The synthesis of o-(N,N-dimethylamino)methylphenyl tris (trimethylsilyl) silane (II), a photochemical precursor of o- (N,N-dimethylamino) methylphenyl (trimethylsilyl) sila ammonium ylide (intramolecular silylene complex) and otolyl(trimethylsilyl)silylene is reported. Photolysis of II at room temperature in a cyclohexane solution of triethyl silane produced the silylene ylide and the presumably uncomplexed isomer, a silylene, which is trapped to afford the 2-(o-(N,N-dimethylamino)methylphenyl) -1,1,1-triethyl 3,3,3-trimethyltrisilane, 33% yield. A second decomposition pathway, a photodeamination, produced o-tris(trimethyl silyl) silyltoluene. UV spectra of the silaammonium ylide formed in the photochemical reaction of II was observed at 77k in hard or soft matrices.