Micromanipulation is considered a challenging task which requires high precision motion and measurement at the micro scale. When micromanipulation is concerned with living organisms important considerations need to be addressed. These include the physical or chemical properties of micro-organisms, living conditions, responses to the environment and achieving suitably delicate manipulation. Bio-micromanipulation can include micro surgery or cell injection operations, or to determine interaction forces as the basis to investigate behavior and properties of living micro-organisms. In order to achieve suitable bio-micromanipulation appropriate processes and/or sensory systems need to be investigated. This thesis aims to look into the force interaction and sensing addressing two distinctive challenges in the field of bio-micromanipulation. To this end, this thesis presents two major contributions to advancing bio-micromanipulation. Firstly, a novel Haptic Microrobotic Cell Injection System is introduced which is able to assist a bio-operator through haptic interaction. The system introduces a mapping framework which provides an intuitive method for the bio-operator to maneuver the micropipette in a manner similar to handheld needle insertion. To accurately control the microrobot, a neuro-fuzzy modeling and control scheme has been developed. Volumetric, axial and planar haptic virtual fixtures are introduced to guide the bio-operator during cell injection. Aside from improving real-time operator performance using the physical system, the system is novel in facilitating virtual offline operator training. Secondly, a first-of-its-kind micro-pillar based on-chip system for dynamic force measurement of C. elegans motion is introduced. The system comprises a microfabricated PDMS device to direct C. elegans into a matrix of micropillars within a channel mimicking its dwelling environment. An image processing algorithm is able to track the interaction of the C. elegans with the pillars and estimate contact forces based on micropillar deflections. The developed micropillar system is capable of measuring the force with sub-micron resolution while providing a continuous force output spectrum.

La force de diélectrophorèse (DEP) est utilisée pour manipuler, séparer et positionner différent types des particules (cellules, bactéries, nanotubes de carbone). Dans le but d étudieret de simuler une loi de commande permettant le suivi de la trajectoire d une particule soumise à la force DEP un modèle est nécessaire. Les méthodes utilisées pour simuler la force DEP sont généralement basées soit sur des simulateurs à éléments finis (FEM), soit sur des équations analytiques. Les simulateurs FEM ne permettent pas la variation des paramètres (tensions électriques) lors du calcul de la trajectoire et les équations analytiques sont limitées à des géométries simples des électrodes. Dans ce manuscrit, une méthode hybride basée sur les calculs FEM et analytique est proposée. Cette méthode permet de simuler la trajectoire d une particule en utilisant des géométries complexes et en variant les tensions électriques lors de la simulation. Ce modèle est ensuite validé en le comparant à des relevés expérimentaux. Finalement, une loi de commande, basée sur la commande prédictive généralisée (GPC) est proposée dans le but de contrôler la trajectoire, en profitant de la grande dynamique du déplacement de la particule, et ce malgré les non-linéarités. Cette loi de commande a été validée par des résultats de simulations et une comparaison avec une loi de commande classique. / Micro and nano-particles can be trapped by a non uniform electric field through the effect of dielectrophoretic (DEP) principle. Dielectrophoresis is used to separate, manipulate and detect micro particles in several domains, such as in biological or Carbon Nano-Tubes (CNTs) manipulations. To study and simulate a vision based closed loop control law in order to control the trajectory of micro objects using DEP a numeric model is required. Current methods to simulate the trajectory of micro-particles under a DEP force field are based on finite element modeling (FEM) which requires new simulations when one of its parameters, like the electric voltage, is changed, or on analytic equations which is limited to very simple geometries. In the first section of this manuscript, we propose a hybrid method between analytic and numeric calculation able to simulate complex geometries and to easily change electrode voltage along the trajectory. This numeric model is, then, validated by comparing it with several experimental results. Finally, a control strategy based on the generalized predictive control method is proposed with the aim of controlling the trajectory, taking advantage of the high dynamics despite the non linearity. This control law has been validated by simulation and compared to classical control strategy.

