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Neutron Measurement and Transient Analysis in a Source Driven Subcritical Assembly for Active Interrogation and Radioisotope ApplicationsAbbas Johar Jinia (5930690) 03 January 2019 (has links)
<div>Detecting hidden/smuggled special nuclear materials (SNM) is one of the unsolved problems in the safeguards industry. The biggest challenge is to quantify and track SNM and prevent the use of these materials for illicit purposes. The goal is to detect smallest quantity of SNM in large cargo containers, at the ports of entry, in the shortest amount of measurement time. Currently passive detection techniques, which is based on long-lived isotopes, are used to detect hidden SNM. This technique is not very reliable, as appropriate shielding of the SNM can reduce detection signals from these long-lived isotopes. Accelerator based active interrogation methods are proposed to solve the SNM problem. Besides SNM, another challenge in the nuclear industry is to meet the demand and supply of medical radioisotopes, particularly Tc-99m (half-life 6 hours). Mo-99, which decays to Tc-99m, is one of the fission products found in nuclear reactors. Because of short half-life of 66 hours, Mo-99 cannot be stockpiled. The shutdown of various research reactors globally disrupted the supply of Mo-99. Because of the financial and regulatory burden on the nuclear reactors, accelerator-based systems can be used to produce Mo-99.</div><div><br></div><div>With the aim to solve these two major challenges, a preliminary study is done to understand the neutrons behavior on milliseconds (or shorter) time steps in an accelerator driven subcritical system. A pulsed external neutron source, i.e. Deuterium-Deuterium (DD) generator, drives the assembly. Using first principles, the transient equations are derived and the neutron population at different time stamps is calculated. The Li-6 detector’s response to the neutron population is predicted. Experiments are performed to compare the predicted behavior with the observed behavior. The model is extended further to investigate the case of no uranium fuel inside the system. Transient measurements, in the absence of the uranium fuel, are made and the neutron die-away time is determined. This die-away time is compared with the predicted time.</div>
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Gamma-ray emission from Galactic millisecond pulsars: Implications for dark matter indirect detectionSong, Deheng 18 January 2022 (has links)
The Fermi Large Area Telescope has observed a gamma-ray excess toward the center of the Galaxy at ~ GeV energies. The spectrum and intensity of the excess are consistent with the annihilation of dark matter with a mass of ~100 GeV and a velocity-averaged cross section of ~ 1e-26 cubic centimeter per second. In the meantime, a population of unresolved millisecond pulsars (MSPs) in the Galactic center remains a possible source of the excess. Furthermore, recent analyses have shown that the excess prefers the spatial morphology of the stellar bulge distribution in the Galactic center, supporting a MSP origin. The new discovery makes it imperative to further study the signals from MSPs.
This dissertation studies the gamma-ray emission from Galactic millisecond pulsars to provide new insights into the origin of the Galactic center excess. Using the GALPROP code, we simulate the propagation of e± injected by the putative MSPs in the Galactic bulge and calculate the inverse Compton (IC) emission caused by the e± losing energy in the interstellar radiation field. We find recognizable features in the spatial maps of the IC. Above TeV energies, the IC morphology tends to follow the distribution of the injected e±. Then, we study the Cherenkov Telescope Array (CTA) sensitivity to the IC signal from MSPs. We find that the CTA has the potential to robustly discover the IC signature when the MSP e± injection efficiencies are in the range ≈ 2.9-74.1%. The CTA can also discriminate between an MSP and a dark matter origin for the radiating e± based on their different spatial maps.
Next, we analyze the Fermi data from directions of Galactic globular clusters. The globular clusters are thought to be shining in gamma rays because of the MSP population they host. By analyzing their gamma-ray spectra, we reveal evidence for an IC component in the high-energy tail of Fermi data. Based on the IC component in the globular cluster spectra, the e± injection efficiency of millisecond pulsars is estimated to be slightly smaller than 10%.
