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Reactive High Power Impulse Magnetron Sputtering of Zinc Oxide for Thin Film Transistor Applications

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Identiferoai:union.ndltd.org:OhioLink/oai:etd.ohiolink.edu:dayton1429028518
Date27 May 2015
CreatorsReed, Amber Nicole
PublisherUniversity of Dayton / OhioLINK
Source SetsOhiolink ETDs
LanguageEnglish
Detected LanguageEnglish
Typetext
Sourcehttp://rave.ohiolink.edu/etdc/view?acc_num=dayton1429028518
Rightsunrestricted, This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws.

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