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Factors affecting the precision and accuracy of surface temperature measurement using light-pipe radiation thermometers (LPRTs)Puttitwong, Ekachai, January 1900 (has links) (PDF)
Thesis (Ph. D.)--University of Texas at Austin, 2006. / Vita. Includes bibliographical references.
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A new approach to measure the temperature in rapid thermal processing (RTP) /Yan, Jiang, January 1999 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 1999. / Vita. Includes bibliographical references (leaves 114-123). Available also in a digital version from Dissertation Abstracts.
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Entwicklung neuer physikalischer Optimierungs- und Regelungsverfahren für thermische Reaktoren in der HalbleiterprozessierungSchafbauer, Thomas. January 2001 (has links) (PDF)
München, Techn. Universiẗat, Diss., 2001.
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Temperature control and modeling of rapid thermal processingCho, Wonhui 28 August 2008 (has links)
Not available / text
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Distributed parameter control in rapid thermal processing (RTP) /Vayena, Olga. January 2004 (has links)
Thesis (Ph.D.)--Tufts University, 2004. / Adviser: Haris Doumanidis. Submitted to the Dept. of Mechanical Engineering. Includes bibliographical references (leaves 123-129). Access restricted to members of the Tufts University community. Also available via the World Wide Web;
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Temperature control and modeling of rapid thermal processingCho, Wonhui, Edgar, Thomas F., January 2005 (has links) (PDF)
Thesis (Ph. D.)--University of Texas at Austin, 2005. / Supervisor: Thomas F. Edgar. Vita. Includes bibliographical references.
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Nitridierung von Vanadium und Niob mit einer Thermowaage bzw. dem rapid thermal processingBerendes, Antje. January 2004 (has links) (PDF)
Frankfurt (Main), Univ., Diss., 2004.
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Rapid thermal processing of crystalline silicon materials and solar cellsPeters, Stefan. Unknown Date (has links) (PDF)
University, Diss., 2004--Konstanz.
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Design of rapid thermal processing system for Cu(In,Ga)Se₂-based solar cells. / 銅銦鎵硒太陽能電池中白光退火系統的設計 / Design of rapid thermal processing system for Cu(In,Ga)Se₂-based solar cells. / Tong yin jia xi tai yang neng dian chi zhong bai guang tui huo xi tong de she jiJanuary 2009 (has links)
Yang, Shihang = 銅銦鎵硒太陽能電池中白光退火系統的設計 / 楊世航. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2009. / Includes bibliographical references (p. 87-91). / Abstract also in Chinese. / Yang, Shihang = Tong yin jia xi tai yang neng dian chi zhong bai guang tui huo xi tong de she ji / Yang Shihang. / Chapter 1 --- Introduction to Photovoltaics --- p.1 / Chapter 1.1 --- "Developments, markets and forecasts" --- p.1 / Chapter 1.2 --- The physics of solar cells --- p.2 / Chapter 1.2.1 --- Light Absorption --- p.2 / Chapter 1.2.2 --- Charge Carrier Separation --- p.6 / Chapter 1.2.3 --- Solar Cell I-V Characteristics --- p.7 / Chapter 1.3 --- Classifications of Solar Cells --- p.10 / Chapter 1.3.1 --- Crystalline silicon solar cell --- p.10 / Chapter 1.3.2 --- Thin film solar cells --- p.12 / Chapter 1.3.3 --- Organic and polymer solar cells --- p.12 / Chapter 1.4 --- "Cu(In,Ga)Se2 Solar Cells" --- p.13 / Chapter 1.4.1 --- State of the art --- p.13 / Chapter 1.4.2 --- Material properties --- p.14 / Chapter 1.4.3 --- Basic processing steps --- p.15 / Chapter 2 --- Equipment design --- p.24 / Chapter 2.1 --- System design concepts --- p.24 / Chapter 2.2 --- Sample transfer chamber --- p.26 / Chapter 2.3 --- Co-evaporation chamber --- p.28 / Chapter 2.3.1 --- Load-lock chamber --- p.28 / Chapter 2.3.2 --- Co-evaporation chamber --- p.31 / Chapter 2.4 --- Sputtering chambers --- p.34 / Chapter 2.4.1 --- Mo sputtering chamber --- p.34 / Chapter 2.4.2 --- Three targets sputtering chamber --- p.36 / Chapter 2.5 --- Other chambers --- p.38 / Chapter 3 --- Design of Rapid Thermal Processing System --- p.42 / Chapter 3.1 --- Introduction to RTP --- p.42 / Chapter 3.1.1 --- History and current status of RTP --- p.42 / Chapter 3.1.2 --- Advantages of RTP system compared to conventional furnaces --- p.45 / Chapter 3.2 --- Computational simulation for RTP system design --- p.47 / Chapter 3.2.1 --- Introduction to Ansys Fluent --- p.47 / Chapter 3.2.2 --- Model setup steps --- p.54 / Chapter 3.2.3 --- Physical principles --- p.57 / Chapter 3.2.4 --- Models setup and comparisons --- p.62 / Chapter 3.3 --- Rapid thermal processing system --- p.76 / Chapter 3.3.1 --- Se deposition chamber --- p.76 / Chapter 3.3.2 --- Quartz chamber --- p.78 / Chapter 3.3.3 --- Lamp frame --- p.79 / Chapter 4 --- Conclusions --- p.83 / Chapter 4.1 --- RTP heater design --- p.83 / Chapter 4.2 --- Future prospect --- p.83 / Bibliography --- p.87
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Non-invasive thermal profiling of silicon wafer surface during RTP using acoustic and signal processing techniques /Syed, Ahmed Rashid, January 2000 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 2000. / Vita. Includes bibliographical references (leaves 104-108). Available also in a digital version from Dissertation Abstracts.
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