Solid state thin film lithium microbatteries fabricated by pulsed-laser deposition (PLD) are suggested. During deposition the following process parameters must be considered, which are laser energy and fluence, laser pulse duration, laser pulse frequency, target composition, background gasses, substrate temperature, target-substrate distance and orientation. The effects of the variations of the process parameters can be obtained by measuring stoichiometry, thickness, phases and structure (grain size and texture), and stress of the deposited films. Electrochemical measurements will be conducted to test the microbattery properties through open-circuit voltage, charge-discharge cycling, cyclic voltammetry, and impedance analysis. / Singapore-MIT Alliance (SMA)