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Synthesis and characterization of ultrathin HfO₂ gate dielectrics. / Synthesis & characterization of ultrathin HfO₂ gate dielectrics

Wang Lei. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2006. / Includes bibliographical references. / Abstracts in English and Chinese. / List of Figures --- p.vi / Chapter Chapter 1 --- Introduction --- p.1 / Chapter 1.1 --- Scaling issues of Metal-Oxide-Semiconductor field effect transistor --- p.1 / Chapter 1.2 --- Alternative high-k gate dielectrics --- p.4 / Chapter 1.3 --- Overview of this thesis --- p.9 / References --- p.10 / Chapter Chapter 2 --- Deposition and characterization techniques for ultrathin HfO2 films --- p.11 / Chapter 2.1 --- Introduction --- p.11 / Chapter 2.2 --- Ultrathin Hf02 Films Growth and Post Deposition Modification --- p.11 / Chapter 2.2.1 --- Ultrahigh Vacuum Electron-beam Evaporation --- p.11 / Chapter 2.2.2 --- High Concentration Ozone Annealing --- p.12 / Chapter 2.2.3 --- Plasma Immersion Ion Implantation --- p.14 / Chapter 2.2.4 --- Rapid Thermal Annealing --- p.16 / Chapter 2.3 --- Compositional Characterization Techniques --- p.17 / Chapter 2.3.1 --- X-ray Photoelectron Spectroscopy --- p.17 / Chapter 2.3.2 --- Rutherford Backscattering Spectrometry --- p.18 / Chapter 2.4 --- Structural and Surface Morphological Characterization Techniques --- p.19 / Chapter 2.4.1 --- High-Resolution Transmission Electron Microscopy --- p.19 / Chapter 2.4.2 --- Ultrahigh Vacuum Scanning Tunneling Microscopy --- p.20 / Chapter 2.4.3 --- Ultrahigh Vacuum Atomic Force Microscopy --- p.22 / Chapter 2.5 --- Electrical Characterization --- p.24 / Chapter 2.5.1 --- Capacitance-voltage (C-V) Measurement --- p.24 / Chapter 2.5.2 --- Current-voltage (I-V) Measurement --- p.25 / References --- p.26 / Chapter Chapter 3 --- Control of interfacial silicate between Hf and SiO2 by high concentration ozone --- p.27 / Chapter 3.1 --- Introduction --- p.27 / Chapter 3.2 --- Experimental procedure --- p.28 / Chapter 3.3 --- Results and discussion --- p.29 / Chapter 3.4 --- Conclusion --- p.35 / References --- p.36 / Chapter Chapter 4 --- Electrical characteristics of postdepositon annealed ultrathin Hf02 films --- p.37 / Chapter 4.1 --- Introduction --- p.37 / Chapter 4.2 --- Capacitance of gate stack in metal-insulator-semiconductor structure --- p.38 / Chapter 4.3 --- Electrical characteristics of ultrathin HfO2 films by high temperature Ozone oxidation --- p.39 / Chapter 4.4 --- Electrical and structural properties of ultrathin HfO2 films by high temperature rapid thermal annealing --- p.46 / Chapter 4.5 --- Conclusion --- p.48 / References --- p.50 / Chapter Chapter 5 --- Effect of nitrogen incorporation on thermal stability of ultrathin Hf02 films --- p.51 / Chapter 5.1 --- Introduction --- p.51 / Chapter 5.2 --- Experimental procedure --- p.52 / Chapter 5.3 --- Results and discussion --- p.52 / Chapter 5.4 --- Conclusion --- p.58 / References --- p.59 / Chapter Chapter 6 --- Local characterization of ultrathin HfO2 films by in-situ Ultrahigh Vacuum Scanning Probe Microscopy --- p.61 / Chapter 6.1 --- Introduction --- p.61 / Chapter 6.2 --- Experimental procedure --- p.62 / Chapter 6.3 --- Morphology and structure of initial growth of HfO2 --- p.63 / Chapter 6.4 --- Local characterization of ultrathin HfO2 films by in-situ UHV-STM --- p.66 / Chapter 6.5 --- UHV c-AFM study of leakage path evolution in ultrathin Hf02 films --- p.71 / Chapter 6.6 --- Conclusion --- p.72 / References --- p.73 / Chapter Chapter 7 --- Conclusion --- p.74 / Publications --- p.76

Identiferoai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_325631
Date January 2006
ContributorsWang, Lei., Chinese University of Hong Kong Graduate School. Division of Electronic Engineering.
Source SetsThe Chinese University of Hong Kong
LanguageEnglish, Chinese
Detected LanguageEnglish
TypeText, bibliography
Formatprint, xi, 77 leaves : ill. ; 30 cm.
RightsUse of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/)

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