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Investigation Of Electromigration And Stress Induced Surface Dynamics On The Interconnect By Computer Simulation

Purpose of this work is to provide a comprehensive picture of thin film (interconnect) and solid
droplet surface evolution under the several external applied forces with anisotropic physical
properties so that one can eventually be able to predict main reasons and conditions under
which stability of surface is defined.
A systematic study based on the self-consistent dynamical simulations is presented for the
spontaneous surface evolution of an thin film and isolated thin solid droplet on a rigid substrate,
which is driven by the surface drift diffusion induced by the anisotropic diffusivity, the
anisotropic capillary forces (surface stiffness) and mismatch stresses under electron winding.
The effect of surface free energy anisotropies (weak and strong (anomalous)) on the development
kinetics of the Stranski-Krastanow island type morphology are studied. Although,
various tilt angles and anisotropy constants were considered during simulations, the main emphasis
was given on the effect of rotational symmetries associated with the surface Helmholtz
free energy topography in 2D space.
The investigations of dynamics of surface roughness on concurrent actions of the appliedelasto- and electro- static fields clearly indicate that applied misfit stress level is highly important
effect on resultant surface form which may be smooth wave like or crack like. The
droplet simulations revealed the formation of an extremely thin wetting layer during the development
of the bell-shaped Stranski-Krastanow island through the mass accumulation at
the central region of the droplet via surface drift-diffusion. The developments in the peak
height, in the extension of in the wetting layer beyond the domain boundaries, and the change
in triple junction contact angle, one clearly observes that these quantities are reaching certain
saturation limits or plateaus, when the growth mode turned-off. Islanding differences for
weak anisotropy constant levels and the strong (anomalous) anisotropy constant domains are
discussed.

Identiferoai:union.ndltd.org:METU/oai:etd.lib.metu.edu.tr:http://etd.lib.metu.edu.tr/upload/12613146/index.pdf
Date01 March 2011
CreatorsCelik, Aytac
ContributorsOgurtani, Tarik Omer
PublisherMETU
Source SetsMiddle East Technical Univ.
LanguageEnglish
Detected LanguageEnglish
TypePh.D. Thesis
Formattext/pdf
RightsTo liberate the content for public access

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