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Development of MEMS power inductors with submicron laminations using an automated electroplating systemShah, Urvi. January 2007 (has links)
Thesis (M. S.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2008. / Committee Chair: Allen, Mark G.; Committee Member: Divan, Deepakraj M.; Committee Member: Taylor, David G.
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Millimeter scale robots for the nanofactoryMurthy, Rakesh. January 2009 (has links)
Thesis (Ph.D.) -- University of Texas at Arlington, 2009.
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Design of two-axis capacitive accelerometer using MEMS /Lee, Chun Ming. January 2004 (has links) (PDF)
Thesis (M.S. in Applied Physics)--Naval Postgraduate School, Dec. 2004. / Thesis Advisor(s): Gamani Karunasiri. Includes bibliographical references (p. 41-42). Also available online.
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Analysis and preliminary characterization of a MEMS cantilever-type chemical sensorArecco, Daniel. January 2003 (has links)
Thesis (M.S.)--Worcester Polytechnic Institute. / Keywords: frequency; vibration; vibrometry; detection; resonance; micromechanical; polymer; absorption; AFM; SEM; holography; optoelectronic; silicon; hydrogen; palladium. Includes bibliographical references (p. 151-161).
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Diffractive optical lens design and fabrication for integrated monitoring of microelectromechanical lateral comb resonatorsMcCormick, William Brent. January 2004 (has links)
Thesis (M.S.)--West Virginia University, 2004. / Title from document title page. Document formatted into pages; contains viii, 118 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 117-118).
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Mems based bead size selection method for the electronic taste chipPark, Byunghwa, Neikirk, Dean P., January 2004 (has links) (PDF)
Thesis (Ph. D.)--University of Texas at Austin, 2004. / Supervisor: Dean P. Neikirk. Vita. Includes bibliographical references.
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A numerical study of nonlinear static and dynamic behavior of a square thin plate-membrane structure for application to a MEMS micro-generatorCrabtree, Owen I., January 2004 (has links) (PDF)
Thesis (M.S. in Mechanical Engineering)--Washington State University. / Includes bibliographical references.
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MEMS testbed for accelerated testing of nanostructures a dissertation /Aceros Rueda, Juan Carlos. January 1900 (has links)
Thesis (Ph. D.)--Northeastern University, 2008. / Title from title page (viewed June 25, 2009). Graduate School of Engineering, Dept. of Electrical and Computer Engineering. Includes bibliographical references (p. 137-143).
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Characterization of noise in MEMS piezoresistive microphonesDieme, Robert. January 2005 (has links)
Thesis (M.S.)--University of Florida, 2005. / Title from title page of source document. Document formatted into pages; contains 93 pages. Includes vita. Includes bibliographical references.
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Optical detection of multiple faults of a MEMS based linear comb resonatorKonduparthi, Lakshmi Deepasree. January 2005 (has links)
Thesis (M.S.)--West Virginia University, 2005. / Title from document title page. Document formatted into pages; contains xi, 84 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 81-84).
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