Finally, we study the spatial morphology of the 511 keV signal toward the Galactic center using data from INTEGRAL/SPI. We confirm that the 511 keV signal also traces the old stellar population in the Galactic bulge, which is similar to the Fermi GeV excess. Using a 3D smoothing kernel, we find that the signal is smeared out over a characteristic length scale of 150 ± 50 pc. We show that positron propagation prior to annihilation can explain the overall phenomenology of the 511 keV signal. / Doctor of Philosophy / Dark matter means matter that does not interact with light; therefore, they are invisible to traditional observations. We know that dark matter exists based on plenty of gravitational evidence: the motions of stars in galaxies, the large-scale structure of the Universe, the temperature fluctuations in the cosmic microwave background. However, we still know very little about the particle nature of dark matter. Detecting dark matter is one of the most extensive missions of modern physics. In indirect detection, the dark matter particles are expected to annihilate or decay in the cosmos, producing messenger particles that include gamma rays, cosmic rays, and neutrinos. Astronomical observations could detect those signals and confirm the nature of dark matter. However, understanding the astrophysical sources is essential for indirect detection of dark matter as they may emit similar signals. For a recent example, the Fermi Large Area Telescope launched by NASA is the most sensitive gamma-ray telescope in the energy range of ~ 100 MeV to ~ 100 GeV. It has detected an excess of gamma-ray signals toward the Galactic center consistent with what we expect from dark matter annihilation. However, millisecond pulsars, a type of fast rotating neutron stars, may also generate similar gamma-ray signals. Therefore, the origin of the signal remains unsettled.
In this dissertation, we study different prospective of the gamma-ray emission from the millisecond pulsars in the Milky Way. We first study the inverse Compton signal from the millisecond pulsars in the Galactic bulge, caused by the relativistic e± injected by the millisecond pulsars. We find that the signal traces the original distribution of the e± above TeV energies. Next generation ground-based gamma-ray observatories like the Cherenkov Telescope Array (CTA) could be used to detect the signal. We study the CTA sensitivity to such an inverse Compton signal. We find that CTA can detect the inverse Compton signal from millisecond pulsars and discriminate it from a dark matter signal. We also study the gamma-ray emission from globular clusters in the Milky Way. They are dense collections of old stars orbiting our Galaxy, and they are known for hosting many millisecond pulsars. We reveal evidence for inverse Compton emission from the gamma-ray data of globular clusters. Our discovery helps us better understand the high-energy property of millisecond pulsars. Last, we study the morphology of the Galactic 511 keV signal caused by positron annihilation. Compact objects including millisecond pulsars are potential sources of the positrons. We find that the old stellar distribution with a smearing scale of ~ 150 pc best describes the 511 keV signal. Positron propagation from their sources prior to annihilation could explain the measured smearing scale.
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A psychophysical investigation of audio-visual timing in the millisecond rangeHotchkiss, John January 2012 (has links)
The experiments described in this thesis use psychophysical techniques and human observers to investigate temporal processing in the millisecond range. The thesis contains five main sections. Introductory chapters provide a brief overview of the visual and auditory systems, before detailing our current understanding of duration processing. During the course of this review, several important questions are highlighted. The experiments detailed in Chapters 8-11 seek to address these questions using the psychophysical techniques outlined in Chapter 7. The results of these experiments increase our understanding of duration perception in several areas. Firstly, Experiments 1 and 2 (Chapter 8) highlight the role of low level stimulus features: even when equated for visibility stimuli of differing spatial frequency have different perceived durations. Secondly, a psychophysical hypothesis arising from the 'duration channels' or 'labelled lines' model of duration perception is given strong support by the adaptation experiments detailed in Chapter 9 and 10. Specifically, adaptation to durations of a fixed temporal extent induces repulsive duration aftereffects that are sensory specific and bandwidth limited around the adapted duration. Finally Chapter 11 describes the results of experiments designed to probe the processing hierarchy within duration perception by measuring the interdependency of illusions generated via duration adaptation and via multisensory cue combination. The results of these experiments demonstrate that duration adaptation is a relatively early component of temporal processing and is likely to be sub served by duration selective neurons situated in early sections of the visual and auditory systems.
