博士(工学) / Doctor of Philosophy in Engineering / 同志社大学 / Doshisha University

This thesis presents three kinds of novel structural design of SDA-based micromotors(£g-motors), including out-side cover structure, flange cover structure and flange rib structure. In order to verify the feasibility of these structures, the device is fabricated by MUMPs micro-electro-mechanical system (MEMS) foundry. According to the experimental results, SDA £g-motor of flange cover structure is comparatively more ideal than the other structures. The ideal structure operates at 100 Hz when the voltage is added to 75 Vop, which results in resonant vibration on the SDA plate, and begins to rotate when the voltage reaches 100 Vop. The secondary goal of this thesis is using SDA £g-motor of flange cover structure to build surface micromachining process integration. The fabrication processes include eight photolithography masks, and the total fabrication procedure takes 62 steps. According to the experimental result, the device is made and succeeded or not, except that receiving the alignment technology influences, etching phosphorus silicon glass to define anchor is also an important process. Though processing technology of SDA £g-motor researched and developed by Taiwan has not reached high yield yet, but intact process module develop and integration has already appeared specifically through the research of this thesis.

O processo de microestampagem permite a fabricação de peças ou microcomponentes, podendo ser aplicado a diversas áreas da engenharia. Logo, este trabalho tem por objetivo desenvolver um micromotor de passo e avaliar os efeitos da miniaturização de seus componentes. A simulação computacional foi utilizada neste trabalho de forma a avaliar os defeitos surgidos com a miniaturização, através do software de elementos finitos DYNAFORM com “solver” LS-DYNA. O material empregado na carcaça foi o aço de baixo carbono ABNT 1010 e o aço inoxidável ABNT 304, e para o núcleo magnético do micromotor, composto pelo rotor e estator, utilizou-se o aço elétrico ABNT 35F 420M. A simulação computacional, além de identificar os problemas oriundos da miniaturização dos componentes, também foi utilizada para otimizar as ferramentas de microestampagem, demonstrando desta forma ser uma grande aliada para o desenvolvimento do processo. O processo de corte convencional em matriz não foi aplicado no corte do rotor e do estator, pois produziu defeitos como empenamento e rebarbas. Ao invés disso, empregou-se o processo de corte por eletroerosão a fio, que produziu peças planas e superfícies lisas. / The process of micro deep drawing is a micro-technology which allows the fabrication of microcomponents and can be applied to various fields of engineering. This study aims to develop the components of a micromotor step using this technology and to evaluate the effects of the microfabrication of the motor frame, rotor and stator. A computer simulation was carried out in order to evaluate miniaturization of the components trough the finite element software DYNAFORM with “Solver” LS-DYNA. The material used in the motor housing was low carbon steel ABNT 1010 and stainless steel ABNT 304. However, in magnetic core, comprising the rotor and stator, the electric steel ABNT 35F 420M was employed. Micro deep drawing tools were developed based on the results obtained through simulation is a great ally to create microcomponents. The cutting process in the matrix was not employed to cut de rotor and the stator, because it produced defects such as warping and butts along the surface. Instead, wire cutting spark erosion was used and resulted in hat part and surfaces.

This research focuses on developing new techniques and designs for highly con- trollable microactuating systems with large force-stroke outputs. A fixed-fixed mi- crobeam is the actuating element in the introduced techniques. Either buckling of a microbridge by thermal stress, lateral deflection of a microbridge by electro- magnetic force, or combined effects of both can be employed for microactuation. The proposed method here is MicroElectroThermoMagnetic Actuation (METMA), which uses the combined techniques of electrical or electro-thermal driving of a mi- crobridge in the presence of a magnetic field. The electrically controllable magnetic field actuates and controls the electrically or electrothermally driven microstruc- tures. METMA provides control with two electrical inputs, the currents driving the microbridge and the current driving the external magnetic field. This method enables a more controllable actuating system. Different designs of microactuators have been implemented by using MEMS Pro as the design software and MUMPs as the standard MEMS fabrication technology. In these designs, a variety of out-of- plane buckling or displacement of fixed-fixed microbeams have been developed and employed as the actuating elements. This paper also introduces a novel actuating technique for larger displacements that uses a two-layer buckling microbridge actu- ated by METMA. Heat transfer principles are applied to investigate temperature distribution in a microbeam, electrothermal heating, and the resulting thermoelas- tic effects. Furthermore, a method for driving microactuators by applying powerful electrical pulses is proposed. The integrated electromagnetic and electrothermal microactuation technique is also studied. A clamped-clamped microbeam carry- ing electrical current has been modeled and simulated in ANSYS. The simulations include electrothermal, thermoelastic, electromagnetic, and electrothermomagnetic effects. The contributions are highlighted, the results are discussed, the research and design limitations are reported, and future works are proposed.

