This thesis presents a surface micromachining process to fabricate scratch drive actuator (SDA). Besides, various parameters (plate length, plate width, plate shapes, support beam width, spring type, one-plate SDA/four-plate SDA, dimple number, bushing length and etching hole¡Ketc.) have been designed to find appropriate design parameters of the SDA and to reduce the driving-voltage. According to the results, we can demonstrate three points below: (i) Adding etching holes at the end of plate can reduce residual electric charge and increase life time of SDA. (ii) Changing normal wafer for low resistance wafer can reduce the driving-voltage of SDA about 35%. (iii) The life time of triangle SDA is longer than those of other plate shapes. Finally, discussions and suggestions for the design of SDA are presented in this thesis.