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A psychophysical investigation of audio-visual timing in the millisecond range.Hotchkiss, John January 2012 (has links)
The experiments described in this thesis use psychophysical techniques and human observers to investigate temporal processing in the millisecond range. The thesis contains five main sections. Introductory chapters provide a brief overview of the visual and auditory systems, before detailing our current understanding of duration processing. During the course of this review, several important questions are highlighted. The experiments detailed in Chapters 8-11 seek to address these questions using the psychophysical techniques outlined in Chapter 7. The results of these experiments increase our understanding of duration perception in several areas. Firstly, Experiments 1 and 2 (Chapter 8) highlight the role of low level stimulus features: even when equated for visibility stimuli of differing spatial frequency have different perceived durations. Secondly, a psychophysical hypothesis arising from the ¿duration channels¿ or ¿labelled lines¿ model of duration perception is given strong support by the adaptation experiments detailed in Chapter 9 and 10. Specifically, adaptation to durations of a fixed temporal extent induces repulsive duration aftereffects that are sensory specific and bandwidth limited around the adapted duration. Finally Chapter 11 describes the results of experiments designed to probe the processing hierarchy within duration perception by measuring the interdependency of illusions generated via duration adaptation and via multisensory cue combination. The results of these experiments demonstrate that duration adaptation is a relatively early component of temporal processing and is likely to be sub served by duration selective neurons situated in early sections of the visual and auditory systems.
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Protein Folding and Unfolding on the Millisecond Time Scale using Contained-Electrospray IonizationMiller, Colbert 28 December 2016 (has links)
No description available.
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The effect of general relativistic frame dragging on millisecond pulsar visibility for the H.E.S.S. telescope / C. VenterVenter, Christo January 2004 (has links)
It has been noted by several authors that General Relativistic frame dragging in rotating
neutron stars is a first order effect which has to be included in a self-consistent model of pulsar
magnetospheric structure and associated radiation and transport processes. To this end, I
undertook the present study with the aim of investigating the effect of General Relativity
(GR) on millisecond pulsar (MSP) visibility.
I developed a numerical code for simulating a pulsar magnetosphere, incorporating the
GR-corrected expressions for the electric potential and field. I included curvature radiation
(CR) due to primary electrons accelerated above the stellar surface, as well as inverse Compton
scattering (ICS) of thermal X-ray photons by these electrons. I then applied the model to
PSR J0437-4715, a prime candidate for testing the GR-Electrodynamic theory, and examined
its visibility for the H.E.S.S. telescope. I also considered the question of whether magnetic
photon absorption would take place for this particular pulsar. In addition, I developed a
classical model for comparison with the GR results.
I found that the typical electron energies and associated CR photon energies are functions
of position above the polar cap (PC). These energies are also quite smaller in the GR case
than in the classical case due to the different functional forms of the GR and classical electric
fields. I found the CR energy cut-off to be ~ 4 GeV compared to the well-known classical
value of ~ 100 GeV. Since the H.E.S.S. energy threshold is ~ 100 GeV, it seems as though
the CR component will not be visible, contrary to wide-held opinion. However, the ICS
component seems to be well in excess of the H.E.S.S. energy threshold and is expected to be
visible. I also found that no pair production will take place for PSR J0437-4715.
Hopefully, forthcoming H.E.S.S. observations will provide validation of these results.
KEY WORDS: General relativistic frame dragging, GR electrodynamics, millisecond pulsar
visibility, non-thermal radiation processes, pair production, H.E.S.S., individual pulsars:
PSR J0437-4715. / Thesis (M.Sc. (Physics))--North-West University, Potchefstroom Campus, 2004.