This research focuses on developing new techniques and designs for highly con- trollable microactuating systems with large force-stroke outputs. A fixed-fixed mi- crobeam is the actuating element in the introduced techniques. Either buckling of a microbridge by thermal stress, lateral deflection of a microbridge by electro- magnetic force, or combined effects of both can be employed for microactuation. The proposed method here is MicroElectroThermoMagnetic Actuation (METMA), which uses the combined techniques of electrical or electro-thermal driving of a mi- crobridge in the presence of a magnetic field. The electrically controllable magnetic field actuates and controls the electrically or electrothermally driven microstruc- tures. METMA provides control with two electrical inputs, the currents driving the microbridge and the current driving the external magnetic field. This method enables a more controllable actuating system. Different designs of microactuators have been implemented by using MEMS Pro as the design software and MUMPs as the standard MEMS fabrication technology. In these designs, a variety of out-of- plane buckling or displacement of fixed-fixed microbeams have been developed and employed as the actuating elements. This paper also introduces a novel actuating technique for larger displacements that uses a two-layer buckling microbridge actu- ated by METMA. Heat transfer principles are applied to investigate temperature distribution in a microbeam, electrothermal heating, and the resulting thermoelas- tic effects. Furthermore, a method for driving microactuators by applying powerful electrical pulses is proposed. The integrated electromagnetic and electrothermal microactuation technique is also studied. A clamped-clamped microbeam carry- ing electrical current has been modeled and simulated in ANSYS. The simulations include electrothermal, thermoelastic, electromagnetic, and electrothermomagnetic effects. The contributions are highlighted, the results are discussed, the research and design limitations are reported, and future works are proposed.

O processo de microestampagem permite a fabricação de peças ou microcomponentes, podendo ser aplicado a diversas áreas da engenharia. Logo, este trabalho tem por objetivo desenvolver um micromotor de passo e avaliar os efeitos da miniaturização de seus componentes. A simulação computacional foi utilizada neste trabalho de forma a avaliar os defeitos surgidos com a miniaturização, através do software de elementos finitos DYNAFORM com “solver” LS-DYNA. O material empregado na carcaça foi o aço de baixo carbono ABNT 1010 e o aço inoxidável ABNT 304, e para o núcleo magnético do micromotor, composto pelo rotor e estator, utilizou-se o aço elétrico ABNT 35F 420M. A simulação computacional, além de identificar os problemas oriundos da miniaturização dos componentes, também foi utilizada para otimizar as ferramentas de microestampagem, demonstrando desta forma ser uma grande aliada para o desenvolvimento do processo. O processo de corte convencional em matriz não foi aplicado no corte do rotor e do estator, pois produziu defeitos como empenamento e rebarbas. Ao invés disso, empregou-se o processo de corte por eletroerosão a fio, que produziu peças planas e superfícies lisas. / The process of micro deep drawing is a micro-technology which allows the fabrication of microcomponents and can be applied to various fields of engineering. This study aims to develop the components of a micromotor step using this technology and to evaluate the effects of the microfabrication of the motor frame, rotor and stator. A computer simulation was carried out in order to evaluate miniaturization of the components trough the finite element software DYNAFORM with “Solver” LS-DYNA. The material used in the motor housing was low carbon steel ABNT 1010 and stainless steel ABNT 304. However, in magnetic core, comprising the rotor and stator, the electric steel ABNT 35F 420M was employed. Micro deep drawing tools were developed based on the results obtained through simulation is a great ally to create microcomponents. The cutting process in the matrix was not employed to cut de rotor and the stator, because it produced defects such as warping and butts along the surface. Instead, wire cutting spark erosion was used and resulted in hat part and surfaces.

