An experimental study of Carbon Nanotube (CNT) growth has been performed by using radio frequency plasma enhanced chemical vapour deposition with methane (CH4) as the hydrocarbon source. The experimental results have been compared towards earlier experiments and theories that exist. A study of the effect by changing parameters during thermal- and plasma- pretreatment has been conducted which have led to successful yield of vertically aligned CNTs forests. Different growth conditions have been conducted in order to see the influence of the following: Methane (CH4) flow, plasma power, growth time, temperature, methane (CH4)/ammonia (NH3) mixtures during growth, no barrier layer, thermal- versus plasma-pretreatment and oxidizing pretreatment. The conclusion from this experiment is that oxidizing pretreatment seems yields the tallest vertically aligned CNTs with the narrowest diameter.