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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Aufbau einer Interferenzlithografie-Anlage zur Herstellung photonischer Kristalle

Mellert, Karolin 12 1900 (has links)
Multiple laser beam interference allows to produce periodic light patterns in the order of the wavelength of light. A simulation program helps to identify different patterns and to investigate the influence of changing parameters such as e.g. the angle of incidence or the polarization. A positive photoresist (Shipley S1805) is used to create two-dimensional metallic photonic crystals by UV interference lithography.
photonic crystal
interference
lithography
Simulation
metal
gold
plasmon
S1805
Shipley
positive photoresist
QC

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