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Research on Robust Control of Micromachined Accelerometers

This paper presents the research on the robust control of micromachined accelerometers. First, we present different micromaching techniques and compare, analyze the accelerometers with different methods of signal pick-off. Besides the different methods of signal pick-off(the position detection of the seismic mass) and structure designs, we can enhance the performance such as stability, bandwidth, sensitivity, resolution and dynamic range etc. by suitable feedback controllers. So inside the front part of the paper are the analyses for the controllers of different types of accelerometers so far. Moreover, we design the controllers by robust control in different methods with the model of one specific type of micromachined tunneling accelerometer. Because of the robust controllers, the accelerometers can be stable and have good performance under different environments and uncertainties. At last we analyze and compare the controllers designed by -synthesis and gap metric.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0822100-152645
Date22 August 2000
CreatorsWu, Wei-ming
ContributorsYuan-Fang Chou, Jyh-Horng Chou, An-Kuo Chu, Chien-Hsiang Chao
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0822100-152645
Rightsoff_campus_withheld, Copyright information available at source archive

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