This paper presents the research on the robust control of micromachined accelerometers. First, we present different micromaching techniques and compare, analyze the accelerometers with different methods of signal pick-off. Besides the different methods of signal pick-off(the position detection of the seismic mass) and structure designs, we can enhance the performance such as stability, bandwidth, sensitivity, resolution and dynamic range etc. by suitable feedback controllers. So inside the front part of the paper are the analyses for the controllers of different types of accelerometers so far. Moreover, we design the controllers by robust control in different methods with the model of one specific type of micromachined tunneling accelerometer. Because of the robust controllers, the accelerometers can be stable and have good performance under different environments and uncertainties. At last we analyze and compare the controllers designed by -synthesis and gap metric.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0822100-152645 |
| Date | 22 August 2000 |
| Creators | Wu, Wei-ming |
| Contributors | Yuan-Fang Chou, Jyh-Horng Chou, An-Kuo Chu, Chien-Hsiang Chao |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0822100-152645 |
| Rights | off_campus_withheld, Copyright information available at source archive |
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