Cette thèse présente la conception, la fabrication et la commande d’un microrobot parallèle à deux Degrés de liberté (rotations θ1 et θ 2) qui est dédié pour la microchirurgie laser des cordes vocales.Ce travail a été développé dans le cadre du projet européen “Micro-Technologies and Systems for Robot-Assisted Laser Phonomicrosurgery” intitulé μRALP. D’une part, les aspects médicaux et biologiques ont permis d’extraire un cahier des charges pour le microrobot. D’autre part, l’ état de l’art a permis d’identifier et d’apporter une solution aux verrous technologiques pour satisfaire toutes les requêtes. Ce travail a proposé le développement de deux microrobots indépendants avec des structures parallèles. Bien qu’ayant le même objectif qui consiste à guider deux faisceaux lasers de manière précise vers les cordes vocales, chaque microrobot aune structure cinématique différente. Un miroir placé sur la plateforme de chacun des microrobots permet le guidage des faisceaux, en effectuant la réflexion et le changement de direction. La technique“Smart Composite Microstructures” a été utilisée pour microfabriquer les deux microrobots. En outre, les mouvements ont été réalisés grâce a à l’utilisation d’actionneurs piézoélectriques. Enfin, la précision attendue par la chirurgie des cordes vocales a été atteinte en associant la commande par asservissement visuel et la pré-compensation des non linéarités et des oscillations mal amorties / This thesis reports the design, fabrication and control of a parallel microrobot with two degrees offreedom in rotation, that is destined to perform laser microsurgery on vocal folds. This work has beendeveloped in the frame and in the context of the European project Micro-Technologies and Systemsfor Robot-Assisted Laser Phonomicrosurgery entitled μRALP.On the one hand, needs and limits of medical aspects have been abstracted to create the microrobotspecifications. On the other hand, the state-of-the-art has identified the technological stumblingblocks and has allowed to led to our proposition to satisfy the specifications. This work has envisagedthe fabrication of two independent parallel microrobotic structures. Each proposed microrobot hasa different kinematic structure, however they have the same objective that is to guide a laser beamonto the vocal folds. To this purpose, a mirror is placed on the end-effector of both microrobots inorder to reflect and guide the laser beam. Smart Composite Microstructures fabrication techniquewas used to fabricate the two microrobots. Moreover, piezoelectric cantilever actuators have beenused to generate the required rotations. Finally, the expected precision for laser microsurgery of thevocal folds was reached by coupling the feedforward compensation of nonlinearities and vibrations ofthe actuators with visual feedback control of the parallel kinematic mechanism.

Ces dernières années une attention particulière a été portée sur les systèmes autonomes de taille micrométrique. La taille de ces robots, ou particules, rend impossible l’embarquement d’énergie. Des systèmes d’actionnement et de contrôle à distance, notamment par effets magnétiques, ont été proposés. Ils évoluent généralement dans le milieu liquide. Ce milieu est privilégié en raison de la force de trainée qui stabilise les systèmes et simplifie donc leur contrôle. En revanche, ce milieu induit une limitation majeure sur la vitesse de déplacement de ces particules. Pour exploiter pleinement le potentiel d’actionnement rapide lié à la faible inertie de ces particules de petite taille, cette thèse propose la conception et la commande d’un système microrobotique dédié à l’actionnement haute vitesse. Les choix de conception, notamment l’augmentation de la force magnétique, l’utilisation de particules ferromagnétiques et le choix d’un environnement de travail en milieu ambiant permettent d’atteindre de grandes vitesses de déplacements. Cependant, le milieu ambiant pose des problématiques d’adhésion entre la particule et le substrat de travail et d’absence de modèle de connaissance. Des solutions sont proposées pour vaincre ou réduire les forces d’adhésion dans ce milieu, allant de l’actionnement en couple de la particule magnétique à la structuration mécanique du substrat. Une est également implémentée pour augmenter la précision du positionnement et de l’orientation des particules. Une approche permettant de synthétiser et d’implémenter une loi de régulation proportionnelle des deux paramètres de contrôle est proposée. L’approche expérimentale adoptée permet de quantifier les problématiques rencontrées dans le milieu ambiant et de proposer des solutions systématiques. Ce travail n’est qu’un premier pas dans l’intégration des systèmes microrobotiques en milieu ambiant, mais il fournit des méthodologies de contrôle adaptées à ses spécificités. / In the past few years, much attention has been given to autonomous systems of micrometric size. The small size of these robots, or particles, makes it impossible to embed their energy sources. Wireless systems for actuating and control, in particular through magnetic effects, have been proposed. They usually operate in a liquid environment. This environment is favored due to the drag force which stabilizes a system and therefore makes it easier to control. However, this medium comes with a major limitation to the moving speed of these particles. In order to fully exploit the potential for high speed actuation inherent to the low inertia of these small-sized particles, this thesis proposes the design and control of a microrobotic system dedicated to high speed actuation.The design choices, such increasing the magnetic force, using ferromagnetic particles and choosing to work in an ambient environment increases the displacement speed. However, the dry environment leads to adhesion issues between the particle and the surface of the working substrate, and lack of knowledge-based model. Various solutions are proposed in this thesis to overcome or reduce adhesion forces in this environment, from the coupled actuation of the magnetic, to the mechanical structuring of the surface of the substrate. A closed-loop control has also been integrated to increase the accuracy of the positioning and orientation of the particles. An approach to the synthesis and implementation of a proportional regulation is proposed for the two control parameters. The chosen experimental approach makes it possible to quantify the issues related to the ambient environment and bring systematic solutions to them.This work is but a first step in the integration of microrobotic systems in ambient environments, but it offers a control methodology, which is adapted to its specificities.

