Continued demands for better control of the operating conditions of structures and processes have led to the need for better means of measuring temperature (T), pressure (P), and relative humidity (RH). One way to satisfy this need is to use MEMS technology to develop a sensor that will contain, in a single package, capabilities to simultaneously measure T, P, and RH of its environment. Because of the advantages of MEMS technology, which include small size, low power, very high precision, and low cost, it was selected for use in this thesis. Although MEMS sensors that individually measure T, P, and RH exist, there are no sensors that combine all three measurements in a single package. In this thesis, a piezoresistive pressure sensor and capacitive humidity sensor were developed to operate in the range, of 0 to 2 atm and 0% to 100%, respectively. Finally, a polysilicon resistor temperature sensor, which can work in the range of -50ºC to 150ºC, was analyzed. Multimeasurement capability will make this sensor particularly applicable for point-wise mapping of environmental conditions for advanced process control. In this thesis, the development of sensors for such an integrated device is outlined. Selected results, based on the use of analytical, computational, and experimental solutions (ACES) methodology, particularly suited for the development of MEMS sensors, are presented for the pressure, relative humidity, and temperature sensors.

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The diploma thesis deals with the experimental study of shielding effect of oxide isolating layer on surface potential measured by Kelvin Probe Force Microscopy. For the study of surface potential were created Au/SiO2 based nanostructures by Electron Beam Lithography, Atomic Layer Deposition and Multilayer Deposition. Surface potential was measured depending on the relative humidity and thickness of oxide isolating layer.

Forensic entomological field and laboratory studies were conducted to obtain data currently missing or conflicting in the literature. The first goal of this project was to identify and qualitatively assess the major taxa of forensic importance in southwest Virginia. Carcasses of the domestic pig, Sus scrofa L., were placed in field conditions and allowed to decompose until they reached the advanced stage of decay. Over 50 taxa were collected and identified, with Phormia regina, Phaenicia coeruleiviridis, Phaenicia sericata, Calliphora spp., Sarcophaga utilis, Musca domestica, Hydrotaea leucostoma, Stearibia nigriceps, Prochyliza xanthostoma, and Meroplius minutus among the most commonly observed fly species, and Creophilis maxillosus, Platydracus maculosus, Aleochara lata, Oiceoptoma noveboracense, Necrodes surinamensis, and Necrophila americana among the most commonly observed beetle species. The second objective of this study was to analyze successional patterns of taxa collected and identified in the carrion-insect succession studies. Occurrence matrices were constructed for the successional patterns of insect taxa during 21 sampling intervals in the spring and eight intervals in the summer studies. Permutation analyses of the occurrence matrices showed that the successional patterns of insect taxa were similar between spring 2001 and 2002 (P = 0.001) and between summer 2001 and 2002 (P = 0.007). Results indicated that the successional patterns appear to be typical for the seasonal periods. The third objective of this study was to analyze the effects of antemortem ingestion of ethanol by pigs on insect successional patterns and development rates. Pigs were dosed with a mixture of 95% ethanol and saline. Blood samples were collected immediately prior to euthanasia. The carcasses then were placed at an open field site and allowed to decompose. Insect samples were collected from carcasses for ten days post-mortem and the collected data were used to develop occurrence matrices. Permutation analysis to test the null hypothesis of no similarity between successional patterns of taxa from treated and untreated pigs showed that the successional patterns were similar. Loin meat from the carcasses was used as a rearing medium for field development studies of the black blow fly, Phormia regina. Development rates of 3rd instar P. regina maggots feeding on meat from treated pigs were significantly different from development rates of maggots feeding on meat from untreated pigs. No significant differences were detected in 1st and 2nd instars. Finally, the effect of relative humidity (RH) on egg hatch time and percent hatch rate of Phormia regina and Phaenicia coeruleiviridis was tested using saturated salt solutions. The global ANOVA of mean hatch times and percent hatch was found to be significant for P. regina at 20°C and 30°C and P. coerulieviridis at 20°C among RH levels at á = 0.05. T-test (LSD comparisons) results detected significant differences between some but not all RH levels within all three data series tested. Percent hatch observed varied widely, depending on the RH level. Of the levels tested, the lowest RH where hatch rate was observed was 53% (20°C) for P. coeruleiviridis, where only 1% of the eggs hatched. At 90+% RH, almost all of the eggs hatched for both species. / Ph. D.

People for long term exposed to an air-conditioned but highly humid environment are vulnerable to hyper-sensitivity or asthma triggered by fungi or dust mites. This thesis aims to develop a high-linearity and low-hysteresis capacitive relative humidity (RH) microsensor to more precisely accommodate the humidity of living spaces. To reduce the hysteresis and enhance the linearity, this research uses not only one polyimide (PI) thin film as a humidity sensing layer but also utilizes another PI thin film as a protecting layer of the top electrodes. To improve further the RH sensitivity and responding speed, interlacing out-of-plane electrodes are designed in the RH microsensor. The main processing steps of the RH sensor developed in this study involve at least five photolithographic and four thin film deposition processes. The influences of sensing area, number of electrode pairs and testing temperature on the sensitivity and sensing linearity of humidity microsensors were investigated. Based on the measurement results, the sensitivity apparently increase as well as the sensing area (2 mm ¡Ñ 2 mm: 0.12 pF/%RH, 3 mm ¡Ñ 3 mm: 0.48 pF/%RH, 5 mm ¡Ñ 5 mm: 1.09 pF/%RH), and decrease with the number of electrode pairs (40 pairs: 0.51 pF/%RH, 20 pairs: 0.4 pF/%RH) and increase with the testing temperature. The thesis has demonstrated that the capacitance of the RH sensor vary from the relative humidity with a very linear relationship (linearity: 98.8%~99.99%) over the range of 30~70%RH. Finally, to increase effectively the surface area and to reduce further the hysteresis, three-dimensional (3D) moisture entrances and exits were designed and a very low hysteresis value (0.5%RH) can be achieved.