O processo de microestampagem permite a fabricação de peças ou microcomponentes, podendo ser aplicado a diversas áreas da engenharia. Logo, este trabalho tem por objetivo desenvolver um micromotor de passo e avaliar os efeitos da miniaturização de seus componentes. A simulação computacional foi utilizada neste trabalho de forma a avaliar os defeitos surgidos com a miniaturização, através do software de elementos finitos DYNAFORM com “solver” LS-DYNA. O material empregado na carcaça foi o aço de baixo carbono ABNT 1010 e o aço inoxidável ABNT 304, e para o núcleo magnético do micromotor, composto pelo rotor e estator, utilizou-se o aço elétrico ABNT 35F 420M. A simulação computacional, além de identificar os problemas oriundos da miniaturização dos componentes, também foi utilizada para otimizar as ferramentas de microestampagem, demonstrando desta forma ser uma grande aliada para o desenvolvimento do processo. O processo de corte convencional em matriz não foi aplicado no corte do rotor e do estator, pois produziu defeitos como empenamento e rebarbas. Ao invés disso, empregou-se o processo de corte por eletroerosão a fio, que produziu peças planas e superfícies lisas. / The process of micro deep drawing is a micro-technology which allows the fabrication of microcomponents and can be applied to various fields of engineering. This study aims to develop the components of a micromotor step using this technology and to evaluate the effects of the microfabrication of the motor frame, rotor and stator. A computer simulation was carried out in order to evaluate miniaturization of the components trough the finite element software DYNAFORM with “Solver” LS-DYNA. The material used in the motor housing was low carbon steel ABNT 1010 and stainless steel ABNT 304. However, in magnetic core, comprising the rotor and stator, the electric steel ABNT 35F 420M was employed. Micro deep drawing tools were developed based on the results obtained through simulation is a great ally to create microcomponents. The cutting process in the matrix was not employed to cut de rotor and the stator, because it produced defects such as warping and butts along the surface. Instead, wire cutting spark erosion was used and resulted in hat part and surfaces.

The scalability and cost of microelectromechanical systems (MEMS) optical switches are now the important factors driving the development of MEMS optical switches technology. The employment of MEMS in the design and fabrication of optical switches through the use of micromachining fabricated micromirrors expands the capability and integrity of optical backbone networks. The focus of this dissertation is on the design, fabrication, and implementation of a new type of MEMS optical switch that combines the advantages of both 2-D and 3-D MEMS switch architectures. This research presents a new digital MEMS switch architecture for 1×N and N×N optical switches. The architecture is based on a new microassembled smart 3-D rotating inclined micromirror (3DRIM). The 3DRIM is the key device in the new switch architectures. The 3DRIM was constructed through a microassembly process using a passive microgripper, key, and inter-lock (PMKIL) assembly system. An electrostatic micromotor was chosen as the actuator for the 3DRIM since it offers continuous rotation as well as small, precise step motions with excellent repeatability that can achieve repeatable alignment with minimum optical insertion loss between the input and output ports of the switch. In the first 3DRIM prototype, a 200×280 microns micromirror was assembled on the top of the electrostatic micromotor and was supported through two vertical support posts. The assembly technique was then modified so that the second prototype can support micromirrors with dimensions up to 400×400 microns. Both prototypes of the 3DRIM are rigid and stable during operation. Also, rotor pole shaping (RPS) design technique was introduced to optimally reshape the physical dimensions of the rotor pole in order to maximize the generated motive torque of the micromotor and minimize the required driving voltage signal. The targeted performance of the 3DRIM was achieved after several PolyMUMPs fabrication runs. The new switch architecture is neither 2-D nor 3-D. Since it is composed of two layers, it can be considered 2.5-D. The new switch overcomes many of the limitations of current traditional 2-D MEMS switches, such as limited scalability and large variations in the insertion loss across output ports. The 1×N MEMS switch fabric has the advantage of being digitally operated. It uses only one 3DRIM to switch the light signal from the input port to any output port. The symmetry employed in the switch design gives it the ability to incorporate a large number of output ports with uniform insertion losses over all output channels, which is not possible with any available 2-D or 3-D MEMS switch architectures. The second switch that employs the 3DRIM is an N×N optical cross-connect (OXC) switch. The design of an N×N OXC uses only 2N of the 3DRIM, which is significantly smaller than the N×N switching micromirrors used in 2-D MEMS architecture. The new N×N architecture is useful for a medium-sized OXC and is simpler than 3-D architecture. A natural extension of the 3DRIM will be to extend its application into more complex optical signal processing, i.e., wavelength-selective switch. A grating structures have been selected to explore the selectivity of the switch. For this reason, we proposed that the surface of the micromirror being replaced by a suitable gratings instead of the flat reflective surface. Thus, this research has developed a rigorous formulation of the electromagnetic scattered near-field from a general-shaped finite gratings in a perfect conducting plane. The formulation utilizes a Fourier-transform representation of the scattered field for the rapid convergence in the upper half-space and the staircase approximation to represent the field in the general-shaped groove. This method provides a solution for the scattered near-field from the groove and hence is considered an essential design tool for near-field manipulation in optical devices. Furthermore, it is applicable for multiple grooves with different profiles and different spacings. Each groove can be filled with an arbitrary material and can take any cross-sectional profile, yet the solution is rigorous because of the rigorous formulations of the fields in the upper-half space and the groove reigns. The efficient formulation of the coefficient matrix results in a banded-matrix form for an efficient and time-saving solution.

