The purpose of this thesis is to study the c-axis inclined ZnO films to produce dual-mode thin-film piezoelectric transducer. The cantilever beam vibration theory as a power generation mode in adopted to verify that the transducer is in suitable for the application in the environment for low-frequency vibration.
In order to develop dual-mode thin-film piezoelectric transducer, this study uses radio-frequency magnetron sputtering method with off-axis growth to deposit ZnO films on Pt/Ti/stainless steel substrate(SUS304), the effects of deposition parameters on the characteristict of ZnO films are studied. Because zinc oxide thin-film is grown with c-axis tilt, so the piezoelectric transducer exhibits longitudinal-mode and shear-mode characteristics. The physical characteristics of ZnO thin films were obtained by the analyses of the scanning electron microscopy (SEM) and X-ray diffraction (XRD) to discuss the surfaces, cross section and crystallization of ZnO thin films. Finally, the vibration test equipment in used for the measurement of electrical properties. The open and loaded voltages of the transducers were obtained by the measurement system. The optimal deposition parameters for ZnO thin films are sputtering pressure of 5 mTorr, RF power of 150W, substrate temperature of room temperature and oxygen concentration of 50%, which were determined by physical characteristics and voltage analysis. Under the optimal parameters, the ZnO thin-films are deposited with maximum shear-mode and tilting angles of 35¢X.The transducer was one-sid loaded with a piece of metal of 0.5 g load to enhance the cantilever vibration amplitude. As the input vibration of 65 Hz and vibration amplitude of 1mm were set, the maximum output power was obtained. The maximum open circuit voltage of 19.4 V was obtained. When the output of the transducers was recetified and filtered through a 1NN5711 Schottky diode bridge rectifier and a 33nF capacitor, the maximum power of 2.05£gW/cm2 was achieved with the load resistance of 5M£[.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0809112-164859 |
| Date | 09 August 2012 |
| Creators | Mao, Chun-Kai |
| Contributors | Ying-Chung Chen, Chien-Jung Huang, Cheng-Tang Pan, Wuu-Wen Lim, Jung-Chuan Chou |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0809112-164859 |
| Rights | user_define, Copyright information available at source archive |
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