-layer buckling microbridge actu- ated by METMA. Heat transfer principles are applied to investigate temperature distribution in a microbeam, electrothermal heating, and the resulting thermoelas- tic effects. Furthermore, a method for driving microactuators by applying powerful electrical pulses is proposed. The integrated electromagnetic and electrothermal microactuation technique is also studied. A clamped-clamped microbeam carry- ing electrical current has been modeled and simulated in ANSYS. The simulations include electrothermal, thermoelastic, electromagnetic, and electrothermomagnetic effects. The contributions are highlighted, the results are discussed, the research and design limitations are reported, and future works are proposed.

In this research a state-of-the-art micro-thermal conductivity detector is developed based on MEMS technology. Its efficient design include a miniaturized 100×2 µm bridge from doped polysilicon, suspended 10 µm away from the single crystalline silicon substrate through a thermally grown silicon dioxide sacrificial layer. The microbridge is covered by 200 nm silicon nitride layer to provide more life time. Analytical models were developed that describe the relationship between the sensor response and ambient gas material properties. To obtain local temperature distribution and accurate predictions of the sensor response, a computational three dimensional simulation based on real geometry and minimal simplifications was prepared. It was able to handle steady-state and transient state, include multiple physics such as flow, heat transfer, electrical current and thermal stresses. Two new methods of measurement for micro TCD were developed; a time resolved method based on transient response of the detector to a step current pulse was introduced that correlates time constant of the response to the concentration of gas mixture. The other method is based on AC excitation of the micro detector; the amplitude and phase of the third harmonic of the resulting output signal is related to gas composition. Finally, the developed micro-sensor was packaged and tested in a GC system and was compared against conventional and complex FID for the detection of a mixture of VOCs. Moreover compact electronics and telemetry modules were developed that allow for highly portable applications including microGC utilization in the field.

A miniature, ultra-low power, sensitive, microbridge gas sensor has been developed.The heat loss from the bridge is a function of the thermal conductivity of thegas ambient. Miniature thermal conductivity sensors have been developed for gaschromatography systems [1] and microhotplates have been built with MEMS technologywhich operates within the mW range of power [2]. In this work a lower power microbridgewas built which allowed for the amplification of the effect of gas thermalconductivity on heat loss from the heated microbridge due to the increase inthe surface-to-volume ratio of the sensing element. For the bridge fabrication,CMOS compatible technology, nanolithography, and polysilicon surfacemicromachining were employed. Eight microbridges were fabricated on each die,of varying lengths and widths, and with a thickness of 1 μm. A voltagewas applied to the sensor and the resistance was calculated based upon thecurrent flow. The response has been tested with air, carbon dioxide, helium,and nitrogen. The resistance and temperature change for carbon dioxide was thegreatest, while the corresponding change for helium was the least. Thus the selectivity of the sensor todifferent gases was shown, as well as the robustness of the sensor. Another aspect of the sensor is that it hasvery low power consumption. The measuredpower consumption at 4 Volts is that of 11.5 mJ for Nitrogen, and 16.1 mJ forHelium. Thesensor responds to ambient gas very rapidly. The time constant not only showsthe fast response of the sensor, but it also allows for more accuratedetection, given that each different gas produces a different correspondingtime constant from the sensor. The sensor is able to detect differentconcentrations of the same gas as well. Fromthe slopes that were calculated, the resistance change at 5 Volts operation wasfound to be 2.05mΩ/ppm, 1.14 mΩ/ppm at 4.5 Volts, and 0.7 mΩ/ppm at 4 Volts. Thehigher voltages yielded higher resistance changes for all of the gases thatwere tested. Theversatility of the microbridge has been studied as well. Experiments were donein order to research the ability of a deposited film on the microbridge, inthis case tin oxide, to act as a sensing element for specific gases. In thissetup, the microbridge no longer is the sensing element, but instead acts as aheating element, whose sole purpose is to keep a constant temperature at whichit can then activate the SnO film, making it able to sense methane. In conclusion,the microbridge was designed, fabricated, and tested for use as an electrothermalgas sensor. The sensor responds to ambient gas very rapidly with differentlevels of resistance change for different gases, purely due to the differencein thermal conductivity of each of the gases. Not only does it have a fastresponse, but it also operates at low power levels. Further research has beendone in the microbridge's ability to act as a heating element, in which the useof a SnO film as the sensing element, activated by the microbridge, was studied. REFERENCES: 1. D. Cruz,J.P. Chang, S.K. Showalter, F. Gelbard, R.P. Manginell, M.G. Blain," Microfabricated thermal conductivity detector for themicro-ChemLabTM," Sensors andActuators B, Vol. 121 pp. 414-422, (2007). 2. A. G. Shirke, R. E. Cavicchi, S. Semancik, R. H. Jackson, B.G. Frederick, M. C. Wheeler. "Femtomolar isothermal desorption usingmicrohotplate sensors," J Vac Sci TechnolA, Vol. 25, pp. 514-526 (2007).