NDLTD Global ETD Search
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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Numerical heat transfer during partially-confined, confined, and free liquid jet impingement with rotation and chemical mechanical planarization process modeling

Lallave-Cortes, Jorge C 01 June 2009 (has links)
No description available.
Steady state
Transient analysis
Slurry abrasive particles
CMP temperature distributions
American Studies
Arts and Humanities

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