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PROJECTED FRINGE PROFILOMETRY USING A SUPERCONTINUUM LIGHT ILLUMINATION FOR MICRO-SCALE MEASUREMENT

Abstract
A projected fringe profilomertry ¡]PFP¡^ using a supercontinuum light illumination for micro-scale measurement is proposed. The supercontinuum light is generated by launching ultra short laser into a highly nonlinear photonic crystal fibers.
The supercontinuum light with the following advantage¡G
¡]1¡^ Depth of the field is very large in the projected system.
¡]2¡^No speckle noise in the illumination system.
Experiment results has shown that using supercontinuum light is superior to other illumination system This study indicates that the proposed measurement scheme could be applied to 3D shape measurements with large depth variation, especially for semi-conductor devices¡Bmicro electro-mechanical devices and biomedical species.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0626106-175611
Date26 June 2006
CreatorsHuang, chia-jeng
ContributorsYue Ou Yang, Wei-Chia Su, Wei-Hung Su
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0626106-175611
Rightsoff_campus_withheld, Copyright information available at source archive

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