The submicron-aperture fiber point-diffraction interferometer (SFPDI) can be applied to realize the measurement of three-dimensional absolute displacement within large range, in which the performance of point-diffraction wavefront and numerical iterative algorithm for displacement reconstruction determines the achievable measurement accuracy, reliability and efficiency of the system. A method based on fast searching particle swarm optimization (FS-PSO) algorithm is proposed to realize the rapid measurement of three-dimensional absolute displacement. Based on the SFPDI with two submicron-aperture fiber pairs, FS-PSO method and the corresponding model of the SFPDI, the measurement accuracy, reliability and efficiency of the SFPDI system are significantly improved, making it more feasible for practical application. The effect of point-diffraction wavefront error on the measurement is analyzed. The error of point-diffraction wavefront obtained in the experiment is in the order of 1x10(-4). (the wavelength. is 532 nm), and the corresponding displacement measurement error is smaller than 0.03 mu m. Both the numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed SFPDI system, high measurement accuracy in the order of 0.1 mu m, convergence rate (similar to 90.0%) and efficiency have been realized with the proposed method, providing a feasible way to measure three-dimensional absolute displacement in the case of no guide rail.

京都大学 / 新制・課程博士 / 博士(理学) / 甲第24416号 / 理博第4915号 / 新制||理||1702(附属図書館) / 京都大学大学院理学研究科物理学・宇宙物理学専攻 / (主査)准教授 栗田 光樹夫, 准教授 岩室 史英, 教授 太田 耕司 / 学位規則第4条第1項該当 / Doctor of Science / Kyoto University / DFAM

The aim of this Master’s Degree thesis project is to design and develop point diffraction interferometer plates. In this project the PDI plates are re-designed, changing the design which was used in previous projects in Halmstad University. The transparency of PDI plates can be controlled by coating them with NiCr film. Firstly, four plates with coating of different thickness of NiCr were developed. The relationship between transmittance and the thickness of NiCr was established by testing these plates for transmittance and reflectance with the help of a laser and an optical power meter. The absorption coefficient of clear substrates and reflection of light is also taken into account to achieve the correct results. The parameters like the diameter of semi-transparent area around the pinholes and the size of pinholes is chosen after fully understanding its application. The lay-out and description of design is also included in the report.