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The effect of general relativistic frame dragging on millisecond pulsar visibility for the H.E.S.S. telescope / C. VenterVenter, Christo January 2004 (has links)
It has been noted by several authors that General Relativistic frame dragging in rotating
neutron stars is a first order effect which has to be included in a self-consistent model of pulsar
magnetospheric structure and associated radiation and transport processes. To this end, I
undertook the present study with the aim of investigating the effect of General Relativity
(GR) on millisecond pulsar (MSP) visibility.
I developed a numerical code for simulating a pulsar magnetosphere, incorporating the
GR-corrected expressions for the electric potential and field. I included curvature radiation
(CR) due to primary electrons accelerated above the stellar surface, as well as inverse Compton
scattering (ICS) of thermal X-ray photons by these electrons. I then applied the model to
PSR J0437-4715, a prime candidate for testing the GR-Electrodynamic theory, and examined
its visibility for the H.E.S.S. telescope. I also considered the question of whether magnetic
photon absorption would take place for this particular pulsar. In addition, I developed a
classical model for comparison with the GR results.
I found that the typical electron energies and associated CR photon energies are functions
of position above the polar cap (PC). These energies are also quite smaller in the GR case
than in the classical case due to the different functional forms of the GR and classical electric
fields. I found the CR energy cut-off to be ~ 4 GeV compared to the well-known classical
value of ~ 100 GeV. Since the H.E.S.S. energy threshold is ~ 100 GeV, it seems as though
the CR component will not be visible, contrary to wide-held opinion. However, the ICS
component seems to be well in excess of the H.E.S.S. energy threshold and is expected to be
visible. I also found that no pair production will take place for PSR J0437-4715.
Hopefully, forthcoming H.E.S.S. observations will provide validation of these results.
KEY WORDS: General relativistic frame dragging, GR electrodynamics, millisecond pulsar
visibility, non-thermal radiation processes, pair production, H.E.S.S., individual pulsars:
PSR J0437-4715. / Thesis (M.Sc. (Physics))--North-West University, Potchefstroom Campus, 2004.
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Studies of the influence of magnetospheric pulsar winds on the pulsar surroundings / Étude de l'influence des vents magnétosphériques des pulsars sur leur environnementZajczyk, Anna 26 October 2012 (has links)
Cette thèse présente le travail réalisé par l'auteur consacréà l'étude de l'influence des vents magnétosphériques des pulsars sur leur environnement. Le problème du vent magnétosphérique des pulsars est étudié dans le contexte des pulsars classiques, qui forment des nébuleuses de pulsar. L'observation de ces nébuleuses fournit des informations importantes sur leurs conditions physiques et dynamiques. Le vent magnétosphérique des pulsars milliseconde est également étudié. La contribution des pulsars millisecondeà l'émission gamma des amas globulaires est étudiée par des simulations numériques.Dans la première partie, les résultats des observations infrarouge du vestige de supernova G21.5-0.9 sont présentées. Les données utilisées comprennent des observations du Very Large Telescope de l'ESO, du télescope Canada-France-Hawaï (CFHT) et du télescope spatial Spitzer. La détection de la nébuleuse compacte autour du pulsar PSR J1833-1034, avec l'instrument CFHT/AOB-KIR (bande K') et la caméra IRAC/Spitzer (toutes les bandes), est présentée. La valeur moyenne de la fraction de polarisation linéaire de l'émission détectée est estiméeà $P_{rm L}^{avg} simeq 0.47$. Une oscillation du vecteur champ électrique dans la nébuleuse compacte peut être observée. Le spectre infrarouge de la nébuleuse compacte est bien décrit par une loi de puissance d'indice $alpha_{rm IR} = 0.7 pm 0.3$, et suggère un aplatissement spectral entre les domaines infrarouge et X. La détection de la raie d'émission [Fe II] à 1.64 $mu$m est présentée. La spectroscopieà moyenne résolution permet d'estimer l'extinction par le milieu interstellaire de l'émission infrarouge de l'objet, ainsi que la vitesse d'expansion de la matière émettant la raie du [Fe II], ce qui conduità une estimation de