by Chow Wing Yin, Winnie. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2004. / Includes bibliographical references (leaves 74-78). / Abstracts in English and Chinese. / ABSTRACT --- p.i / 摘要 --- p.ii / ACKNOWLEDGEMENTS --- p.iii / TABLE OF CONTENTS --- p.iv / LIST OF FIGURES --- p.vi / LIST OF TABLES --- p.viii / Chapter 1 --- INTRODUCTION --- p.1 / Chapter 1.1 --- Digital Microfluidics --- p.1 / Chapter 1.2 --- Soft Lithography of Polymer --- p.2 / Chapter 2 --- ELECTROCAPILLARY-BASED MICROACTUATION --- p.5 / Chapter 2.1 --- Surface Tension in Microscale --- p.5 / Chapter 2.2 --- thermocapillary-based microactuation --- p.6 / Chapter 2.3 --- electrocapillary-based microactuation --- p.6 / Chapter 2.3.1 --- Continuous Electrowetting (CEW) --- p.7 / Chapter 2.3.2 --- Electrowetting (EW) --- p.8 / Chapter 2.3.3 --- Electrowetting-On-Dielectric (EWOD) --- p.11 / Chapter 3 --- SOFT LITHOGRAPHY --- p.14 / Chapter 3.1 --- Rapid Prototyping --- p.15 / Chapter 3.2 --- Replica Molding --- p.16 / Chapter 3.2.1 --- Pouring Method --- p.17 / Chapter 3.2.2 --- Sandwich Molding Method --- p.17 / Chapter 3.2.3 --- Spin On Method --- p.18 / Chapter 3.3 --- Sealing --- p.20 / Chapter 3.3.1 --- Reversible Sealing --- p.20 / Chapter 3.3.2 --- Irreversible Sealing --- p.20 / Chapter 3.4 --- Multilayer Fabrication --- p.21 / Chapter 4 --- METAL DEPOSITION --- p.22 / Chapter 4.1 --- Gold Deposition by Sputtering Method --- p.22 / Chapter 4.1.1 --- Gold Deposition on PMMA --- p.22 / Chapter 4.1.2 --- Gold Deposition on PDMS --- p.23 / Chapter 4.2 --- ITO Deposition by Sputtering Method --- p.26 / Chapter 4.2.1 --- Image Patterning of ITO --- p.27 / Chapter 5 --- POLYMER-BASED SUBSTRATES BONDING USING PDMS --- p.29 / Chapter 5.1 --- Design of Microfluidic System --- p.29 / Chapter 5.1.1 --- PDMS --- p.29 / Chapter 5.1.2 --- Design of the Vortex Micropump --- p.30 / Chapter 5.2 --- Fabrication of Microfluidic System --- p.31 / Chapter 5.2.1 --- Micro Impeller Fabrication Process --- p.31 / Chapter 5.2.2 --- Micro Patterning of PMMA by Hot Embossing Technique --- p.32 / Chapter 5.2.3 --- Assembly of Micropump by PDMS Bonding Process --- p.34 / Chapter 5.3 --- Experimental Results --- p.36 / Chapter 5.3.1 --- Tensile Bonding Test --- p.36 / Chapter 5.3.2 --- Leakage Test --- p.38 / Chapter 6 --- DIGITAL MICROFLUIDICS IN MICROCHANNEL --- p.39 / Chapter 6.1 --- Digital Microfluidics --- p.39 / Chapter 6.2 --- Design of the MicroChannel --- p.39 / Chapter 6.3 --- Materials of the MicroChannel --- p.42 / Chapter 6.3.1 --- Substrate --- p.42 / Chapter 6.3.2 --- Adhesion Layer --- p.42 / Chapter 6.3.3 --- Electrode --- p.43 / Chapter 6.3.4 --- Dielectric Layer --- p.43 / Chapter 6.4 --- Fabrication of the MicroChannel --- p.44 / Chapter 7 --- EXPERIMENTAL RESULTS --- p.46 / Chapter 7.1 --- ewod on pdms layer --- p.46 / Chapter 7.2 --- PDMS Parallel Plate Channel --- p.48 / Chapter 7.2.1 --- Contact Angle --- p.49 / Chapter 7.3 --- Parylene C Parallel Plate Channel --- p.52 / Chapter 7.4 --- Sealed pdms MicroChannel --- p.54 / Chapter 7.5 --- Driving Pressure --- p.55 / Chapter 7.6 --- microchannel in the vertical position --- p.57 / Chapter 8 --- FUTURE WORK --- p.60 / Chapter 8.1. --- Digital Microfluidic Circuit Design --- p.60 / Chapter 8.1.1. --- Electrodes Design --- p.61 / Chapter 8.2. --- Fabrication Process --- p.63 / Chapter 9 --- SUMMARY --- p.64 / APPENDIX A --- p.67 / BIBLIOGRAPHY --- p.74

