Metallic thin films consisting of separated nanostructures are fabricated by evaporative glancing
angle deposition at room temperature. The columnar microstructure of the Ti and Cr columns is
investigated by high resolution transmission electron microscopy and selective area electron
diffraction. The morphology of the sculptured metallic films is studied by scanning electron
microscopy. It is found that tilted Ti and Cr columns grow with a single crystalline morphology,
while upright Cr columns are polycrystalline. Further, the influence of continuous substrate
rotation on the shaping of Al, Ti, Cr and Mo nanostructures is studied with view to surface
diffusion and the shadowing effect. It is observed that sculptured metallic thin films deposited
without substrate rotation grow faster compared to those grown with continuous substrate
rotation. A theoretical model is provided to describe this effect
| Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:84933 |
| Date | 25 April 2023 |
| Creators | Liedtke, S., Grüner, Ch., Lotnyk, A., Rauschenbach, Bernd |
| Publisher | IOP Publishing |
| Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
| Language | English |
| Detected Language | English |
| Type | info:eu-repo/semantics/publishedVersion, doc-type:article, info:eu-repo/semantics/article, doc-type:Text |
| Rights | info:eu-repo/semantics/openAccess |
| Relation | 1361-6528, 385604 |
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