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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Elektronenspektroskopie und Faktoranalyse zur Untersuchung von ionenbeschossenen Metall (Re, Ir, Cr, Fe)-Silizium-Schichten

Reiche, Rainer 29 January 2000 (has links) (PDF)
No description available.
Augerelektronenspektroskopie (AES)
Augerparameter
Chrom
Defektgenerierung
Eisen
Eisenimplantation
Ionenbeschuß
Konzentrationsprofile
Auger electron spectroscopy (AES)
Photoelectron spectroscopy (XPS)
QUASES
Re-Si band structure
defect generation
d
ddc:29
rvk:UP 9300
Elektronenspektroskopie
Faktorenanalyse
Ionenbestrahlung
Mehrschichtsystem
Metall
Silicium

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