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Non-contact surface profilometry techniques, especially the phase-measuring profilometry, have been evolved dramatically over recent years. Besides the simple triangulation configuration with a fringe pattern projection system and digital imaging system, efficient computational surface profilometry techniques have also drawn tremendous attention from both academia and a wide range of applications. In the semiconductor industry, high-precision and high-speed, automated optical inspection systems are urgently needed to ensure high quality of semiconductor devices and yield improvement on the production and assembly line. However, by assuming the measured object to be stationary, conventional approaches are not suitable for surface profilometry of moving objects. Moreover, different sources of error such as the low contrast fringe patterns on the measured object, the unevenness in the illumination and the perspective projection effect from the optics will decrease the performance of surface profilometry. To meet these challenges, we have built fringe pattern projection prototypes with projector and camera arrays for surface profilometry of moving objects along the conveyor belt. This design helps to enlarge the field of view with parallel processing. In addition, we have presented an optimization framework to investigate the sources of the error for surface profilometry and generalize various computational surface profilometry approaches under different scenarios. Under this framework, first, we investigate two important factors determining the precision of surface profilometry, namely, the condition number of the phaseshift matrix and the fringe contrast within the images of the projected fringe patterns. Then, a regularized phase-shift algorithm has been proposed to improve the reconstruction results at the low contrast regions such as on the substrate of the semiconductor devices. Second, we study the intensity fluctuation caused by the uneven illumination for surface profilometry of moving objects. After that, an illumination-reflectivity-focus model has been suggested to describe the unevenness and an illumination-invariant phase-shift algorithm has been developed to handle this uneven illumination effect. Third, the perspective projection effect from the optics also affects the accurate phase-shift estimation for a moving object. Therefore, we propose a general polynomial phase-measuring profilometry model to establish the relationship between the phase-shift and height variation for each measured point. Accordingly, a polynomial phase-shift algorithm with error compensation technique has been put forward to improve the performance of the surface profilometry for moving objects. Both simulation and real experiments from the prototype have been conducted to verify the improvement on the performance of the proposed methodologies. Furthermore, these research results have demonstrated the effectiveness and efficiency of the presented optimization framework for investigating the sources of error for surface profilometry. Moreover, the proposed computational surface profilometry techniques and the corresponding fringe pattern projection systems have been used in automated optical inspection systems for yield improvement on the production line in the semiconductor industry. / published_or_final_version / Electrical and Electronic Engineering / Doctoral / Doctor of Philosophy

Since its inception in 1970, optical manipulation has evolved into a versatile tool across many fields of science. Notably, the now widely employed optical tweezers invented in 1986 is a good example, which is in essence a strongly focused fundamental Gaussian beam. Although the optical tweezers remained as an important tool in optical manipulation, the shaped structured light such as an optical vortex beam also provides unusual light patterns and promotes exciting discoveries. This thesis is devoted to some unsolved theoretical aspects of optical manipulation. Since optical force acting on a micro-particle is typically on the order of pN and seldom larger than nN, it is a common belief that optical force is relevant in particle manipulation only when all other forces are comparable or smaller than the optical force. In chapter 2, surprisingly we showed that this is not always the case. Here, we find that under appropriate condition, optical vortices can make a sphere orbit around the beam center owing to the non-conservative optical force. If the sphere is attached to a mechanical spring, the spring can be stretched significantly even when the mechanical spring is orders of magnitude stronger than the optical force. Since its inception in 1970, optical manipulation has evolved into a versatile tool across many fields of science. Notably, the now widely employed optical tweezers invented in 1986 is a good example, which is in essence a strongly focused fundamental Gaussian beam. Although the optical tweezers remained as an important tool in optical manipulation, the shaped structured light such as an optical vortex beam also provides unusual light patterns and promotes exciting discoveries. This thesis is devoted to some unsolved theoretical aspects of optical manipulation. Since optical force acting on a micro-particle is typically on the order of pN and seldom larger than nN, it is a common belief that optical force is relevant in particle manipulation only when all other forces are comparable or smaller than the optical force. In chapter 2, surprisingly we showed that this is not always the case. Here, we find that under appropriate condition, optical vortices can make a sphere orbit around the beam center owing to the non-conservative optical force. If the sphere is attached to a mechanical spring, the spring can be stretched significantly even when the mechanical spring is orders of magnitude stronger than the optical force