The scalability and cost of microelectromechanical systems (MEMS) optical switches are now the important factors driving the development of MEMS optical switches technology. The employment of MEMS in the design and fabrication of optical switches through the use of micromachining fabricated micromirrors expands the capability and integrity of optical backbone networks. The focus of this dissertation is on the design, fabrication, and implementation of a new type of MEMS optical switch that combines the advantages of both 2-D and 3-D MEMS switch architectures. This research presents a new digital MEMS switch architecture for 1×N and N×N optical switches. The architecture is based on a new microassembled smart 3-D rotating inclined micromirror (3DRIM). The 3DRIM is the key device in the new switch architectures. The 3DRIM was constructed through a microassembly process using a passive microgripper, key, and inter-lock (PMKIL) assembly system. An electrostatic micromotor was chosen as the actuator for the 3DRIM since it offers continuous rotation as well as small, precise step motions with excellent repeatability that can achieve repeatable alignment with minimum optical insertion loss between the input and output ports of the switch. In the first 3DRIM prototype, a 200×280 microns micromirror was assembled on the top of the electrostatic micromotor and was supported through two vertical support posts. The assembly technique was then modified so that the second prototype can support micromirrors with dimensions up to 400×400 microns. Both prototypes of the 3DRIM are rigid and stable during operation. Also, rotor pole shaping (RPS) design technique was introduced to optimally reshape the physical dimensions of the rotor pole in order to maximize the generated motive torque of the micromotor and minimize the required driving voltage signal. The targeted performance of the 3DRIM was achieved after several PolyMUMPs fabrication runs. The new switch architecture is neither 2-D nor 3-D. Since it is composed of two layers, it can be considered 2.5-D. The new switch overcomes many of the limitations of current traditional 2-D MEMS switches, such as limited scalability and large variations in the insertion loss across output ports. The 1×N MEMS switch fabric has the advantage of being digitally operated. It uses only one 3DRIM to switch the light signal from the input port to any output port. The symmetry employed in the switch design gives it the ability to incorporate a large number of output ports with uniform insertion losses over all output channels, which is not possible with any available 2-D or 3-D MEMS switch architectures. The second switch that employs the 3DRIM is an N×N optical cross-connect (OXC) switch. The design of an N×N OXC uses only 2N of the 3DRIM, which is significantly smaller than the N×N switching micromirrors used in 2-D MEMS architecture. The new N×N architecture is useful for a medium-sized OXC and is simpler than 3-D architecture. A natural extension of the 3DRIM will be to extend its application into more complex optical signal processing, i.e., wavelength-selective switch. A grating structures have been selected to explore the selectivity of the switch. For this reason, we proposed that the surface of the micromirror being replaced by a suitable gratings instead of the flat reflective surface. Thus, this research has developed a rigorous formulation of the electromagnetic scattered near-field from a general-shaped finite gratings in a perfect conducting plane. The formulation utilizes a Fourier-transform representation of the scattered field for the rapid convergence in the upper half-space and the staircase approximation to represent the field in the general-shaped groove. This method provides a solution for the scattered near-field from the groove and hence is considered an essential design tool for near-field manipulation in optical devices. Furthermore, it is applicable for multiple grooves with different profiles and different spacings. Each groove can be filled with an arbitrary material and can take any cross-sectional profile, yet the solution is rigorous because of the rigorous formulations of the fields in the upper-half space and the groove reigns. The efficient formulation of the coefficient matrix results in a banded-matrix form for an efficient and time-saving solution.

