1 x N optical power splitters using hybrid sol-gel glasses based on buried waveguide structure on silicon substrate were fabricated. The advantage over conventional ridge structures is the fact that Y branch of the splitters can be easily obtained with the buried structure using standard photo lithography processes. Now we can successfully make the width of Y branch of less of 1um. Proximity printing was used to define the waveguide trench on sol-gel films. Then burying the sol-gel glass into the trench to define waveguide core. Finally the waveguide was packaged for measurement after coating a sol-gel top cladding layer onto the guiding layer. The propagation losses of this waveguide device are 0.69 dB/cm and 0.70 dB/cm for TE and TM polarized lights. The coupling losses are 1.57 dB and 1.89 dB for TE and TM lights with a index contrast of 0.66 %. The insertion loss and the branching loss of the 1¡Ñ2 splitter are 5.7 dB and 0.3 dB¡Arespectively.