The objective of this dissertation is to present a modeling and simulation methodology for MEMS devices and identify and understand the associated nonlinearities due to large deflections, electric actuation, impacts, and friction. In the first part of the dissertation, we introduce a reduced-order model of flexible microplates under electric excitation. The model utilizes the von Karman plate equations to account for geometric nonlinearities due to large plate deflections. The Galerkin approach is employed to reduce the partial-differential equations of motion and associated boundary conditions into a finite dimensional system of nonlinearly coupled ordinary-differential equations. We use the reduced-order model to analyze the mechanical behavior of a simply supported microplate and a fully clamped microplate. Effect of various design parameters on both the static and dynamic characteristics of microplates is studied. The second part of the dissertation presents comprehensive modeling and simulation tools for impact microactuators. Nonsmooth dynamics due to impacts and friction are studied, combining various approaches, including direct numerical integration, root-finding technique for periodic motions, continuation of grazing periodic orbits, and local analysis of the near grazing dynamics. The transition between nonimpacting and impacting long term motions, referred to as grazing bifurcations, indicates the transition between on and off states of an impact microactuator. Three different on-off switching mechanisms are identified for the Mita microactuator. These mechanisms also generalize to arbitrary impacting systems with a similar nonlinearity. A local map based on the concept of discontinuity mapping provides an effcient and accurate tool for the grazing bifurcation analysis. Nonlinear impacting dynamics of the microactuator are studied in detail to identify various bifurcations and parameter ranges corresponding to chaotic motions. We find that the frequency-response curves of the impacting dynamics are significantly different from those of the nonimpacting dynamics. / Ph. D.

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The first part of this Thesis deals with the analysis of piecewise-smooth mechanical systems and the definition of special stability criteria in presence of non-conservative follower forces. To illustrate the peculiar stability properties of this kind of dynamical system, a reference 2 d.o.f. structure has been considered, composed of a rigid bar, with one and constrained to slide, without friction, along a curved profile, whereas the other and is subject to a follower force. In particular, the curved constraint is assumed to be composed of two circular profiles, with different and opposite curvatures, defining two separated subsystems. Due to this jump in the curvature, located at the junction point between the curved profiles, the entire mechanical structure can be modelled by discontinuous equations of motion, the differential equations valid in each subsystem can be combined, leading to the definition of a piecewise-smooth dynamical system. When a follower force acts on the structure, an unexpected and counterintuitive behaviour may occur: although the two subsystems are stable when analysed separately, the composed structure is unstable and exhibits flutter-like exponentially-growing oscillations. This special form of instability, previously known only from a mathematical point of view, has been analysed in depth from an engineering perspective, thus finding a mechanical interpretation based on the concept of non-conservative follower load. Moreover, the goal of this work is also the definition of some stability criteria that may help the design of these mechanical piecewise-smooth systems, since classical theorems cannot be used for the investigation of equilibrium configurations located at the discontinuity. In the literature, this unusual behaviour has been explained, from a mathematical perspective, through the existence of a discontinuous invariant cone in the phase space. For this reason, starting from the mechanical system described above, the existence of invariant cones in 2 d.o.f. mechanical systems is investigated through Poincaré maps. A complete theoretical analysis on piecewise-smooth dynamical systems is presented and special mathematical properties have been discovered, valid for generic 2~d.o.f. piecewise-smooth mechanical systems, which are useful for the characterisation of the stability of the equilibrium configurations. Numerical tools are implemented for the analysis of a 2~d.o.f. piecewise-smooth mechanical system, valid for piecewise-linear cases and extendible to the nonlinear ones. A numerical code has been developed, with the aim of predicting the stability of a piecewise-linear dynamical system a priori, varying the mechanical parameters. Moreover, “design maps” are produced for a given subset of the parameters space, so that a system with a desired stable or unstable behaviour can easily be designed. The aforementioned results can find applications in soft actuation or energy harvesting. In particular, in systems devoted to exploiting the flutter-like instability, the range of design parameters can be extended by using piecewise-smooth instead of smooth structures, since unstable flutter-like behaviour is possible also when each subsystem is actually stable. The second part of this Thesis deals with the numerical analysis of an elastic cloak for transient flexural waves in Kirchhoff-Love plates and the design of special metamaterials for this goal. In the literature, relevant applications of transformation elastodynamics have revealed that flexural waves in thin elastic plates can be diverted and channelled, with the aim of shielding a given region of the ambient space. However, the theoretical transformations which define the elastic properties of this “invisibility cloak” lead to the presence of a strong compressive prestress, which may be unfeasible for real applications. Moreover, this theoretical cloak must present, at the same time, high bending stiffness and a null twisting rigidity. In this Thesis, an orthotropic meta-structural plate is proposed as an approximated elastic cloak and the presence of the prestress has been neglected in order to be closer to a realistic design. With the aim of estimating the performance of this approximated cloak, a Finite Element code is implemented, based on a sub-parametric technique. The tool allows the investigation of the sensitivity of specific stiffness parameters that may be difficult to match in a real cloak design. Moreover, the Finite Element code is extended to investigate a meta-plate interacting with a Winkler foundation, to analyse how the substrate modulus transforms in the cloak region. This second topic of the Thesis may find applications in the realization of approximated invisibility cloaks, which can be employed to reduce the destructive effects of earthquakes on civil structures or to shield mechanical components from unwanted vibrations.