Lam Raymond Hiu-wai. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2005. / Includes bibliographical references (leaves 87-91). / Abstracts in English and Chinese. / Abstract --- p.ii / Abstract (Chinese) --- p.iv / Acknowledgment --- p.v / Contents --- p.vii / List of Figures --- p.ix / Introduction --- p.1 / Chapter 1-1 --- Overview of MEMS and Microfluidic Technologies --- p.1 / Chapter 1-1-1 --- Microelectromechanical Systems (MEMS) --- p.1 / Chapter 1-1-2 --- Microfluidic Systems --- p.2 / Chapter 1-2 --- Literture Review on Microfluidic Devices --- p.4 / Chapter 1-2-1 --- Micropumps --- p.4 / Chapter 1-2-2 --- Microvalves --- p.5 / Chapter 1-2-3 --- Micromixers --- p.5 / Chapter 1-2-3 --- Integration of Multiple Devices: Microfluidic Systems --- p.6 / Chapter 1-3 --- Motivation and Research Objectives --- p.7 / Chapter 1-4 --- Thesis Outline --- p.9 / Fluid Flow in MicroChannel --- p.11 / Chapter 2-1 --- Velocity Profile in a MicroChannel --- p.11 / Chapter 2-2 --- Pressure Dissipation by Laminar Friction --- p.16 / Chapter 2-3 --- Bubble Filtering --- p.20 / Microfluidic Centrifugal Pumping --- p.23 / Chapter 3-1 --- Vortex Micropump --- p.23 / Chapter 3-1-1 --- Operation Principle and Device Design --- p.23 / Chapter 3-1-2 --- Alternative Pump Design --- p.25 / Chapter 3-2 --- Micropump Fabrication --- p.27 / Chapter 3-2-1 --- Electroplated Impeller --- p.27 / Chapter 3-2-2 --- SU-8 Impeller --- p.30 / Chapter 3-2-3 --- Micropump Fabricated by Micro Molding Replication Technique --- p.32 / Chapter 3-2-4 --- Inverted-chamber Vortex Micropump --- p.35 / Chapter 3-3 --- Elementary Centrifugal Pump Theory --- p.36 / Chapter 3-3-1 --- Pumping Pressure and Discharge --- p.36 / Chapter 3-3-2 --- Fluid Horsepower --- p.38 / Chapter 3-3-3 --- Effect of Blade Angle --- p.40 / Chapter 3-4 --- Pumping Specification --- p.41 / Mixing Based on Mechanical Vibration --- p.47 / Chapter 4-1 --- Micromixer Design --- p.47 / Chapter 4-1-1 --- Oscillating Diaphragm Actuated Microfluidic Mixing --- p.47 / Chapter 4-1-2 --- Flat-surface Diaphragm Active Micromixer --- p.48 / Chapter 4-1-3 --- Mixing Enhancement by Pillared Chamber Profile --- p.50 / Chapter 4-2 --- Fabrication Process --- p.52 / Chapter 4-2-1 --- Flat-surface Diaphragm Active Micromixer --- p.52 / Chapter 4-2-2 --- Pillared-surface Diaphragm Active Micromixer --- p.54 / Chapter 4-3 --- Experimental Analysis of Mixing Performance --- p.56 / Microfluidic Flow Planning System --- p.63 / Chapter 5-1 --- System Design --- p.63 / Chapter 5-1-1 --- Chip Design and Fabrication --- p.63 / Chapter 5-1-2 --- Digital Controlling System --- p.65 / Chapter 5-1-3 --- Operation Mechanism --- p.67 / Chapter 5-2 --- Experimental Results --- p.69 / Microfluidic Mixing Module Array --- p.70 / Chapter 6-1 --- System Configuration --- p.70 / Chapter 6-1-1 --- Microfluidic Chip Design --- p.70 / Chapter 6-1-2 --- Backward Flow Elimination by Tesla Valve --- p.72 / Chapter 6-1-3 --- System Controller and Operation Mechanism --- p.75 / Chapter 6-2 --- Fabrication --- p.76 / Chapter 6-3 --- Mixing Ratio Estimation --- p.78 / Chapter 6-4 --- Experimental Results --- p.79 / Conclusion --- p.81 / Future Work --- p.83 / Chapter 8-1 --- Self Driven Microfluidic Flow Planning System --- p.83 / Chapter 8-2 --- Mixing Enhancement by Cavitation Microstreaming --- p.84 / References --- p.87 / Bonding Test on UV-curing Epoxy Resin --- p.92 / Circuit Schematic of Digital Controller --- p.94 / Advanced Digital Microfluidic Controller --- p.97

Thesis (Ph. D.)--University of Washington, 2003. / Vita. Includes bibliographical references (leaves 98-101).

