Recently, a number of empirical models have been introduced in the literature for the behavior of direct path used in the design of algorithms for RF based indoor geolocation. Frequent absence of direct path has been a major burden on the performance of these algorithms directing researchers to discover algorithms using multipath diversity. However, there is no reliable model for the behavior of multipath components pertinent to precise indoor geolocation. In this dissertation, we first examine the absence of direct path by statistical analysis of empirical data. Then we show how the concept of path persistency can be exploited to obtain accurate ranging using multipath diversity. We analyze the effects of building architecture on the multipath structure by demonstrating the effects of wall length and wall density on the path persistency. Finally, we introduce a comprehensive model for the spatial behavior of multipath components. We use statistical analysis of empirical data obtained by a measurement calibrated ray-tracing tool to model the time-of- arrival, angle-of-arrival and path gains. The relationship between the transmitter-receiver separation and the number of paths are also incorporated in our model. In addition, principles of ray optics are applied to explain the spatial evolution of path gains, time-of-arrival and angle-of-arrival of individual multipath components as a mobile terminal moves inside a typical indoor environment. We also use statistical modeling for the persistency and birth/death rate of the paths.