Thesis--Auburn University, 2009. / Abstract. Vita. Includes bibliographical references (p. 67-69).

Thesis (Ph. D. engineering science)--Washington State University, December 2007. / Includes bibliographical references (p. 181-191).

Thesis (M.S.)--State University of New York at Binghamton, Mechanical Engineering Dept., 2007. / Includes bibliographical references.

Thesis (M.S.)--West Virginia University, 1999. / Title from document title page. Document formatted into pages; contains xii, 122 p. : ill. (some col.) Includes abstract. Includes bibliographical references (p. 119-122).

Thesis (Ph. D.)--University of Washington, 2004. / Vita. Includes bibliographical references (p. 124-136).

Thesis (M.S. in Electrical Engineering)--Naval Postgraduate School, June 2010. / Thesis Advisor(s): Yun, Xiaoping ; Second Reader: Romano, Marcello. "June 2010." Description based on title screen as viewed on July 14, 2010. Author(s) subject terms: micro-electro-mechanical systems, MEMS, magnetic, angular rate, gravity sensor, MARG sensors, inertial navigation system, INS, inertial test, MicroStrain, 3DM-GX1, 3DMGX3, CompactRIO, MATLAB GUI, dynamic accuracy test. Includes bibliographical references (p. 187-189). Also available in print.

Thesis (Ph.D.) -- University of Texas at Dallas, 2005 / Includes vita. Includes bibliographical references (leaves 139-145)

Thesis (M.S. in Computer Science)--Naval Postgraduate School, September 2009. / Thesis Advisor(s): Singh, Gurminder ; Gibson, John. "September 2009." Description based on title screen as viewed on November 6, 2009. Author(s) subject terms: Microelectromechanical systems, photovoltaic, piezoelectric, thermocouple, power harvesting, energy scavenging, thermoelectric. Includes bibliographical references (p. 59-65). Also available in print.

Thesis (MTech (Technology))--Cape Peninsula University of Technology, 2007 / Most ofMEMS sensors are based on the micro-cantilever technology, which use wide range of different design materials and structures. The benefit ofMEMS technology is in developing devices having lower cost, lower power consumption, higher performance, and integration. A free-end cantileverbeam made of magnetic material (PerrnaIloy) and a movable mass attached to the free-end has been designed using MEMS software tools. The magnetic material was used to improve the sensitivity of the cantilever-beam to an external applied magnetic field. The deflection of the cantilever was detected using capacitive sensing method. The aim of this research was to develop a non-contact current sensor based on MEMS technology by analysing the simulation of the system design of the micro cantilever when subjected to a magnetic field produced by a current-carrying conductor. When the signal, a sinusoidal current with a constant frequency is applied, the cantilever-beam exhibits a vibration motion along the vertical axis when it is placed closer to the line current. This creates corresponding capacitance changes and generates a voltage output proportional to the capacitive change in the signal processing circuitry attached to the micro cantilever. Modelling of the magnetic moment of a magnetic cantilever-beam placed in a field, the deflection of { the beam, the natural frequency of the cantilever-beam, the maximum deflection, the change in differential capacitive sensing technique, linearity of the differential capacitive, and capacitive sensitivity the circuit designed for readout was derived.

M.Ing. (Mechanical Engineering) / Micro electromechanical systems (MEMS) are presented and the application of electro discharge machining (EDM) to this scale of manufacture is discussed. A model relating input variables to output variables of micro scale EDM is developed using dimensionless groups and least squares regression. The model is used in a numeric simulation that ultimately predicts the space of a micro crater. Experimental validation is performed to check the reliability of the model by comparing the measurable experimental outputs with the outputs predicted by the model. The results and validity of the model are discussed.