Photonic crystals (PhCs) are periodically structured electromagnetic media, generally characterised by not permitting light of defined ranges of frequency to propagate through the structure. These disallowed ranges of frequency are known as photonic band gaps. The intentional introduction of defects into the crystal gives rise to localized electromagnetic states that provide a mechanism for the control of the propagation of photons through PhCs. In the case of one dimensional (1-D) PhCs, the introduction of a single defect into a finite PhC results in the formation of a resonant cavity structure, a so-called microcavity. The ease of fabrication and scope for integration make 1-D PhCs good candidates for the future applications of PhCs in light transmission systems and, as such, these structures are the focus of the research reported here. The aim of this thesis is to report a practical study of passive 1-D PhC devices and thereby extend the base of measurements that support and extend the results of theory and simulation. Various types of 1-D PhC structures have been fabricated using electron beam lithography and inductively coupled plasma technologies in a clean-room environment. The fabricated structures in effect demonstrate a first or primitive level of integration of 1-D PhCs with another optical device, namely a ridge waveguide. Measurements were performed by butt-coupling from a single mode fibre taper of the transmission characteristics of the resulting integrated waveguides, whilst a Side-band measurement method for very high resolution (0.2pm) microcavity characterisation was invented during the measurement process. A multiple wavelength transmission optical filter transmitting at the telecommunication wavelengths of 1310nm and 1550nm, and which could be used in a WDM system was demonstrated. The effect of introducing mode matching structures to minimize II the scattering loss and boost the quality factor value was investigated. Optimum positioning of the tapers produced a significant enhancement of Q. Finally, a narrow pass band filter constructed from coupled cavities was fabricated and characterised. A quasi-flat transmission peak with a pass band width of just 4nm was observed.

The motion of the free liquid surface inside a reservoir is called sloshing. Itis of large interest in different industrial fields such as satellite and spacecrafttrajectory control, automotive industry, nuclear engineering, buildingdesign, etc. The framework of propellant management on spacecraft is ofmain interest for this PhD thesis, even if its outcome can be applied to manyother fields concerned by sloshing.Being able to understand the behavior of the fluid in a reservoir subjectedto extreme environmental conditions means being able to predict its positionand topology inside the tank, for a given external and gravitationalacceleration and a determined thermodynamic condition. The predictionand control of this motion is far from being understood due to the differentparameters that play a role in the dynamic system such as the geometryof the container, the type of external excitation (shape, frequency contentand amplitude), the level of the liquid and finally the kind of liquid. In particular,the design of propulsion systems are affected by this phenomenon,still hampered by the unavailability of validated CFD models. Moreover theexisting experimental studies are mainly based on intrusive and local singlepoint measurement techniques, which give no information on the behaviorof the 3D liquid interface and on the velocity field inside the liquid phase.The main goal of this project has been to extend the experimental approachof liquid sloshing investigation in space propulsion, studying, developing andimproving non-intrusive measurement techniques for free surface behaviorand velocity characterization in the liquid phase. In particular, the free surfacebehavior have been studied by means of Laser Detection and Recordingtechnique (LeDaR), retrieving the profile of the interface over a line, andReference Image Topography technique (RIT), capturing the instantaneous3D interface shape. In addition, Particle Image Velocimetry (PIV) have beenused to measure the 2D velocity field in the main section of the reservoir.Tests performed with water were used as simpler test case to perform thetechniques while liquid nitrogen has been used as replacement uid havingphysical properties similar to real space propellants.The experimental problems of the selected measurement techniques relatedto the particular application have been addressed and a solution has beenproposed. Especially, the selection of tracers which could comply with theuse of a cryogenic fluid while for RIT the possibility to deal with circulardomains and to measure the absolute value of the liquid level. Finally, PIV in wavy ows needed to deal with dynamic curved interfaces for whicha widely-accepted processing algorithm was not available in literature andbesides, the choice of the particles and their seeding procedure in cryogenicsfluids had to be solved.Some applications are shown, which present the potentiality of the techniquesfor a new insight on sloshing flows with the future purpose of providingan accurate database for the verification and validation of numericalsimulations and a better understanding of the phenomena. / Doctorat en Sciences de l'ingénieur et technologie / info:eu-repo/semantics/nonPublished

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The thesis describes the design of a fringe projection system to study the dynamics of condensation with potential application in a reduced gravity environment. The concept is that an optical system for imaging the condensation layer enables extraction of valuable data from the image because of the ability of the optical system to image the perturbations in the condensation films. By acquiring a sequence of images of the deformed fringe pattern, the change in the surface topology can be observed over time, giving greater understanding of condensation dynamics in reduced gravity.

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