la distanceà G21.5-0.9 de $3.9 pm 1.2$ kpc.La deuxième partie présente une étude de l'activité magnétosphérique des pulsars milliseconde dans le contexte de l'émission gamma des amas globulaires. Une base de données des caractéristiques d'émission des pulsars milliseconde et des spectres d'éjection des électrons est créée sur la base du modèle pair starved polar cap de la magnétosphère des pulsars. Le concept de facteur de biais est introduit et étudié. Des spectres synthétiques d'amas globulaires sont simulés dans la gamme d'énergie allant du GeV au TeV. Ils consistent en une composante d'émission magnétosphérique des pulsars milliseconde résidant dans l'amas, et une composante Compton inverse résultant de la diffusion des photons ambiants (le champ stellaire des photons provenant des étoiles de l'amas, et le fond diffus cosmologique) par les leptons relativistes diffusant dans l'amas. Enfin, les spectres synthétiques des amas globulaires sont comparés et contrastés avec les observationsà haute et très haute énergie des amas globulaires sélectionnés: Terzan 5 et 47 Tucanae. / This PhD thesis presents the results of the studies on the influence of magnetospheric pulsar winds on the surroundings of these objects. The problem of the magnetospheric pulsar wind is studied in the context of classical pulsars, which power prominent pulsar wind nebulae. Observations of these nebulae yield important information on their physical and dynamical conditions. The magnetospheric winds of millisecond pulsars are also investigated. The contribution of millisecond pulsars to the gamma-ray emission of globular clusters is studied through numerical simulations. In the first part of the thesis, the results of infrared observations of the supernova remnant G21.5-0.9 are presented. The observational material includes data obtained with the ESO Very Large Telescope, the Canada-France-Hawaii Telescope and the Spitzer Space telescope. The detection of the compact nebula around the pulsar PSR J1833-1034, through imaging with both the CFHT/AOB-KIR instrument (K' band) and the IRAC/Spitzer camera (all bands), is reported. The average value of the linear polarisation fraction $P_{rm L}^{avg} simeq 0.47$ of the detected emission is estimated. A swing of the electric field vector across the compact nebula is observed. The infrared spectrum of the compact nebula is best described as a power law of index $alpha_{rm IR} = 0.7 pm 0.3$, and suggests its flattening between the infrared and X-ray bands. The detection of [Fe II] 1.64 $mu$m line emitting material is reported. Through medium resolution spectroscopy the infrared interstellar extinction to the object is estimated, and also the expansion velocity of the iron-line emitting material is determined, which in turn leads to estimating the distance of $d = 3.9 pm 1.2$ kpc to G21.5-0.9. The second part presents a study of the magnetospheric activity of millisecond pulsars in the context of the gamma-ray emission of globular clusters. Based on the pair starved polar cap model of the pulsar magnetosphere the database of the millisecond pulsar emission characteristics and the electron ejection spectra is created. The modelled electron ejection spectra are single-peaked for mildly inclined and fast rotating pulsars, while double-peaked for slowly rotating pulsars. The concept of the bias factor is introduced and studied. Synthetic spectra of globular clusters, stretching from MeV up to TeV energies, are simulated. They consist of the magnetospheric contribution from the millisecond pulsar population residing in the cluster, and an inverse Compton scattering (ICS) component resulting from up-scattering of the ambient photon fields (cosmic microwave background and optical photons from stellar population in the cluster) on the relativistic electrons diffusing through the cluster. The spectral characteristics of the ICS component depends on the composition of the ambient photon fields and also on the magnitude of the cluster magnetic field $B_{rm GC}$. For low $B_{rm GC} sim 1 mu$G the spectra are double-peaked. For the high $B_{rm GC} gtrsim 10 mu$G the ICS spectra are single-peaked. The level of ICS emission increases with the increase of $B_{rm GC}$, but it saturates for $B_{rm GC} sim 10 ~mu$G. Finally, the simulated synthetic spectra of globular clusters are confronted with the existing gamma-ray data for selected clusters: Terzan 5 and 47 Tucanae.
