We operated focus ion beam instrument (FIB) to etch array of cylindrical holes, with the diameter smaller than the wavelength of visible, on the sliver film. The sample was probed with the tungsten light source and the transmission spectrum of visible-NIR range was recorded with traix550 spectrometer with a cooling CCD. The optical extraordinary properties, such as the light can be transmitted through the holes array with the diameter of the hole smaller than the wavelength of the incident light and the enhancement of the efficiency, of the transmission of the subwavelength holes array were discussed. In this study, the factors affected the transmission spectrum of the subwavelength hole array, e.g.: the arrangement of the holes array, the material of the thin film, the diameter of the hole¡Kand so on, were researched. Besides, we modulated the effective dielectric property of the cavity of the subwavelength holes with the thermal evaporation method. It was pointed out that effective dielectric property of the cavity also influenced the optical properties of extraordinary transmission spectrum. We believe that our research was helpful to understand the physical properties of the subwavelength holes array.