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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

The Fabrication and Measurement of Self-assembled InGaAs Quantum Dot Modulators

Kuo, Chao-yi 30 July 2009 (has links)
The purpose of this thesis is to fabricate the quantum dot waveguide and measure electro-optic (EO) modulation characteristics. We focus on the refractive index change (£Gn), phase retardation, and electro-optic coefficients for quantum dot samples. The £fg=1.3£gm InGaAs quantum dot structures were grown on n+ GaAs substrates by MBE. We design a series of 2.2£gm straight and slope 7¢X single mode waveguide, and use the cleavage surface method to produce Fabry-Perot cavity. In fabrication process, we first defined the device pattern by using photo-lithography technique. Second, we etched ridge waveguide by using dry etching or multi-step wet etching method. Finally, we used the etching solution HBr:HCl:H2O2:H2O=5:4:1:70 to smooth the sidewall and reduce the scattering loss. We analyzed the quantum dot EO properties by measuring phase retardation of Fabry-Perot resonance at different bias. From measuring the Fabry-Perot resonance at£f=1515nm TE-polarization, the linear electro-optic (LEO) and quadratic electro-optic (QEO) coefficients of C311 sample are 7.26¡Ñ10-12m/v and 1.14¡Ñ10-18m2/v2 , respectively. And the LEO and QEO coefficients of C251 sample are 2.99¡Ñ10-11m/v and 4.10¡Ñ10-17m2/v2, respectively. By coupling £f=1515nm TM-polarized light, we found the main influence of C251 sample is Kerr effect, and the QEO coefficient is 3.52¡Ñ10-17m2/v2. Both electro-optic coefficients are significantly larger than those measured in quantum wells and bulk GaAs. These results are applicable to QD-based low drive voltage and small size modulators.

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