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Détections de pulsars milliseconde avec le FERMI Large Area TelescopeGuillemot, Lucas 24 September 2009 (has links)
Le satellite Fermi a été lancé le 11 juin 2008, avec à son bord le Large Area Telescope (LAT). Le LAT est un télescope sensible au rayonnement ? de 20 MeV à plus de 300 GeV. Avant la mise en service du LAT, six pulsars jeunes et énergétiques étaient connus dans le domaine ? . Le nombre de détections de pulsars par le LAT prédit avant lancement était de plusieurs dizaines au moins. Le LAT permettait également l’étude des pulsars milliseconde (MSPs), jamais détectés avec certitude à très haute énergie jusqu’alors. Cette thèse aborde dans un premier temps la campagne de chronométrie des pulsars émetteurs radio et/ou X, candidats à la détection par le LAT, en collaboration avec les grands radiotélescopes et télescopes X. Cette campagne a permis la recherche de signaux ? pulsés avec une grande sensibilité. En outre, la plupart des MSPs galactiques ont été suivis dans le cadre de cette campagne, sans biais de sélection a priori sur cette population d’étoiles. Pour la première fois, des pulsations ont été détectées pour huit MSPs galactiques au-dessus de 100 MeV. Quelques bons candidats à une détection prochaine apparaissent. Une recherche similaire a été conduite pour des MSPs d’amas globulaires, sans succès à présent. L’analyse des courbes de lumière et des propriétés spectrales des huit MSPs détectés révèle que leur rayonnement ? est relativement similaire à celui des pulsars ordinaires, et est vraisemblablement produit dans la magnétosphère externe. Cette découverte suggère que certaines sources non-identi?ées sont des MSPs, pour l’instant inconnus. / The Fermi observatory was launched on June 11, 2008. It hosts the Large Area Telescope (LAT), sensitive to ? -ray photons from 20 MeV to over 300 GeV. Before the LAT began its activity, six young and energetic pulsars were known in ? rays. At least several tens of pulsar detections by the LAT were predicted before launch. The LAT also allowed the study of millisecond pulsars (MSPs), never ?rmly detected in ? rays before Fermi. This thesis ?rst presents the pulsar timing campaign for the LAT, in collaboration with large radiotelescopes and X-ray telescopes, allowing for high sensitivity pulsed searches. Furthermore, it lead to quasi-homogeneous coverage of the galactic MSPs, so that the search for pulsations in LAT data for this population of stars was not affected by an a priori bias. We present a search for pulsations from these objects in LAT data. For the ?rst time, eight galactic MSPs have been detected as sources of pulsed ? -ray emission over 100 MeV. In addition, a couple of good candidates for future detection are seen. A similar search for globular cluster MSPs has not succeeded so far. Comparison of the phase-aligned ? -ray and radio light curves, as well as the spectral shapes, leads to the conclusion that their ? -ray emission is similar to that of normal pulsars, and is probably produced in the outer-magnetosphere. This discovery suggests that many unresolved ?-ray sources are unknown MSPs.
