The project has been carried out at, and in association with, Micronic Laser Systems AB in Täby, Sweden. Micronic Laser Systems, manufacture laser pattern generators for the semiconductor and display markets. Laser pattern generators are used to create photomasks, which are a key component in the microlithographic process of manufacturing microchips and displays. An essential problem to all modern semiconductor manufacturing is the constantly decreasing sizes of features and increasing use of resolution enhancement techniques (RET), leading to ever growing sizes of datasets describing the semiconductors. When sizes of datasets reach magnitudes of hundreds of gigabytes, visualisation, navigation and editing of any such dataset becomes extremely difficult. As of today this problem has no satisfying solution. The project aims at the proposal of a geometry engine that effectively can deal with the evergrowing sizes of modern semiconductor lithography. This involves a new approach to handling data, a new format for spatial description of the datasets, hardware accelerated rendering and support for multiprocessor and distributed systems. The project has been executed without implying changes to existing data formats and the resulting application is executable on Micronics currently existing hardware platforms. The performance of the new viewer system surpasses any old implementation by a varying factor. If rendering speed is the comparative factor, the new system is about 10-20 times faster than its old counterparts. In some cases, when hard disk access speed is the limiting factor, the new implementation is only slightly faster or as fast. And finally, spatial indexing allow some operations that previously lasted several hours, to complete in a few seconds, by eliminating all unnecessary disk-reading operations.
| Identifer | oai:union.ndltd.org:UPSALLA1/oai:DiVA.org:liu-2684 |
| Date | January 2004 |
| Creators | Kempe, Marcus, Åbjörnsson, Carl |
| Publisher | Linköpings universitet, Institutionen för teknik och naturvetenskap, Linköpings universitet, Institutionen för teknik och naturvetenskap, Institutionen för teknik och naturvetenskap |
| Source Sets | DiVA Archive at Upsalla University |
| Language | English |
| Detected Language | English |
| Type | Student thesis, info:eu-repo/semantics/bachelorThesis, text |
| Format | application/pdf |
| Rights | info:eu-repo/semantics/openAccess |
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