This dissertation describes the evolution of the different local magnetic field generating systems for independent actuation of multiple microrobots. A description of the developed hardware, system characterization tests, and experimental results are presented. The system is designed for automated control of multiple microrobots. Finally, sample micromanipulation tasks are demonstrated using the new microrobot design, showcasing its improved manipulation capabilities.<br>First, a mm-scale local magnetic field generating system designed for single layer coils is used to control 3.175 mm size N52 magnets as robots independently in the workspace. The controller used a set of local equilibrium points that were generated from a sequence of coil currents around the robots from one state to the next. The robots moved along paths computed through optimal control synthesis approach to solve complex micromanipulation tasks captured by global LTL formulas. However, the use of local equilibrium points as the states limited the motion of the robot in the workspace to simple tasks. Also, the interaction between the robots limited the robots to stay within far distances with each other. Hence a larger workspace based coil is designed to actuate up to four mm-scale robots in the workspace.<br><br>To improve the resolution of motion of these robots in the workspace, the mm-scale coils are modeled extensively. The forces generated by various coil combinations of the array are modeled and solutions for different actuation force directions are discovered for different locations in the coil. A path planning problem is formulated as a Markov decision process that solves a policy to reach a goal from any location in the workspace. The MDP formulation is also expanded to work when other robots are present in the workspace. The formulation considers the interaction force between the robots and changes the policy to reach the goal location which reduces in the uncertainty of motion of the robot in the presence of interactions from other robots in the workspace.<br><br>The mm-scale coils are difficult to scale down for microrobotic applications and hence a new microscale local magnetic field system was designed. A new microscale local magnetic field system which consisted of two 8 × 8 array of coils aligned in two axes in two layers of a PCB was designed which could actuate robots as small as 1 mm in the plane. The microcoils in the second layer are also able to generate sufficient magnetic field gradients in the workspace, while the traces below it are spaced adequately to eliminate their influence in the workspace. A new microrobot design also enabled the orientation control of the microrobot for performing micromanipulation tasks. However, only two robots could be independently actuated in this workspace due to interaction between the robots.<br><br>In pursuit of actuation smaller and multiple robots in a small workspace, a serpentine coil based local magnetic field generating system was designed to control of the motion of magnets as small as 250 µm. The net size of the robot is 750 µm to enable orientation control and prevent tipping during motion. This system is capable of simultaneous independent closed loop control of up to 4 microrobots. The motion of the robot using the coils resembled that of a stepper motor which enabled the use of sine-cosine functions to specify currents in the coils for smooth motion of the<br>microrobot in the workspace. The experiments demonstrated the capability of the microrobot and platform to simultaneously actuate up to four robots independently and successfully perform manipulation tasks. The ability to control the orientation of the magnet is finally demonstrated that has improved ability to perform manipulation tasks.<br><br>

<p>This work explores a new method of force generation for flying robots on the sub-cm wingspan scale: resonant curved piezoelectric cantilevers created using completely parallel MEMS fabrication. It theorizes that because a resonating curved beam has a different drag coefficient on the upstroke than the downstroke, it should act as a fluid diode: a partial one-way gate for fluids, and thereby generate an asymmetric force over a symmetric one-degree-of-freedom flapping cycle. It develops a simplified model for the large-amplitude resonant mode of thin circular arcs by analytically extending the resonant mode shape of straight cantilevers, shows that this shape is a better fit to experimental data than previous models, and shows that it accurately predicts the resonant frequency. It uses this resonant mode to compute the force on flapping curved arcs under a wide range of amplitudes, Reynolds numbers, and arc angles using computational fluid dynamics (CFD) simulations, and extends the concept of a drag coefficient from steady-flow fluid mechanics to steady-state oscillatory fluid mechanics both for net force generation