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Neuartige Ausheilverfahren in der SOI-CMOSFET-TechnologieIllgen, Ralf 19 July 2011 (has links) (PDF)
Thermische Ausheilprozesse werden bei der Transistorformation im Wesentlichen eingesetzt, um die durch die Ionenimplantation entstandenen Kristallschäden auszuheilen und die eingebrachten Dotanden zu aktivieren. Besonders kritisch sind dabei die finalen Aktivierungsprozesse, bei denen die Source/Drain-Gebiete der Transistoren gebildet werden. Im Zuge der kontinuierlichen Skalierung der CMOSFET-Technologie ist es außerdem erforderlich, möglichst flache, abrupte Dotierungsprofile mit maximaler elektrischer Aktivierung zu erhalten, um die bei diesen Bauelementeabmessungen immer stärker auftretenden Kurzkanaleffekte zu unterdrücken und gleichzeitig eine höhere Leistungsfähigkeit der Transistoren zu gewährleisten. Zur maximalen Aktivierung bei minimaler Diffusion der eingebrachten Dotanden müssen dazu während der finalen Ausheilung extrem kurze Ausheilzeiten bei sehr hohen Temperaturen bewerkstelligt werden. Mit dem derzeitig angewandten Ausheilverfahren, der schnellen thermischen Ausheilung (RTA), bei der die minimale Ausheilzeit im Bereich von 1 s liegt, sind diese Vorgaben nicht mehr realisierbar. Nur durch den Einsatz von neuartigen thermischen Ausheilprozessen mit Ausheilzeiten im Millisekundenbereich können diese Forderungen erreicht werden.
Das Thema der vorliegenden Arbeit ist die wissenschaftliche Untersuchung der neuartigen Ausheilprozesse und die experimentelle Realisierung von Integrationsmöglichkeiten in die planare Hochleistungs-SOI-CMOSFET-Technologie.
Dazu wird zunächst die Notwendigkeit der Einführung der neuartigen Ausheilprozesse erläutert. Anschließend wird basierend auf experimentellen Untersuchungen der Einfluss der Kurzzeitausheilung auf die Diffusion und Aktivierung der Dotierstoffe für eine p- und n-Dotierung analysiert. Des Weiteren werden zwei unterschiedliche Technologien der Kurzzeitausheilung, die Blitzlampen- und Laser-Ausheilung, und deren Einfluss auf das Transistorverhalten sowohl auf Wafer- als auch auf Mikroprozessorebene untersucht. Der Schwerpunkt der vorliegenden Arbeit liegt auf der experimentellen Untersuchung zur Integration der Kurzzeitausheilung in den Herstellungsprozess von Hochleistungs-SOI-CMOSFETs. Zwei verschiedene Ansätze werden dabei näher betrachtet. Zum Einen wird der Einfluss der Kurzzeitausheilung als zusätzlicher Ausheilschritt im Anschluss an die herkömmliche RTA und zum Anderen als alleiniger Ausheilschritt ohne RTA untersucht. Die Ergebnisse der durchgeführten Experimente zeigen, dass durch die zusätzliche Kurzzeitausheilung nach Ansatz 1 ohne eine Veränderung des Herstellungsprozesses ein verbessertes Transistorverhalten erreicht werden kann. Demgegenüber ist die Integration der Kurzzeitausheilung nach Ansatz 2 nur durch eine Anpassung der Transistorarchitektur und eine Optimierung der Implantationsparameter für die Halo-, Source/Drain-Erweiterungs- und Source/Drain-Gebiete möglich. Ein Hauptaugenmerk bei der Herstellung diffusionsarmer p-MOSFETs nach Ansatz 2 liegt in der Implementierung von Si1-xGex-Source/Drain-Gebieten, um die Erhöhung der Leistungsfähigkeit durch diese Verspannungsquelle auch bei diesen Transistortypen zu gewährleisten. Die dazu durchgeführten experimentellen Untersuchungen zeigen, dass bei diffusionsarmen p-MOSFETs mit Si1-xGex in den Source/Drain-Gebieten des Transistors, die Wahl der richtigen Implantationsspezies von entscheidender Bedeutung ist. Abschließend erfolgt eine Gegenüberstellung der Ergebnisse von optimierten, diffusionsarmen n- und p-MOSFETs mit Transistoren der 45 nm-Technologie. Letztere basieren auf einem Prozess mit einer kombinierten Ausheilung von RTA und Kurzzeitausheilung. Dabei wird gezeigt, dass im Gegensatz zur herkömmlichen RTA-Ausheilung eine weitere Miniaturisierung der planaren Transistorstruktur mit Hilfe der Kurzzeitausheilung möglich ist.
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