Simulation techniques are developed for high NA polarized microscopy with Babinet's principle, partial coherence and vector diffraction for non-periodic geometries. A mathematical model for the Babinet approach is developed and interpreted. Simulation results of the Babinet's principle approach are compared with those of Rigorous Coupled Wave Theory (RCWT) for periodic structures to investigate the accuracy of this approach and its limitations.A microscope system using a special solid immersion lens (SIL) is introduced to image Blu-Ray (BD) optical disc samples without removing the protective cover layer.Aberration caused by the cover layer is minimized with a truncated SIL. Sub-surface imaging simulation is achieved by RCWT, partial coherence, vector diffraction and Babinet's Principle. Simulated results are compared with experimental images and atomic force microscopy (AFM) measurement.A technique for obtaining native and induced using a significant amount of evanescent energy is described for a solid immersion lens (SIL) microscope.Characteristics of native and induced polarization images for different object structures and materials are studied in detail. Experiments are conducted with a NA = 1.48 at wavelength550nm microscope. Near-field images are simulated and analyzed with an RCWT approach. Contrast curve versus object spatial frequency calculations are compared with experimental measurements. Dependencies of contrast versus source polarization angles and air gap for native and induced polarization image profiles are evaluated. By using the relationship between induced polarization and topographical structure, an induced polarization image of an alternating phase shift mask (PSM) is converted into a topographical image, which shows very good agreement with AFM measurement. Images of other material structures include a dielectric grating, chrome-on-glass grating, silicon CPU structure, BD-R and BD-ROM.

This dissertation investigates challenges associated with optics in the 10-500 wavelength size regime. For the visible spectrum, this size range (5-250um) is classified as micro-optics, but is set apart from other size ranges by a noticeable lack of suitable simulation and metrology tools. Optics of this size are gaining popularity in applications such as solid immersion lenses (SIL) and laser beam shaping, but require more research into simulation, testing, fabrication, and assembly in order to be easily integrated into commercial applications.A survey of previous work on SILs and micro-optics simulation/testing is given, including past work with gallium phosphide (GaP) microlenses. A new SIL aberration treatment is described using spherical-parent 3rd order aberrations. Agreement is shown with previous work, and the lack of hemisphere approximations gives a broader understanding of aberrations for varying SIL thicknesses. Results show that aberration reduces with lens radius, but thickness tolerances become tighter as dimensions shrink. A study of GaP intrinsic birefringence and the theoretical impact on the induced polarization signal is also given.A survey of beam propagation simulators is given and a sequential piece-wise diffraction (SPWD) simulator is developed for arbitrary optical systems that overcomes the difficulties of simulation in the 10-500 wavelength size regime. A discussion of a future extension to the work to determine reflected and transmitted field amplitudes with a non-sequential method is presented with specific discussion on the challenges of electric field surface transfer.The design and operation of a micro-interferometer is discussed and testing results from the first sub-100um diameter GaP SILs are shown. A novel method for determining the shape profile of aspheric surfaces using information from annular fringes is presented. Theoretical beam shaping applications for micro GaP lenses is also discussed with results using the SPWD method. Experimental results are also shown for a 1x1x0.3mm beam shaper package that images a laser diode beam to an approximate size of 60um at a working distance of 4mm.Finally, designs and experimental results are shown for the integration of GaP micro-optics into conventional systems as SILs or beam-shaping elements including methods and equipment for lapping and polishing GaP.

Although gold nanoparticles (GNPs) are promising probes for biological imaging because of their attracting optical properties and bio-friendly nature, properties of the multi-photon (MP) emission from GNP aggregates produced by a short-wave infrared (SWIR) laser have not been examined. In this paper, characterization of MP emission from aggregated 50 nm GNPs excited by a femtosecond (fs) laser at 1560 nm is discussed with respect to aggregate structures. The key technique in this work is single particle spectroscopy. A pattern matching technique is applied to correlate MP emission and SEM images, which includes an optimization processes to maximize cross correlation coefficients between a binary microscope image and a binary SEM image with respect to xy displacement, image rotation angle, and image magnification. Once optimization is completed, emission spots are matched to the SEM image, which clarifies GNP ordering and emission properties of each aggregate. Correlation results showed that GNP aggregates have stronger MP emission than single GNPs. By combining the pattern matching technique with spectroscopy, MP emission spectrum is characterized for each GNP aggregate. A broad spectrum in the visible region and near infrared (NIR) region is obtained from GNP dimers, unlike previously reported surface plasmon enhanced emission spectrum.