Periodic mesoporous material is a class of solids that possess periodically ordered pores with sizes of 2–50 nm. After a brief introduction to the synthesis, structure, property and function of periodic mesoporous materials in general in Chapter 1, a specific type of periodic mesoporous material, periodic mesoporous organosilica (PMO), is examined in detail in Chapter 2. Chapter 3 and Chapter 4 focus on the application of periodic mesoporous organosilica as low-dielectric-constant (low-k) insulating materials on semiconductor microprocessors. Specifically, Chapter 3 introduces a vapor-phase delivery technique, vacuum-assisted aerosol deposition, for the synthesis of PMO thin films; Chapter 4 studies one property crucial for the application of low-k PMO in detail—hydrophobicity. The focus of Chapter 5 turns to a novel sandwich-structured
nanocomposite made of periodic mesoporous silica and graphene oxide. In Chapter 6,
progress towards the synthesis of periodic mesoporous quartz is summarized. A
conclusion and an outlook are given in Chapter 7.
| Identifer | oai:union.ndltd.org:TORONTO/oai:tspace.library.utoronto.ca:1807/29901 |
| Date | 31 August 2011 |
| Creators | Wang, Wendong |
| Contributors | Ozin, Geoffrey Alan |
| Source Sets | University of Toronto |
| Language | en_ca |
| Detected Language | English |
| Type | Thesis |
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