Zhang, Yu. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2009. / Includes bibliographical references (leaves 55-60). / Abstract also in Chinese. / Abstract --- p.i / Acknowledgement --- p.iii / Chapter 1 --- Introduction --- p.1 / Chapter 1.1 --- Background --- p.1 / Chapter 1.2 --- Aim of Research --- p.2 / Chapter 1.3 --- Thesis Organization --- p.3 / Chapter 2 --- Literature Review --- p.4 / Chapter 2.1 --- Carbon Nanotubes in MEMS Devices --- p.4 / Chapter 2.1.1 --- CNT Integration and CNT sensors --- p.4 / Chapter 2.1.2 --- Prior Work in CMNS --- p.6 / Chapter 2.2 --- Overview of Motion Sensors --- p.7 / Chapter 2.2.1 --- Technology Overview --- p.7 / Chapter 2.2.2 --- Categories and Working Principles --- p.9 / Chapter 2.2.3 --- Application --- p.13 / Chapter 2.3 --- Thermal Convective Motion Sensors --- p.14 / Chapter 2.3.1 --- Micro Thermal Flow Sensors --- p.15 / Chapter 2.3.2 --- Research on Thermal Convective Motion Sensors --- p.17 / Chapter 2.3.3 --- Working Principle and Performances --- p.20 / Chapter 3 --- Design and Setup --- p.25 / Chapter 3.1 --- Methodology --- p.25 / Chapter 3.1.1 --- Research Method --- p.25 / Chapter 3.1.2 --- Critical Questions --- p.26 / Chapter 3.2 --- Sensor Chip Design and Fabrication --- p.27 / Chapter 3.2.1 --- Sensor Chip Mask Design --- p.27 / Chapter 3.2.2 --- Fabrication of Sensor Chip --- p.29 / Chapter 3.3 --- Sensor Prototyping --- p.30 / Chapter 3.3.1 --- CNT Deposition --- p.30 / Chapter 3.3.2 --- Sensor Building --- p.32 / Chapter 3.4 --- Setup of Experiment --- p.34 / Chapter 3.4.1 --- Source and Measure --- p.34 / Chapter 3.4.2 --- Acceleration Production --- p.35 / Chapter 4 --- Experiments and Results --- p.39 / Chapter 4.1 --- Hypotheses Verification --- p.39 / Chapter 4.1.1 --- Thermal Detection Using CNT --- p.39 / Chapter 4.1.2 --- Local Heating & Sensing --- p.40 / Chapter 4.2 --- Tilting Test --- p.42 / Chapter 4.2.1 --- Test Result --- p.42 / Chapter 4.2.2 --- Result Discussions --- p.43 / Chapter 4.3 --- Vibration Test --- p.45 / Chapter 4.3.1 --- Test Result --- p.45 / Chapter 4.3.2 --- Result Discussions --- p.52 / Chapter 5 --- Conclusion --- p.53 / Bibliography --- p.55
| Identifer | oai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_326746 |
| Date | January 2009 |
| Contributors | Zhang, Yu., Chinese University of Hong Kong Graduate School. Division of Mechanical and Automation Engineering. |
| Source Sets | The Chinese University of Hong Kong |
| Language | English, Chinese |
| Detected Language | English |
| Type | Text, bibliography |
| Format | print, viii, 60 leaves : ill. (some col.) ; 30 cm. |
| Rights | Use of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/) |
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