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This thesis deals with the fabrication of MEMS air quality sensors for automotive applications. The goal of this project is to design, fabricate and test an integrated sensor that measures three important air quality components inside the automotive cabin, which are temperature, relative humidity and carbon monoxide (CO) concentration. The sensors are fabricated on silicon substrate covered with thermal oxide and LPCVD nitride. Various deposition and etching techniques were utilized to fabricate these sensors including E-beam evaporation, thermal oxide growth, PECVD, LPCVD, RIE, KOH and HF etching. The temperature and humidity sensor use nickel as the sensitive material while the CO sensor was designed to use SnO2 although it was not fabricated to completion. A chamber was created where the temperature and humidity are controlled and the sensors were tested. Curves of sensor resistance vs. temperature and sensor resistance vs. humidity were created and the two sensor’s sensitivity was calculated.

This thesis deals with the fabrication of MEMS air quality sensors for automotive applications. The goal of this project is to design, fabricate and test an integrated sensor that measures three important air quality components inside the automotive cabin, which are temperature, relative humidity and carbon monoxide (CO) concentration. The sensors are fabricated on silicon substrate covered with thermal oxide and LPCVD nitride. Various deposition and etching techniques were utilized to fabricate these sensors including E-beam evaporation, thermal oxide growth, PECVD, LPCVD, RIE, KOH and HF etching. The temperature and humidity sensor use nickel as the sensitive material while the CO sensor was designed to use SnO2 although it was not fabricated to completion. A chamber was created where the temperature and humidity are controlled and the sensors were tested. Curves of sensor resistance vs. temperature and sensor resistance vs. humidity were created and the two sensor’s sensitivity was calculated.

Nucleic acid analysis is one of the most important disease diagnostic approaches in medical practice, and has been commonly used in cancer biomarker detection, bacterial speciation and many other fields in laboratory. Currently, the application of powerful research methods for genetic analysis, including the polymerase chain reaction (PCR), DNA sequencing, and gene expression profiling using fluorescence microarrays, are not widely used in hospitals and extended-care units due to high-cost, long detection times, and extensive sample preparation. Bioassays, especially chip-based electrochemical sensors, may be suitable for the next generation of rapid, sensitive, and multiplexed detection tools. Herein, we report three different microelectrode platforms with capabilities enabled by nano- and microtechnology: nanoelectrode ensembles (NEEs), nanostructured microelectrodes (NMEs), and hierarchical nanostructured microelectrodes (HNMEs), all of which are able to directly detect unpurified RNA in clinical samples without enzymatic amplification. Biomarkers that are cancer and infectious disease relevant to clinical medicine were chosen to be the targets. Markers were successfully detected with clinically-relevant sensitivity. Using peptide nucleic acids (PNAs) as probes and an electrocatalytic reporter system, NEEs were able to detect prostate cancer-related gene fusions in tumor tissue samples with 100 ng of RNA. The development of NMEs improved the sensitivity of the assay further to 10 aM of DNA target, and multiplexed detection of RNA sequences of different prostate cancer-related gene fusion types was achieved on the chip-based NMEs platform. An HNMEs chip integrated with a bacterial lysis device was able to detect as few as 25 cfu bacteria in 30 minutes and monitor the detection in real time. Bacterial detection could also be performed in neat urine samples. The development of these versatile clinical diagnostic tools could be extended to the detection of various cancers, genetic, and infectious diseases.

The ability to walk and negotiate stairs is an important predictor of independent ambulation. The superposition of mobility impairments to the effects of natural aging in persons with stroke render the completion of many daily activities unsafe, thus limiting individuals’ independence within their communities. Currently however, no means exist for the monitoring of mobility levels during daily living in survivors after the completion of rehabilitation programs. The application of inertial sensors for stroke survivors could provide a basis for the study of gait outside of traditional laboratory settings. The main objective of this thesis was to evaluate the performance of inertial sensors in measuring gait of hemiparetic stroke survivors through the completion of three studies. The first study explored the use of inertial measurement units (IMUs) for the measurement of lower limb joint kinematics during stair ascent and descent in both stroke survivors and healthy older adults. Results suggested that IMUs were suitable for the measurement of lower limb range of motion in both healthy and post-stroke subjects during stair ambulation. The second study evaluated the measurement of step length and spatial symmetry during overground walking using IMUs. A systematic error resulting in the underestimation of step lengths calculated using IMUs compared with those measured using video analysis was found, however results suggested that IMUs were suitable for the assessment of spatial symmetry between affected and less-affected limbs in stroke survivors. The final study evaluated the automatic classification of gait activities using inertial sensor data. Findings revealed that the use of a classifier composed of frequency-features extracted from IMU accelerometer and gyroscope data from both the affected and less-affected limbs most accurately identified gait activities from post stroke gait data. This thesis provides a first attempt at applying IMUs to the study of gait post-stroke. Future work may extend the findings of these studies to provide a better understanding to rehabilitation professionals of the demands of everyday life for stroke survivors. / Thesis (Master, Mechanical and Materials Engineering) -- Queen's University, 2013-08-29 12:42:05.505

