Ultraprecision, single point diamond turning (SPDT) is a tool based machining technology that allows the ability to produce high quality surface finishes on the order of nanometers while meeting tight form tolerances on the order of micrometers. It is generally agreed that surface finish in SPDT is primarily affected by four factors: Tool edge quality, relative vibration between the tool and workpiece, material properties and microstructure, and tool geometry (nose radius and machining parameters) machining. To the author’s knowledge, no work has been done to combine all the factors to study their effect on surface generation in SPDT. This is important given that the factors are highly interdependent. Two diamond tools with nose radius of 12mm were used; however, one of them was chemically honed. Results suggest that the honed tool provides a much better surface finish with a significantly reduced amount of running-in stage tool wear. The cutting edge radius of the diamond tools was measured using a novel 3D confocal laser microscope to analyze the chemical honing process and to measure tool wear. The presence of built-up edge (BUE) is more prominent on the honed tool earlier in its life which results in unpredictable surface roughness to appear sooner than on the regular tool. To understand the dynamics of the machine, a redesign of the tool holder bracket was done to increase stiffness. Modal tests were then performed on it to verify performance improvement. With an understanding of the vibration and its effect on the cutting force, a 400Hz disturbance frequency was detected in the cutting forces. From a 3D scan of the surface, a total of 24 undulations on the surface of the part were observed when the spindle speed was set to 1000RPM The machine was instrumented and a rotordynamic investigation was carried out to determine the cause and nature of the vibration in an effort to reduce it and in so doing improve surface form accuracy. / Thesis / Master of Applied Science (MASc)

Silicon is commonly used in infrared (IR) imaging systems. The surface quality is an important issue in optics manufacturing since surface roughness affects optical performance of imaging systems. Surface quality of an optical component is determined by number of factor, including cutting parameters / cutting speed, depth of cut and feed in radial direction. In this thesis, an experimental study has been performed to investigate the relation between cutting parameters and average roughness of the surface of silicon. In the experiments, silicon specimens, which have a diameter of 50 mm, were face turned by using a 2-axis CNC single point diamond turning machine. The specimens were machined by using either constant spindle speed or constant cutting speed. Two different tools with rake angles of -15 degrees and -25 degrees were used. The attained surfaces were measured by using a white light interferometer, which has a resolution of 0.1nm. The experiments were designed according to the factorial design method, considering cutting parameters. The effects of cutting parameters and tool rake angles on surface quality of silicon were observed. The best average surface roughness obtained was about 1 nm which is quite better than the acceptable average surface roughness level of 25 nm.

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Ultraprecision single point diamond turning is required to produce parts with sub-nanometer surface roughness and sub-micrometer surface profiles tolerances. These parts have applications in the optics industry, where tight form accuracy is required while achieving high surface finish quality. Generally, parts can be polished to achieve the desired finish, but then the form accuracy can easily be lost in the process rendering the part unusable. Currently, most mid to low spatial frequency surface finish errors are inspected offline. This is done by physically removing the workpiece from the machining fixture and mounting the part in a laser interferometer. This action introduces errors in itself through minute differences in the support conditions of the over constrained part on a machine as compared to the mounting conditions used for part measurement. Once removed, the fixture induced stresses and the part’s internal residual stresses relax and change the shape of the generally thin parts machined in these applications. Thereby, the offline inspection provides an erroneous description of the performance of the machine. This research explores the use of a single, high resolution, capacitance sensor to quickly and qualitatively measure the low to mid spatial frequencies on the workpiece surface, while it is mounted in a fixture on a standard ultraprecision single point diamond turning machine after a standard facing operation. Following initial testing, a strong qualitative correlation exists between the surface profiling on a standard offline system and this online measuring system. Despite environmental effects and the effects of the machine on the measurement system, the capacitive system with some modifications and awareness of its measurement method is a viable option for measuring mid to low spatial frequencies on a workpiece surface mounted on an ultraprecision machine with a resolution of 1nm with an error band of ±5nm with a 20kHz bandwidth. / Thesis / Master of Applied Science (MASc)