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High density and high reliability thin film embedded capacitors on organic and silicon substrates

Thesis (M.S.)--Materials Science and Engineering, Georgia Institute of Technology, 2009. / Committee Chair: Tummala Rao; Committee Member: Pulugurtha Raj; Committee Member: Wong C P. Part of the SMARTech Electronic Thesis and Dissertation Collection.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/430496227
Date January 2008
CreatorsKumar, Manish.
PublisherAtlanta, Ga. : Georgia Institute of Technology,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology:

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