Liveness detection in automatic fingerprint identification systems (AFIS) is an issue which still prevents its use in many unsupervised security applications. In the last decade, various hardware and software solutions for the detection of liveness from fingerprints have been proposed by academic research groups. However, the proposed methods have not yet been practically implemented with existing AFIS. A large amount of research is needed before commercial AFIS can be implemented. In this research, novel active pore based liveness detection methods were proposed for AFIS. These novel methods are based on the detection of active pores on fingertip ridges, and the measurement of ionic activity in the sweat fluid that appears at the openings of active pores. The literature is critically reviewed in terms of liveness detection issues. Existing fingerprint technology, and hardware and software solutions proposed for liveness detection are also examined. A comparative study has been completed on the commercially and specifically collected fingerprint databases, and it was concluded that images in these datasets do not contained any visible evidence of liveness. They were used to test various algorithms developed for liveness detection; however, to implement proper liveness detection in fingerprint systems a new database with fine details of fingertips is needed. Therefore a new high resolution Brunel Fingerprint Biometric Database (B-FBDB) was captured and collected for this novel liveness detection research. The first proposed novel liveness detection method is a High Pass Correlation Filtering Algorithm (HCFA). This image processing algorithm has been developed in Matlab and tested on B-FBDB dataset images. The results of the HCFA algorithm have proved the idea behind the research, as they successfully demonstrated the clear possibility of liveness detection by active pore detection from high resolution images. The second novel liveness detection method is based on the experimental evidence. This method explains liveness detection by measuring the ionic activities above the sample of ionic sweat fluid. A Micro Needle Electrode (MNE) based setup was used in this experiment to measure the ionic activities. In results, 5.9 pC to 6.5 pC charges were detected with ten NME positions (50μm to 360 μm) above the surface of ionic sweat fluid. These measurements are also a proof of liveness from active fingertip pores, and this technique can be used in the future to implement liveness detection solutions. The interaction of NME and ionic fluid was modelled in COMSOL multiphysics, and the effect of electric field variations on NME was recorded at 5μm -360μm positions above the ionic fluid.

This thesis discusses diverse electrochemical strategies for the determination of the concentration of the gases hydrogen sulfide, ammonia and halothane. The chemical tagging of sulfide by a variety of structurally diverse substituted benzoquinone species was studied over a wide range of pH (2<pH<10). Each derivative was found to respond to increasing concentration of sulfide (typically over a range 10-200 μM). The electrochemically initiated reaction of N,N-diethyl-pphenylenediamine (DEPD) with sulfide in N,N-dimethylformamide (DMF) was next examined with quantitative detection of sulfide (linear range= 28-3290 μM, LoD= 22 μM) achieved by analysis of the increase in the second oxidation wave. This is consistent with the sulfide attacking the doubly oxidised species in a 1,4-Michael addition. The direct oxidation of sulfide at a nickel hydroxide film on a nickel electrode in alkaline solution has provided the basis for the design of a simple and inexpensive sensor for monitoring H₂S in the range 20-200 μM. More sensitive (LoD= 1 (μM) amperometric detection of sulfide was obtained at modified nickel electrodes in acidic media in which sulfide was stripped from the nickel oxide layer. This approach was exploited further by using nickel modified screen printed carbon (Ni-SPC) electrodes as economical and disposable sensors for sulfide. Next, two different strategies for determining gaseous ammonia in the ionic liquid 1-ethyl-3-methylimidazolium bis(trifluromethylsulfonyl)imide, [EMIM][N(Tf)₂], and in DMF are described. The first approach exploits the effect of ammonia as a proton acceptor species on the anodic oxidation of hydroquinone, resulting in a linear detection range from 10 to 95 ppm ammonia (LoD= 4.2 ppm). The second approach is based on the direct oxidation of ammonia in either DMF or [EMIM][N(Tf)₂]. The possibility of photochemically induced electrocatalytic processes within microdroplets containing p-chloranil (2,3,5,6-tetrachloro-1,4-benzoquinone, TCBQ) was examined as a means of detecting the anaesthetic gas halothane.</p> Finally, two of the more promising routes for sulfide detection were studied at elevated temperatures (up to 70 °C) with a view to developing H₂S sensors capable of meeting the demands of oilfield applications.