and power dissipation. It develops a framework to analyze the CFD results in the broader context of a complete robot, and uses this framework to determine priorities for material selection, robot size, and flapping shape, depending on desired robot application. It tests these theoretical predictions by creating prototype 7.6 mm wings out of 7.5 micrometer thick x-cut quartz and SU-8, after developing and implementing a method to smoothly thin x-cut quartz leaving the surface free of dielectric-compromising pits using reactive ion etching (RIE). Finally, it constructs a test chamber to measure the force, amplitude, and electrical parameters of the flapping wings under a variety of air pressures and demonstrates that the results are consistent with the theoretical predictions, indicating that this approach can in fact lead to successful flying microrobots.</p> / Doctor of Philosophy (PhD)

Flapping-wing micro air vehicle (MAV) is an emerging micro-robotic technology, which has several challenges toward its practical implementation. Inspired by insect flight, researchers have adopted bio-mimicking approach to accomplish its engineering model. There are several methods to synthesize such an electromechanical system. A piezoelectric actuator driven flapping mechanism, being voltage controlled, monolithic, and of solid state type exhibits greater potential than any conventional motor driven flapping wing mechanism at small scale. However, the demand for large tip deflection with constrained mass introduces several challenges in the design of such piezoelectric actuators for this application. The mass constraint restricts the geometry, but applying high electric field we can increase the tip deflection in a piezoelectric actuator. Here we have investigated performance of rectangular piezo-actuator at high electric field. The performance measuring attributes such as, the tip deflection, block force, block moment, block load, output strain energy, output energy density, input electrical energy, and energy efficiency are analytically calculated for the actuator at high electric field. The analytical results suggest that the performance of such an actuator can be improved by tailoring the geometry while keeping the mass and capacitance constant. Thereby, a tapered piezoelectric bimorph cantilever actuator can provide better electromechanical performance for out-of-plane deflection, compared to a rectangular piezoelectric bimorph of equal mass and capacitance. The constant capacitance provides facility to keep the electronic signal bandwidth unchanged. We have analytically presented improvement in block force and its corresponding output strain energy, energy density and energy effi- ciency with tapered geometry. We have quantitatively and comparatively shown the per- formance improvement. Then, we have considered a rigid extension of non-piezoelectric material at the tip of the piezo-actuator to increase the tip deflection. We have an- alytically investigated the effect of thick and thin rigid extension of non-piezoelectric material on the performance of this piezo-actuator. The formulation provides scope for multi-objective optimization for the actuator subjected to mechanical and electrical con- straints, and leads to the findings of some useful pareto optimal solutions. Piezoelectric materials are polarized in a certain direction. Driving a piezoelectric actuator by high electric field in a direction opposite to the polarized direction can destroy the piezo- electric property. Therefore, unipolar high electric field is recommended to drive such actuators. We have discussed the drawbacks of existing switching amplifier based piezo- electric drivers for flapping wing MAV application, and have suggested an active filter based voltage driver to operate a piezoelectric actuator in such cases. The active filter is designed to have a low pass bandwidth, and use Chebyshev polynomial to produce unipolar high voltage of low flapping frequency. Adjustment of flapping frequency by this voltage driver is compatible with radio control communication. To accomplish the flapping-wing mechanism, we have addressed a compatible dis- tributed compliant mechanism, which acts like a transmission between the flapping wing of a micro air vehicle and the laminated piezoelectric actuator, discussed above. The mechanism takes translational deflection at its input from the piezoelectric actuator and provides angular deflection at its output, which causes flapping. The feasibility of the mechanism is investigated by using spring-lever (SL) model. A basic design of the com- pliant mechanism is obtained by topology optimization, and the final mechanism is pro- totyped using VeroWhitePlus RGD835 material with an Objet Connex 3D printer. We made a bench-top experimental setup and demonstrated the flapping motion by actuating the distributed compliant mechanism with a piezoelectric bimorph actuator.