Metal-semiconductor-metal (MSM) photodetectors are becoming attractive devices for optoelectronic integrated circuits due to their high speed and simplicity. Optoelectronic matrix switches based on MSM detector arrays offer many advantages such as zero-bias off-state, low bias voltage, high speed and large bandwidth. While in many applications the optical input is coupled in through the top surface of the device, optical signals can also be distributed through transparent waveguides that are located below the absorbing detector layer. Such waveguide-coupled detectors will act as optical taps when the coupling between the waveguide and detector layers is well under control. In this thesis, a 4x4 MSM waveguide-coupled optoelectronic matrix switch was demonstrated and analyzed. The strength of the coupling between the waveguide and detector layers was predicted theoretically and confirmed experimentally. Franz-Keldysh effect in this device was also demonstrated. / Thesis / Master of Engineering (ME)