Since 1999, Ministry of Economic Affairs, R.O.C. boosts ITDP programs actively¡Adeveloping science and technology programs get more and more important for upgrading industry¡¦s R&D abilities. This study is going to establish a performance appraisal model to promote the justice and trust of programs appraisal, provide government for a well model to advance national industries¡¦ forces and competencies. This study establishes a performance appraisal model with AHP and Delphi method. It is shown that ¡§networks effect¡¨ is the most important and critical index of this model and program. Finally we address a performance appraisal model to help the government and industries set up an evaluation or execute appraisal strategy well.