Thesis (PhD) - Swinburne University of Technology, Industrial Research Institute Swinburne - 2006. / A thesis submitted in fulfilment of the requirements for the degree of Doctor of Philosophy in the school of Advanced Studies at Industrial Research Institute Swinburne, Swinburne University of Technology - 2006. Typescript. "December 2006". Includes bibliographical references (p. 233-242).

One of the fundamental tasks confronting engineers is the transmission and control of energy. The engineer, faced with this requirement and influenced by details of a specific, situation, his education and experience, and the customer's desires, will probably select a mechanical, electrical, or electro-mechanical system. Often a better choice exists—the use of a fluid power system. Fluid power systems employ pressurized fluids, liquids and/or gases, to transmit and control energy. Hydraulic systems use liquids, usually special oils or treated water. Pneumatic. systems use air or other gases. Both types are versatile and find a wide range of application.

by Li Chong, Victor Kun Wa. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2003. / Includes bibliographical references (leaves 99-101). / Abstracts in English and Chinese. / ABSTRACT --- p.i / 摘要 --- p.iii / ACKNOWLEDGEMENT --- p.v / TABLE OF CONTENTS --- p.vii / LIST OF FIGURES --- p.x / LIST OF TABLES --- p.xv / Chapter 1 --- Introduction --- p.1 / Chapter 1.1 --- CD Manufacturing Technology --- p.1 / Chapter 1.1.1 --- Electroforming --- p.2 / Chapter 1.1.2 --- Computer Numerical Control (CNC) --- p.2 / Chapter 1.1.3 --- Photolithography --- p.4 / Chapter 1.1.4 --- Laser --- p.5 / Chapter 1.2 --- Research Objective --- p.6 / Chapter 1.3 --- Thesis Outline --- p.6 / Chapter 2 --- Conversion Software (AutoGEN) --- p.9 / Chapter 2.1 --- Computer-Aided Design --- p.9 / Chapter 2.2 --- AutoCAD Programming --- p.10 / Chapter 2.3 --- AutoCAD Development System (ADS) --- p.11 / Chapter 2.4 --- AutoCAD Runtime Extension (ARX) --- p.12 / Chapter 2.5 --- AutoLISP Programming --- p.12 / Chapter 2.5.1 --- Advantages of AutoLISP --- p.13 / Chapter 2.6 --- Caltech Intermediate Format (CIF) --- p.14 / Chapter 2.6.1 --- Structure of CIF Format --- p.15 / Chapter 2.7 --- Architecture of Conversion Software --- p.15 / Chapter 2.7.1 --- Stage 1 - AutoGEN (DLTM) Module --- p.16 / Chapter 2.7.2 --- Stage 2 - AutoGEN (DCRM) Module --- p.17 / Chapter 2.8 --- DLTM Input Screen --- p.17 / Chapter 2.9 --- DCRM Data Screen --- p.18 / Chapter 2.10 --- Conversion from 2D to 3D --- p.18 / Chapter 2.11 --- AutoGEN - Geometric Primitive --- p.19 / Chapter 2.12 --- AutoGEN - Geometric Transformation --- p.19 / Chapter 2.13 --- Conversion of Simplified and Complex Drawings --- p.22 / Chapter 3 --- Manufacturing Process --- p.24 / Chapter 3.1 --- Stamper Manufacturing --- p.25 / Chapter 3.2 --- CD Manufacturing --- p.30 / Chapter 3.3 --- Internal Stress of Deposit in Electroforming --- p.34 / Chapter 4 --- CNC Approach --- p.37 / Chapter 4.1 --- Computer-Aided Manufacturing --- p.37 / Chapter 4.2 --- CNC Machining --- p.37 / Chapter 4.2.1 --- Experiment --- p.39 / Chapter 4.3 --- Advantages of CNC Approach --- p.42 / Chapter 4.4 --- Limitations of CNC Approach --- p.42 / Chapter 4.5 --- CNC and Effects of Heat Generated --- p.43 / Chapter 5 --- Photolithography Approach --- p.45 / Chapter 5.1 --- Experiment --- p.47 / Chapter 5.2 --- Channel Analysis --- p.49 / Chapter 6 --- Laser Approach --- p.53 / Chapter 6.1 --- Dual Beam Laser Machine --- p.53 / Chapter 6.2 --- Creation of Pits and Lands --- p.54 / Chapter 6.2.1 --- Experiment --- p.54 / Chapter 6.3 --- Creation of Continuous Channel --- p.56 / Chapter 6.4 --- Procedure of Channel Creation (NA set at a fixed constant) --- p.57 / Chapter 6.4.1 --- Experiment 1 --- p.59 / Chapter 6.4.2 --- Experiment 2 --- p.60 / Chapter 6.4.3 --- Experiment 3 --- p.61 / Chapter 6.5 --- Procedure of Channel Creation (ILV set at a fixed constant) --- p.62 / Chapter 6.5.1 --- Experiment 1 --- p.63 / Chapter 6.5.2 --- Experiment 2 --- p.64 / Chapter 6.5.3 --- Experiment 3 --- p.66 / Chapter 7 --- Photolithography Approach (Enhancement) --- p.68 / Chapter 7.1 --- Creation of High-Aspect-Ratio Channel --- p.68 / Chapter 7.1.1 --- Experiment 1 --- p.76 / Chapter 7.1.2 --- Experiment 2 --- p.80 / Chapter 8 --- Conclusion and Future Proposal --- p.83 / Chapter 8.1 --- Conclusion --- p.83 / Chapter 8.2 --- Future Proposal --- p.86 / APPENDIX --- p.89 / Chapter A.1 --- Additional Information on CNC Approach --- p.88 / Chapter A.2 --- Channel Dimension of Design Mask --- p.89 / Chapter A.3 --- Additional Information on Photolithography Approach --- p.94 / Chapter A.4 --- Additional Information on Laser Approach --- p.95 / BIBLIOGRAPHY --- p.98

