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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

Unsteady Behavior of Electrons and Ions in Plasma Near a Surface

Chang, Chun-Peng 20 July 2010 (has links)
This study uses an magnetohydrodynamics (MHD) model to simulate unsteady one-dimensional transport variables in argon plasma, under low pressure and weak ionization between two planar electrodes suddenly biased by a negative voltage or electric field. Plasma has been widely used in etching, ion implantation, light source, and nuclear fusion, etc. Studying transport processes of plasmas therefore is important. Ignoring magnetic field, collisions between ions and electrons, the computed results in this work shows density, velocity, voltage, electric field, energy and temperature transport phenomenon in different cases. The results give insight by theory and simulation the surfaces behavior in plasma. Keywords: magnetohydrodynamics (MHD), transport variables in sheath,space charge

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