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Fabrication of low-cost micro and nano cavities and channels using compact disc technology.

by Li Chong, Victor Kun Wa. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2003. / Includes bibliographical references (leaves 99-101). / Abstracts in English and Chinese. / ABSTRACT --- p.i / 摘要 --- p.iii / ACKNOWLEDGEMENT --- p.v / TABLE OF CONTENTS --- p.vii / LIST OF FIGURES --- p.x / LIST OF TABLES --- p.xv / Chapter 1 --- Introduction --- p.1 / Chapter 1.1 --- CD Manufacturing Technology --- p.1 / Chapter 1.1.1 --- Electroforming --- p.2 / Chapter 1.1.2 --- Computer Numerical Control (CNC) --- p.2 / Chapter 1.1.3 --- Photolithography --- p.4 / Chapter 1.1.4 --- Laser --- p.5 / Chapter 1.2 --- Research Objective --- p.6 / Chapter 1.3 --- Thesis Outline --- p.6 / Chapter 2 --- Conversion Software (AutoGEN) --- p.9 / Chapter 2.1 --- Computer-Aided Design --- p.9 / Chapter 2.2 --- AutoCAD Programming --- p.10 / Chapter 2.3 --- AutoCAD Development System (ADS) --- p.11 / Chapter 2.4 --- AutoCAD Runtime Extension (ARX) --- p.12 / Chapter 2.5 --- AutoLISP Programming --- p.12 / Chapter 2.5.1 --- Advantages of AutoLISP --- p.13 / Chapter 2.6 --- Caltech Intermediate Format (CIF) --- p.14 / Chapter 2.6.1 --- Structure of CIF Format --- p.15 / Chapter 2.7 --- Architecture of Conversion Software --- p.15 / Chapter 2.7.1 --- Stage 1 - AutoGEN (DLTM) Module --- p.16 / Chapter 2.7.2 --- Stage 2 - AutoGEN (DCRM) Module --- p.17 / Chapter 2.8 --- DLTM Input Screen --- p.17 / Chapter 2.9 --- DCRM Data Screen --- p.18 / Chapter 2.10 --- Conversion from 2D to 3D --- p.18 / Chapter 2.11 --- AutoGEN - Geometric Primitive --- p.19 / Chapter 2.12 --- AutoGEN - Geometric Transformation --- p.19 / Chapter 2.13 --- Conversion of Simplified and Complex Drawings --- p.22 / Chapter 3 --- Manufacturing Process --- p.24 / Chapter 3.1 --- Stamper Manufacturing --- p.25 / Chapter 3.2 --- CD Manufacturing --- p.30 / Chapter 3.3 --- Internal Stress of Deposit in Electroforming --- p.34 / Chapter 4 --- CNC Approach --- p.37 / Chapter 4.1 --- Computer-Aided Manufacturing --- p.37 / Chapter 4.2 --- CNC Machining --- p.37 / Chapter 4.2.1 --- Experiment --- p.39 / Chapter 4.3 --- Advantages of CNC Approach --- p.42 / Chapter 4.4 --- Limitations of CNC Approach --- p.42 / Chapter 4.5 --- CNC and Effects of Heat Generated --- p.43 / Chapter 5 --- Photolithography Approach --- p.45 / Chapter 5.1 --- Experiment --- p.47 / Chapter 5.2 --- Channel Analysis --- p.49 / Chapter 6 --- Laser Approach --- p.53 / Chapter 6.1 --- Dual Beam Laser Machine --- p.53 / Chapter 6.2 --- Creation of Pits and Lands --- p.54 / Chapter 6.2.1 --- Experiment --- p.54 / Chapter 6.3 --- Creation of Continuous Channel --- p.56 / Chapter 6.4 --- Procedure of Channel Creation (NA set at a fixed constant) --- p.57 / Chapter 6.4.1 --- Experiment 1 --- p.59 / Chapter 6.4.2 --- Experiment 2 --- p.60 / Chapter 6.4.3 --- Experiment 3 --- p.61 / Chapter 6.5 --- Procedure of Channel Creation (ILV set at a fixed constant) --- p.62 / Chapter 6.5.1 --- Experiment 1 --- p.63 / Chapter 6.5.2 --- Experiment 2 --- p.64 / Chapter 6.5.3 --- Experiment 3 --- p.66 / Chapter 7 --- Photolithography Approach (Enhancement) --- p.68 / Chapter 7.1 --- Creation of High-Aspect-Ratio Channel --- p.68 / Chapter 7.1.1 --- Experiment 1 --- p.76 / Chapter 7.1.2 --- Experiment 2 --- p.80 / Chapter 8 --- Conclusion and Future Proposal --- p.83 / Chapter 8.1 --- Conclusion --- p.83 / Chapter 8.2 --- Future Proposal --- p.86 / APPENDIX --- p.89 / Chapter A.1 --- Additional Information on CNC Approach --- p.88 / Chapter A.2 --- Channel Dimension of Design Mask --- p.89 / Chapter A.3 --- Additional Information on Photolithography Approach --- p.94 / Chapter A.4 --- Additional Information on Laser Approach --- p.95 / BIBLIOGRAPHY --- p.98

Identiferoai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_324375
Date January 2003
ContributorsLi Chong, Victor Kun Wa., Chinese University of Hong Kong Graduate School. Division of Automation and Computer-Aided Engineering.
Source SetsThe Chinese University of Hong Kong
LanguageEnglish, Chinese
Detected LanguageEnglish
TypeText, bibliography
Formatprint, xv, 101 leaves : ill. (some col.) ; 30 cm.
RightsUse of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/)

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