The work presented in this dissertation is focused on integrating organic transistor based circuits with planar microfluidic devices for discrete droplet handling. Discrete droplet based microfluidic systems are being increasingly investigated for lab-on-a-chip type applications. An essential component of a lab-on-a-chip system is the drive circuitry that runs the system. Conventionally, a variety of schemes have been implemented for acting as drivers for microfluidic devices. Organic transistor based circuits offer a viable and cost-effective option for serving as drivers for planar microfluidic devices. The magnitudes of voltages and the time scales involved in implementing these discrete droplet based systems are in good agreement with the values of voltages that can be reliably generated using organic transistor based circuits. Thus, the union of two cost-effective technologies with the ability to perform a wide variety of functions in a lab-on-a-chip type system would be highly desirable. A simple, planar microfluidic device with an open structure is implemented on a glass substrate. The device is optimized for reliable and repeatable performance using Cytop as the insulating dielectric. Cytop provides a highly hydrophobic surface for reversible wetting to take place on the application of electrical voltage. Various organic transistor based circuits are fabricated using Pentacene as the p-type semiconducting material and N,N'-bis(n-octyl)-dicyanoperylene-3,4:9,10-bis(dicarboximide) (PDI-8CN₂) as the n-type material. A top contact inverter, which is the most basic complementary metal oxide semiconductor circuit is fabricated and used as the driver for the planar microfluidic device. The output voltages generated by the inverter are used to actuate discrete water droplets over adjacent electrodes and also to perform merging of droplets, which is another basic functional operation that is performed on lab-on-a-chip type assemblies. Reliable and repeatable performance of the microfluidic device as well as the CMOS circuit is achieved. This work presents the first implementation of a discrete droplet based device driven by electrical voltages generated by an organic transistor based circuit. The physical mechanisms that are responsible for the motion of droplets have been investigated and contributions from electrowetting forces and dielectrophoretic forces have been resolved.

No description available.

Thesis (Ph. D.)--University of Texas at Austin, 2007. / Vita. Includes bibliographical references.

Thesis (Ph.D)--Mechanical Engineering, Georgia Institute of Technology, 2009. / Committee Chair: Glezer, Ari; Committee Member: Alben, Silas; Committee Member: Joshi, Yogendra; Committee Member: Smith, Marc; Committee Member: Webster, Donald. Part of the SMARTech Electronic Thesis and Dissertation Collection.