Healthcare providers encounter a wide range of hazards on the job, including exposure to infectious diseases. Protecting them from occupational infectious disease is very important. Healthcare workers use personal protective equipment (PPE) as a measure to decrease the risk of getting infected during patient care. For high-risk diseases like Ebola, Tyvek suits are coverall suits that protect the body and reduce the risk of body fluid exposure. However, a person removing a contaminated suit may also be exposed to virus. Previous studies have shown that enveloped viruses can survive on different types of surfaces, so the objective of this study is to determine the inactivation of bacteriophage Φ6, a surrogate for enveloped human virus, on the surface of Tyvek suits at two different relative humidity levels, 40% and 60% at 22°C. The results showed the inactivation rate of virus was higher at 60% RH than 40% RH. There was ~3log10 (99.9%) reduction of virus inactivation after 6 hours at 40% but ~3log10 (99.9%) inactivation took 9 hours at 60%. This suggests that enveloped viruses can survive on the surface of Tyvek suits for more than 6 hours, and should be considered a potential risk for contamination when they are taken off after use.

Electrospinning produces submicron fibers from a wide range of polymer/solvent systems that enable a variety of different applications. In electrospinning process, a straight polymer/solvent charged jet is initially formed, followed by a circular moving jet in the shape of a cone, called the bending region. The process physics in the bending region are difficult to study since the jet diameter cannot be measured directly due to its rapid motion and small size (~microns and smaller), and due to complex coupling of multiple forces, mass transport, and changing jet geometry. Since the solutions studied are hydrophilic, they readily absorb ambient moisture. This thesis explores the role of the bending region in determining the resulting electrospun fiber diameter through a combined experimental and modeling analysis for a variety of hydrophilic polymer/solvent solutions. Electrospinning experiments were conducted over a broad range of operating conditions for 4 different polymer/solvent systems. Comparison of the final straight jet diameters to fiber diameters reveals that between 30% to 60% jet thinning occurs in the bending region. These experiments also reveal that relative humidity significantly affects the electrospinning process and final fiber diameter, even for non-aqueous solutions. A model is developed to obtain insight into the bending region process physics. Important ones include understanding the mass transport for non-aqueous hydrophilic jets (including solvent evaporation and water absorption on the jet surface, radial diffusion, and axial advection), and the coupling between the mass and force balances that determines the final fiber diameter. The absorption and evaporation physics is validated by evaporation experiments. The developed model predicts fiber diameter to within of 8%, even though the solution properties and operating conditions that determines net stretching forces and net evaporation rates vary over a large range. Model analysis reveals how the net evaporation rate affects the jet length and net stretching force, both of which ultimately determine the fiber diameter. It is also shown that the primary impact of RH on the process is through occupation of the surface states that limits solvent evaporation rate, rather than the amount of water absorbed. Correlation functions between process conditions, solution properties and the resulting fiber diameters are discussed.

Indoor Air Quality is an increasing concern in the world today. The mere presence of people in a building or residence can significantly alter indoor air quality. Relative humidity over the range of normal indoor temperatures (66 - 80 degrees Farenheit) has been linked both directly and indirectly to various health and structural problems. The purpose of this project was to discover whether residential dwellings might benefit from an indoor humidification system. The project consisted of the deployment of three separate sensor networks consisting of 12 tmote sky modules manufactured by the Moteiv corporation, each equipped with a temperature and humidity sensor manufactured by Sensirion. Each tmote sky module continuously transmitted the raw data readings to a base station to be processed. The lifetime of each network was approximately four days of continuous data transmission. The results verified the hypothesis that relative humidity levels have a significant affect on the indoor environment and can be linked to the health and structural problems reported by the occupants of each monitored residence. Based on the project findings residential dwellings would benefit from an indoor humidification system, given the symptoms associated with relative humidity level problems exist.

The isotopic labelling of carbon in tree-rings varies as a function of growth season temperature and relative humidity. The isotopic labelling of oxygen in tree-rings varies as a function of source-water isotopic composition and humidity-dependent evaporative enrichment of leaf water during the growth season. The season of carbon-isotope labelling was identified statistically as late-spring to early-fall (April to October) for temperatures and relative humidity with a three-year weighted (50-30-20) carry-over due mainly to stored photosynthates. The season of oxygen-isotope labelling was identified statistically as a combination of a winter (pDecember to March) source-water signal (temperature-dependent precipitation isotope composition) with a late-spring to early-fall (April to October) humidity signal (evaporative enrichment of leaf water). A two-year carry-over was attributed to the residence time of soil water, but no notable photosynthate carry-over was identified. Carbon- and oxygen- (mechanistic) isotope response surface models were then compared and contrasted to regression-based bivariate and univariate models. It was found that in most cases the isotope response surface models were the best means of predicting isotopic labelling when environmental data are known. The carbon-isotope response surface was used to reconstruct 50-years (AD 1900-1954) of relative humidity data by introducing measured carbon isotope values and instrumental growth season temperature. During the analysis of the oxygen-isotope response surface we found an isotope-temperature relation that appears to reflect circulation-dependent damping. To verify this we introduced scaled values of the North Pacific index as a proxy for this suppression. The coupling of the isotope response surfaces generated a humidity reconstruction that is also thought to be driven by atmospheric circulation. Our reconstruction shows that the fluctuations in temperature range have not exceeded the natural variability in the instrumental record of the 20th century; however, the atmospheric moisture (humidity) reconstruction predicts a directional drying trend in the Peace-Athabasca Delta that appears to reflect increasingly zonal circulation in western Canada over this period.