Micromotors – untethered, motile, microscopic devices – are implemented in this dissertation for two applications in the field of assisted reproductive technology. First, as synthetic motor units for individual sperm cells, representing a novel approach to counteract sperm immotility (asthenozoospermia), which is one of the most prevalent causes of male infertility. Second, as synthetic carriers of fertilized oocytes (zygotes) towards the realization of non-invasive intrafallopian transfer, representing a novel alternative to the current keyhole surgery (laparoscopy) approach to achieve early embryo transfer after in vitro fertilization. In both applications, magnetically actuated micromotors are utilized to capture, transport, and deliver individual cells in a reproducible, controllable manner. In comparison with established in vitro fertilization routines, the crucial advantage of employing micromotors for the manipulation of gametes, i.e. sperm and (fertilized) oocytes, lies in the potential transfer of decisive steps of the fertilization process back to its natural environment – the fallopian tube of the female patient – taking advantage of the untethered, non-invasive motion and manipulation capabilities of magnetic micromotors. When sperm motility can be restored with magnetic micromotors, sperm can travel to the oocyte under external actuation and control, and the oocyte does not need to be explanted for in vitro fertilization. However, if in vitro fertilization was necessary, fertilized oocytes can be transferred back to the fallopian tube by micromotors in a non-invasive manner, to undergo early embryo development in the natural environment. These novel concepts of micromotor-assisted reproduction are presented and investigated in this thesis, and their potential is analyzed on the basis of proof-of-concept experiments.:1 Introduction 6 1.1 Background and Motivation 6 1.2 Objectives and Structure of this Dissertation 9 2 Fundamentals 11 2.1 Micromotors Definition and Concept 11 2.2 Micromotors for Biomedical Applications 13 2.3 Magnetic Micropropellers 15 2.3.1 Theory 15 2.3.2 Implementation 20 2.4 Microfabrication: Direct Laser Writing 21 2.5 Assisted Reproductive Technology 23 2.5.1 In vitro Fertilization and Intracytoplasmic Sperm Injection 24 2.5.2 Embryo Transfer and Zygote Intrafallopian Transfer 25 2.5.3 The Sperm Cell and the Oocyte 26 2.6 Towards Micromotor-Assisted Reproduction 28 3 Materials and Methods 30 3.1 Fabrication of Microfluidic Channel Platforms 30 3.1.1 Tailored Parafilm Channels 30 3.1.2 Polymer Channels Cast from Micromolds 31 3.1.3 Tubular Channels to Mimic In vivo Ducts 32 3.2 Fabrication of Magnetic Micropropellers 32 3.2.1 Direct Laser Writing of Polymeric Resin 33 3.2.1.1 Design and Programming 33 3.2.1.2 Exposure and Development 35 3.2.1.3 In Situ Direct Laser Writing 35 3.2.2 Critical Point Drying 35 3.2.3 Magnetic Metal Coatings 36 3.2.4 Surface Functionalization 37 3.3 Sample Characterization 38 3.3.1 Optical Microscopy 38 3.3.2 Scanning Electron Microscopy 38 3.4 Cell Culture and Analysis 39 3.4.1 Sperm Cells 39 3.4.2 Oocytes 39 3.4.3 In vitro Fertilization 41 3.4.4 Hypoosmotic Swelling Test 44 3.4.5 Cell Viability Assays 44 3.5 Magnetic Actuation 45 3.5.1 Modified Helmholtz Coil Setup 46 3.5.2 MiniMag Setup 47 3.5.3 Experimental Procedure 48 3.5.3.1 Micromotor Performance Evaluation 48 3.5.3.2 Cell Transport Experiments 49 3.5.3.3 Cell Transfer Experiments 50 4 Micromotor-assisted Sperm Delivery 51 4.1 Micromotor Design and Fabrication 51 4.2 Actuation and Propulsion Performance 53 4.3 Capture, Transport, and Release of Sperm 56 4.4 Delivery to the Oocyte 59 4.5 Sperm Viability and the Ability to Fertilize 61 5 Micromotor-assisted Zygote Transfer 68 5.1 Micromotor Design and Fabrication 68 5.2 Actuation and Propulsion Performance 70 5.3 Capture, Transport, and Release of Zygotes 76 5.4 Transfer between Separate Environments 80 5.5 Zygote Viability and Further Development 82 6 Conclusions and Prospects 85 Appendix 87 Bibliography 93 List of Figures and Tables 108 List of Abbreviations and Terms 109 Theses 111 Selbstständigkeitserklärung 112 Acknowledgments 113 List of Publications 115 Curriculum Vitae 116